GB0210405D0 - A method and apparatus for loading and unloading substrates from deposition equipment - Google Patents

A method and apparatus for loading and unloading substrates from deposition equipment

Info

Publication number
GB0210405D0
GB0210405D0 GB0210405A GB0210405A GB0210405D0 GB 0210405 D0 GB0210405 D0 GB 0210405D0 GB 0210405 A GB0210405 A GB 0210405A GB 0210405 A GB0210405 A GB 0210405A GB 0210405 D0 GB0210405 D0 GB 0210405D0
Authority
GB
United Kingdom
Prior art keywords
loading
deposition equipment
unloading substrates
unloading
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0210405A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thermo Fisher Scientific Inc
Original Assignee
Thermo Electron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thermo Electron Corp filed Critical Thermo Electron Corp
Priority to GB0210405A priority Critical patent/GB0210405D0/en
Publication of GB0210405D0 publication Critical patent/GB0210405D0/en
Ceased legal-status Critical Current

Links

GB0210405A 2002-05-07 2002-05-07 A method and apparatus for loading and unloading substrates from deposition equipment Ceased GB0210405D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0210405A GB0210405D0 (en) 2002-05-07 2002-05-07 A method and apparatus for loading and unloading substrates from deposition equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0210405A GB0210405D0 (en) 2002-05-07 2002-05-07 A method and apparatus for loading and unloading substrates from deposition equipment

Publications (1)

Publication Number Publication Date
GB0210405D0 true GB0210405D0 (en) 2002-06-12

Family

ID=9936190

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0210405A Ceased GB0210405D0 (en) 2002-05-07 2002-05-07 A method and apparatus for loading and unloading substrates from deposition equipment

Country Status (1)

Country Link
GB (1) GB0210405D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)