GB0406195D0 - EUV source - Google Patents
EUV sourceInfo
- Publication number
- GB0406195D0 GB0406195D0 GB0406195A GB0406195A GB0406195D0 GB 0406195 D0 GB0406195 D0 GB 0406195D0 GB 0406195 A GB0406195 A GB 0406195A GB 0406195 A GB0406195 A GB 0406195A GB 0406195 D0 GB0406195 D0 GB 0406195D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- euv source
- euv
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0406195A GB0406195D0 (en) | 2004-03-19 | 2004-03-19 | EUV source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0406195A GB0406195D0 (en) | 2004-03-19 | 2004-03-19 | EUV source |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0406195D0 true GB0406195D0 (en) | 2004-04-21 |
Family
ID=32118013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0406195A Ceased GB0406195D0 (en) | 2004-03-19 | 2004-03-19 | EUV source |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB0406195D0 (en) |
-
2004
- 2004-03-19 GB GB0406195A patent/GB0406195D0/en not_active Ceased
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |