GB0522398D0 - Apparatus for and method of detecting the phase of a wavefront - Google Patents

Apparatus for and method of detecting the phase of a wavefront

Info

Publication number
GB0522398D0
GB0522398D0 GBGB0522398.7A GB0522398A GB0522398D0 GB 0522398 D0 GB0522398 D0 GB 0522398D0 GB 0522398 A GB0522398 A GB 0522398A GB 0522398 D0 GB0522398 D0 GB 0522398D0
Authority
GB
United Kingdom
Prior art keywords
wavefront
detecting
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB0522398.7A
Other versions
GB2431986A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford University Innovation Ltd
Original Assignee
Oxford University Innovation Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oxford University Innovation Ltd filed Critical Oxford University Innovation Ltd
Priority to GB0522398A priority Critical patent/GB2431986A/en
Publication of GB0522398D0 publication Critical patent/GB0522398D0/en
Priority to PCT/GB2006/004070 priority patent/WO2007052019A1/en
Publication of GB2431986A publication Critical patent/GB2431986A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J9/0215Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
GB0522398A 2005-11-03 2005-11-03 Detecting the local slope and orientation of a wavefront from the changes in an interference pattern caused by the rotation of a shearing element Withdrawn GB2431986A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB0522398A GB2431986A (en) 2005-11-03 2005-11-03 Detecting the local slope and orientation of a wavefront from the changes in an interference pattern caused by the rotation of a shearing element
PCT/GB2006/004070 WO2007052019A1 (en) 2005-11-03 2006-11-01 Apparatus for and method of detecting the phase of a wavefront

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0522398A GB2431986A (en) 2005-11-03 2005-11-03 Detecting the local slope and orientation of a wavefront from the changes in an interference pattern caused by the rotation of a shearing element

Publications (2)

Publication Number Publication Date
GB0522398D0 true GB0522398D0 (en) 2005-12-14
GB2431986A GB2431986A (en) 2007-05-09

Family

ID=35516243

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0522398A Withdrawn GB2431986A (en) 2005-11-03 2005-11-03 Detecting the local slope and orientation of a wavefront from the changes in an interference pattern caused by the rotation of a shearing element

Country Status (2)

Country Link
GB (1) GB2431986A (en)
WO (1) WO2007052019A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6430791B2 (en) * 2014-11-25 2018-11-28 Kddi株式会社 Optical member and optical fiber evaluation apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3694088A (en) * 1971-01-25 1972-09-26 Bell Telephone Labor Inc Wavefront measurement
EP0539571A4 (en) * 1991-05-14 1993-12-15 Blue Sky Research, Inc. Dynamic shearing interferometer
JPH08304229A (en) * 1995-05-09 1996-11-22 Ricoh Co Ltd Method and instrument for measuring refractive index distribution of optical element
TW524966B (en) * 1998-02-05 2003-03-21 Nat Science Council Image capturing type optical wavefront measurement device
JP3878107B2 (en) * 2002-11-06 2007-02-07 株式会社日立ハイテクノロジーズ Defect inspection method and apparatus
EP1590696A2 (en) * 2003-01-28 2005-11-02 Oraxion Full-filled optical measurements of surface properties of panels, substrates and wafers

Also Published As

Publication number Publication date
GB2431986A (en) 2007-05-09
WO2007052019A1 (en) 2007-05-10

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)