FR960267A - - Google Patents

Info

Publication number
FR960267A
FR960267A FR960267DA FR960267A FR 960267 A FR960267 A FR 960267A FR 960267D A FR960267D A FR 960267DA FR 960267 A FR960267 A FR 960267A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Application granted granted Critical
Publication of FR960267A publication Critical patent/FR960267A/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1471Arrangements for directing or deflecting the discharge along a desired path for centering, aligning or positioning of ray or beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR960267D 1948-01-14 Expired FR960267A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR279754X 1948-01-14

Publications (1)

Publication Number Publication Date
FR960267A true FR960267A (fr) 1950-04-15

Family

ID=8886686

Family Applications (1)

Application Number Title Priority Date Filing Date
FR960267D Expired FR960267A (fr) 1948-01-14

Country Status (2)

Country Link
CH (1) CH279754A (fr)
FR (1) FR960267A (fr)

Also Published As

Publication number Publication date
CH279754A (fr) 1951-12-15

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