GB0406195D0 - EUV source - Google Patents

EUV source

Info

Publication number
GB0406195D0
GB0406195D0 GB0406195A GB0406195A GB0406195D0 GB 0406195 D0 GB0406195 D0 GB 0406195D0 GB 0406195 A GB0406195 A GB 0406195A GB 0406195 A GB0406195 A GB 0406195A GB 0406195 D0 GB0406195 D0 GB 0406195D0
Authority
GB
United Kingdom
Prior art keywords
euv source
euv
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0406195A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Queens University of Belfast
Original Assignee
Queens University of Belfast
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Queens University of Belfast filed Critical Queens University of Belfast
Priority to GB0406195A priority Critical patent/GB0406195D0/en
Publication of GB0406195D0 publication Critical patent/GB0406195D0/en
Ceased legal-status Critical Current

Links

GB0406195A 2004-03-19 2004-03-19 EUV source Ceased GB0406195D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0406195A GB0406195D0 (en) 2004-03-19 2004-03-19 EUV source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0406195A GB0406195D0 (en) 2004-03-19 2004-03-19 EUV source

Publications (1)

Publication Number Publication Date
GB0406195D0 true GB0406195D0 (en) 2004-04-21

Family

ID=32118013

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0406195A Ceased GB0406195D0 (en) 2004-03-19 2004-03-19 EUV source

Country Status (1)

Country Link
GB (1) GB0406195D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)