GB0516209D0 - Improved lithographic process - Google Patents

Improved lithographic process

Info

Publication number
GB0516209D0
GB0516209D0 GB0516209A GB0516209A GB0516209D0 GB 0516209 D0 GB0516209 D0 GB 0516209D0 GB 0516209 A GB0516209 A GB 0516209A GB 0516209 A GB0516209 A GB 0516209A GB 0516209 D0 GB0516209 D0 GB 0516209D0
Authority
GB
United Kingdom
Prior art keywords
lithographic process
improved lithographic
improved
lithographic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0516209A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Birmingham
Original Assignee
University of Birmingham
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Birmingham filed Critical University of Birmingham
Priority to GB0516209A priority Critical patent/GB0516209D0/en
Publication of GB0516209D0 publication Critical patent/GB0516209D0/en
Ceased legal-status Critical Current

Links

GB0516209A 2005-08-06 2005-08-06 Improved lithographic process Ceased GB0516209D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0516209A GB0516209D0 (en) 2005-08-06 2005-08-06 Improved lithographic process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0516209A GB0516209D0 (en) 2005-08-06 2005-08-06 Improved lithographic process

Publications (1)

Publication Number Publication Date
GB0516209D0 true GB0516209D0 (en) 2005-09-14

Family

ID=34984208

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0516209A Ceased GB0516209D0 (en) 2005-08-06 2005-08-06 Improved lithographic process

Country Status (1)

Country Link
GB (1) GB0516209D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)