GB0308180D0 - Overlay alignment mark - Google Patents

Overlay alignment mark

Info

Publication number
GB0308180D0
GB0308180D0 GB0308180A GB0308180A GB0308180D0 GB 0308180 D0 GB0308180 D0 GB 0308180D0 GB 0308180 A GB0308180 A GB 0308180A GB 0308180 A GB0308180 A GB 0308180A GB 0308180 D0 GB0308180 D0 GB 0308180D0
Authority
GB
United Kingdom
Prior art keywords
alignment mark
overlay alignment
overlay
mark
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0308180A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aoti Operating Co Inc
Original Assignee
Aoti Operating Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aoti Operating Co Inc filed Critical Aoti Operating Co Inc
Priority to GB0308180A priority Critical patent/GB0308180D0/en
Publication of GB0308180D0 publication Critical patent/GB0308180D0/en
Priority to US10/549,860 priority patent/US20070222088A1/en
Priority to EP04726567A priority patent/EP1614154A2/en
Priority to PCT/GB2004/001536 priority patent/WO2004090979A2/en
Priority to KR1020057018986A priority patent/KR20060009248A/en
Priority to TW093109777A priority patent/TW200507228A/en
Ceased legal-status Critical Current

Links

GB0308180A 2003-04-08 2003-04-09 Overlay alignment mark Ceased GB0308180D0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB0308180A GB0308180D0 (en) 2003-04-09 2003-04-09 Overlay alignment mark
US10/549,860 US20070222088A1 (en) 2003-04-08 2004-04-08 Overlay Metrology Mark
EP04726567A EP1614154A2 (en) 2003-04-08 2004-04-08 Overlay metrology mark
PCT/GB2004/001536 WO2004090979A2 (en) 2003-04-08 2004-04-08 Overlay metrology mark
KR1020057018986A KR20060009248A (en) 2003-04-08 2004-04-08 Overlay metrology mark
TW093109777A TW200507228A (en) 2003-04-08 2004-04-08 Overlay metrology mark

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0308180A GB0308180D0 (en) 2003-04-09 2003-04-09 Overlay alignment mark

Publications (1)

Publication Number Publication Date
GB0308180D0 true GB0308180D0 (en) 2003-05-14

Family

ID=9956472

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0308180A Ceased GB0308180D0 (en) 2003-04-08 2003-04-09 Overlay alignment mark

Country Status (1)

Country Link
GB (1) GB0308180D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)