Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Hoh & Hahne
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Hoh & Hahne
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Publication date
Application filed by Hoh & HahnefiledCriticalHoh & Hahne
Application grantedgrantedCritical
Publication of FR906052ApublicationCriticalpatent/FR906052A/fr
G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
G03F7/20—Exposure; Apparatus therefor
G03F7/22—Exposing sequentially with the same light pattern different positions of the same surface
Landscapes
Physics & Mathematics
(AREA)
General Physics & Mathematics
(AREA)
FR906052D1944-07-241944-07-24Procédé et dispositif pour l'établissement des clichés d'autotypie
ExpiredFR906052A
(fr)