FR901934A - Microscopes avec lentilles électrostatiques pour rayons électroniques et ioniques - Google Patents

Microscopes avec lentilles électrostatiques pour rayons électroniques et ioniques

Info

Publication number
FR901934A
FR901934A FR901934DA FR901934A FR 901934 A FR901934 A FR 901934A FR 901934D A FR901934D A FR 901934DA FR 901934 A FR901934 A FR 901934A
Authority
FR
France
Prior art keywords
microscopes
electron
electrostatic lenses
ion rays
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Original Assignee
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH filed Critical Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Application granted granted Critical
Publication of FR901934A publication Critical patent/FR901934A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR901934D 1942-12-11 1944-02-12 Microscopes avec lentilles électrostatiques pour rayons électroniques et ioniques Expired FR901934A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE901934X 1942-12-11

Publications (1)

Publication Number Publication Date
FR901934A true FR901934A (fr) 1945-08-09

Family

ID=6860896

Family Applications (1)

Application Number Title Priority Date Filing Date
FR901934D Expired FR901934A (fr) 1942-12-11 1944-02-12 Microscopes avec lentilles électrostatiques pour rayons électroniques et ioniques

Country Status (2)

Country Link
FR (1) FR901934A (c_deeref_Disk_and_Scratch_Disk_Pools_and_Their_Defaults.html)
NL (1) NL114588C (c_deeref_Disk_and_Scratch_Disk_Pools_and_Their_Defaults.html)

Also Published As

Publication number Publication date
NL114588C (c_deeref_Disk_and_Scratch_Disk_Pools_and_Their_Defaults.html)

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