GB0020592D0 - Mem device - Google Patents

Mem device

Info

Publication number
GB0020592D0
GB0020592D0 GB0020592A GB0020592A GB0020592D0 GB 0020592 D0 GB0020592 D0 GB 0020592D0 GB 0020592 A GB0020592 A GB 0020592A GB 0020592 A GB0020592 A GB 0020592A GB 0020592 D0 GB0020592 D0 GB 0020592D0
Authority
GB
United Kingdom
Prior art keywords
mem device
mem
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0020592A
Other versions
GB2365988A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kymata Ltd
Original Assignee
Kymata Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kymata Ltd filed Critical Kymata Ltd
Publication of GB0020592D0 publication Critical patent/GB0020592D0/en
Priority to PCT/GB2001/003714 priority Critical patent/WO2002016997A1/en
Priority to US10/362,001 priority patent/US20040022482A1/en
Priority to EP01958229A priority patent/EP1322989A1/en
Publication of GB2365988A publication Critical patent/GB2365988A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3594—Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
GB0020592A 2000-08-18 2000-08-21 Micro Electro-Mechanical Device Withdrawn GB2365988A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/GB2001/003714 WO2002016997A1 (en) 2000-08-18 2001-08-17 Mem device
US10/362,001 US20040022482A1 (en) 2000-08-18 2001-08-17 Mem device
EP01958229A EP1322989A1 (en) 2000-08-18 2001-08-17 Mem device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0020427A GB0020427D0 (en) 2000-08-18 2000-08-18 Moem device and fabrication method

Publications (2)

Publication Number Publication Date
GB0020592D0 true GB0020592D0 (en) 2000-10-11
GB2365988A GB2365988A (en) 2002-02-27

Family

ID=9897903

Family Applications (2)

Application Number Title Priority Date Filing Date
GB0020427A Ceased GB0020427D0 (en) 2000-08-18 2000-08-18 Moem device and fabrication method
GB0020592A Withdrawn GB2365988A (en) 2000-08-18 2000-08-21 Micro Electro-Mechanical Device

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB0020427A Ceased GB0020427D0 (en) 2000-08-18 2000-08-18 Moem device and fabrication method

Country Status (1)

Country Link
GB (2) GB0020427D0 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003086954A1 (en) * 2002-03-30 2003-10-23 Singapore Institute Of Manufacturing Technology Micromachined torsional mirror unit for optical switching and fabrication method therefor
EP1365267A1 (en) * 2002-04-29 2003-11-26 Alcatel An optical switch unit and a method therefore
JP2004094187A (en) * 2002-07-12 2004-03-25 Omron Corp Variable optical attenuator
EP1382984A1 (en) * 2002-07-19 2004-01-21 Avanex Corporation Planar Optical Switch and Switch Array
US7317232B2 (en) * 2002-10-22 2008-01-08 Cabot Microelectronics Corporation MEM switching device
EP1424583A3 (en) * 2002-11-26 2004-06-09 LG Electronics Inc. Optical receiver and optical transmitter using a variable optical attenuator, and method for producing a variable optical attenuator
KR100495533B1 (en) * 2003-07-18 2005-06-16 엘지전자 주식회사 Variable optical attenuator and array of the same
WO2005040036A1 (en) * 2003-10-27 2005-05-06 Bookham Technology Plc Optical assembly with variable optical attenuator
WO2016149797A1 (en) 2015-03-23 2016-09-29 Aeponyx Inc. Photonic switches, photonic switching fabrics and methods for data centers

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2175454T3 (en) * 1996-09-20 2002-11-16 Ascom Ag OPTICAL FIBER CIRCUIT SWITCH AND PROCEDURE FOR THE MANUFACTURING OF THE SAME.
AU2183700A (en) * 1998-12-15 2000-07-03 Seagate Technology Llc Optical microswitch with rotary electrostatic microactuator

Also Published As

Publication number Publication date
GB2365988A (en) 2002-02-27
GB0020427D0 (en) 2000-10-04

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)