GB0520694D0 - Positive displacement pumping chamber - Google Patents

Positive displacement pumping chamber

Info

Publication number
GB0520694D0
GB0520694D0 GB0520694A GB0520694A GB0520694D0 GB 0520694 D0 GB0520694 D0 GB 0520694D0 GB 0520694 A GB0520694 A GB 0520694A GB 0520694 A GB0520694 A GB 0520694A GB 0520694 D0 GB0520694 D0 GB 0520694D0
Authority
GB
United Kingdom
Prior art keywords
pumping chamber
positive displacement
displacement pumping
positive
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0520694A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trikon Technologies Ltd
Original Assignee
Trikon Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trikon Technologies Ltd filed Critical Trikon Technologies Ltd
Priority to GB0520694A priority Critical patent/GB0520694D0/en
Publication of GB0520694D0 publication Critical patent/GB0520694D0/en
Priority to JP2008535089A priority patent/JP2009512206A/en
Priority to PCT/GB2006/003766 priority patent/WO2007042797A1/en
Priority to EP06794716.8A priority patent/EP1935005B1/en
Priority to CN2006800377853A priority patent/CN101356620B/en
Priority to US12/089,899 priority patent/US20080245770A1/en
Priority to KR1020087007381A priority patent/KR101292938B1/en
Priority to US13/773,711 priority patent/US8728337B2/en
Ceased legal-status Critical Current

Links

GB0520694A 2005-10-11 2005-10-12 Positive displacement pumping chamber Ceased GB0520694D0 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GB0520694A GB0520694D0 (en) 2005-10-12 2005-10-12 Positive displacement pumping chamber
JP2008535089A JP2009512206A (en) 2005-10-11 2006-10-11 Positive displacement pump chamber
PCT/GB2006/003766 WO2007042797A1 (en) 2005-10-11 2006-10-11 Positive displacement pumping chamber
EP06794716.8A EP1935005B1 (en) 2005-10-11 2006-10-11 Positive displacement pumping chamber
CN2006800377853A CN101356620B (en) 2005-10-11 2006-10-11 Apparatus and method for processing substrate
US12/089,899 US20080245770A1 (en) 2005-10-11 2006-10-11 Positive Displacement Pumping Chamber
KR1020087007381A KR101292938B1 (en) 2005-10-11 2006-10-11 Positive displacement pumping chamber
US13/773,711 US8728337B2 (en) 2005-10-11 2013-02-22 Positive displacement pumping chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0520694A GB0520694D0 (en) 2005-10-12 2005-10-12 Positive displacement pumping chamber

Publications (1)

Publication Number Publication Date
GB0520694D0 true GB0520694D0 (en) 2005-11-16

Family

ID=35430218

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0520694A Ceased GB0520694D0 (en) 2005-10-11 2005-10-12 Positive displacement pumping chamber

Country Status (1)

Country Link
GB (1) GB0520694D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)