GB0614499D0 - Ion Deposition Apparatus - Google Patents

Ion Deposition Apparatus

Info

Publication number
GB0614499D0
GB0614499D0 GB0614499A GB0614499A GB0614499D0 GB 0614499 D0 GB0614499 D0 GB 0614499D0 GB 0614499 A GB0614499 A GB 0614499A GB 0614499 A GB0614499 A GB 0614499A GB 0614499 D0 GB0614499 D0 GB 0614499D0
Authority
GB
United Kingdom
Prior art keywords
deposition apparatus
ion deposition
ion
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0614499A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Priority to GB0614499A priority Critical patent/GB0614499D0/en
Publication of GB0614499D0 publication Critical patent/GB0614499D0/en
Priority to JP2009520032A priority patent/JP5313893B2/en
Priority to DE602007011938T priority patent/DE602007011938D1/en
Priority to CN2007800274921A priority patent/CN101490792B/en
Priority to PCT/GB2007/002537 priority patent/WO2008009889A1/en
Priority to US12/309,464 priority patent/US8425741B2/en
Priority to AT07766170T priority patent/ATE495540T1/en
Priority to EP07766170A priority patent/EP2044609B1/en
Ceased legal-status Critical Current

Links

GB0614499A 2006-07-20 2006-07-21 Ion Deposition Apparatus Ceased GB0614499D0 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GB0614499A GB0614499D0 (en) 2006-07-21 2006-07-21 Ion Deposition Apparatus
JP2009520032A JP5313893B2 (en) 2006-07-20 2007-07-06 Ion deposition equipment
DE602007011938T DE602007011938D1 (en) 2006-07-20 2007-07-06 ION SEPARATION DEVICE
CN2007800274921A CN101490792B (en) 2006-07-20 2007-07-06 Ion deposition apparatus
PCT/GB2007/002537 WO2008009889A1 (en) 2006-07-20 2007-07-06 Ion deposition apparatus
US12/309,464 US8425741B2 (en) 2006-07-20 2007-07-06 Ion deposition apparatus having rotatable carousel for supporting a plurality of targets
AT07766170T ATE495540T1 (en) 2006-07-20 2007-07-06 ION SEPARATION DEVICE
EP07766170A EP2044609B1 (en) 2006-07-20 2007-07-06 Ion deposition apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0614499A GB0614499D0 (en) 2006-07-21 2006-07-21 Ion Deposition Apparatus

Publications (1)

Publication Number Publication Date
GB0614499D0 true GB0614499D0 (en) 2006-08-30

Family

ID=36998483

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0614499A Ceased GB0614499D0 (en) 2006-07-20 2006-07-21 Ion Deposition Apparatus

Country Status (3)

Country Link
AT (1) ATE495540T1 (en)
DE (1) DE602007011938D1 (en)
GB (1) GB0614499D0 (en)

Also Published As

Publication number Publication date
ATE495540T1 (en) 2011-01-15
DE602007011938D1 (en) 2011-02-24

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)