GB0307529D0 - Polishing composition - Google Patents

Polishing composition

Info

Publication number
GB0307529D0
GB0307529D0 GBGB0307529.8A GB0307529A GB0307529D0 GB 0307529 D0 GB0307529 D0 GB 0307529D0 GB 0307529 A GB0307529 A GB 0307529A GB 0307529 D0 GB0307529 D0 GB 0307529D0
Authority
GB
United Kingdom
Prior art keywords
polishing composition
polishing
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB0307529.8A
Other versions
GB2384003A9 (en
GB2384003B (en
GB2384003A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujimi Inc
Original Assignee
Fujimi Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP16675698A external-priority patent/JP3998813B2/en
Application filed by Fujimi Inc filed Critical Fujimi Inc
Publication of GB0307529D0 publication Critical patent/GB0307529D0/en
Publication of GB2384003A publication Critical patent/GB2384003A/en
Publication of GB2384003A9 publication Critical patent/GB2384003A9/en
Application granted granted Critical
Publication of GB2384003B publication Critical patent/GB2384003B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
GB0307529A 1998-06-15 1999-06-15 Polishing composition Expired - Fee Related GB2384003B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16675698A JP3998813B2 (en) 1998-06-15 1998-06-15 Polishing composition
GB9913961A GB2338490B (en) 1998-06-15 1999-06-15 Polishing composition

Publications (4)

Publication Number Publication Date
GB0307529D0 true GB0307529D0 (en) 2003-05-07
GB2384003A GB2384003A (en) 2003-07-16
GB2384003A9 GB2384003A9 (en) 2003-07-18
GB2384003B GB2384003B (en) 2003-09-03

Family

ID=26315670

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0307529A Expired - Fee Related GB2384003B (en) 1998-06-15 1999-06-15 Polishing composition

Country Status (1)

Country Link
GB (1) GB2384003B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4068499B2 (en) * 2003-05-09 2008-03-26 株式会社フジミインコーポレーテッド Polishing composition

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5858813A (en) * 1996-05-10 1999-01-12 Cabot Corporation Chemical mechanical polishing slurry for metal layers and films
US5993686A (en) * 1996-06-06 1999-11-30 Cabot Corporation Fluoride additive containing chemical mechanical polishing slurry and method for use of same
US6309560B1 (en) * 1996-12-09 2001-10-30 Cabot Microelectronics Corporation Chemical mechanical polishing slurry useful for copper substrates

Also Published As

Publication number Publication date
GB2384003A9 (en) 2003-07-18
GB2384003B (en) 2003-09-03
GB2384003A (en) 2003-07-16

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20090615