FR87526E - Subminiature pressure sensor - Google Patents

Subminiature pressure sensor

Info

Publication number
FR87526E
FR87526E FR7508A FR7508A FR87526E FR 87526 E FR87526 E FR 87526E FR 7508 A FR7508 A FR 7508A FR 7508 A FR7508 A FR 7508A FR 87526 E FR87526 E FR 87526E
Authority
FR
France
Prior art keywords
pressure sensor
subminiature
subminiature pressure
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7508A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR966505A external-priority patent/FR1395854A/en
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Priority to FR7508A priority Critical patent/FR87526E/en
Priority to DEO10694A priority patent/DE1264819B/en
Priority to GB9742/65A priority patent/GB1043064A/en
Priority to US437715A priority patent/US3322980A/en
Application granted granted Critical
Publication of FR87526E publication Critical patent/FR87526E/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
FR7508A 1964-03-06 1965-03-01 Subminiature pressure sensor Expired FR87526E (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR7508A FR87526E (en) 1964-03-06 1965-03-01 Subminiature pressure sensor
DEO10694A DE1264819B (en) 1964-03-06 1965-03-05 Piezoelectric pressure transducer
GB9742/65A GB1043064A (en) 1964-03-06 1965-03-08 Pressure transducer
US437715A US3322980A (en) 1964-03-06 1965-03-08 Subminiature pressure transducer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR966505A FR1395854A (en) 1964-03-06 1964-03-06 Subminiature pressure sensor
FR7508A FR87526E (en) 1964-03-06 1965-03-01 Subminiature pressure sensor

Publications (1)

Publication Number Publication Date
FR87526E true FR87526E (en) 1966-06-24

Family

ID=26162256

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7508A Expired FR87526E (en) 1964-03-06 1965-03-01 Subminiature pressure sensor

Country Status (4)

Country Link
US (1) US3322980A (en)
DE (1) DE1264819B (en)
FR (1) FR87526E (en)
GB (1) GB1043064A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US28596A (en) * 1860-06-05 Robert nicoll
US3569747A (en) * 1965-07-14 1971-03-09 Kistler Instr Corp Piezoelectric transducer
US3365593A (en) * 1965-10-21 1968-01-23 Phillips Petroleum Co Piezoelectric transducers
US3405288A (en) * 1966-02-25 1968-10-08 William A. Dittrich Sound and vibration detector device
US3402306A (en) * 1966-06-28 1968-09-17 Gen Electric Compensating means for a piezoelectric sensing element
AT269514B (en) * 1966-07-12 1969-03-25 Piezoelectric transducer
US3501654A (en) * 1967-06-12 1970-03-17 Corning Glass Works Miniature pressure transducer
US3564303A (en) * 1968-10-07 1971-02-16 Westinghouse Electric Corp Encapsulated transducer assembly
US3585415A (en) * 1969-10-06 1971-06-15 Univ California Stress-strain transducer charge coupled to a piezoelectric material
US4816713A (en) * 1987-10-09 1989-03-28 Change Jr Nicholas D Piezoelectric sensor with FET amplified output
US5306981A (en) * 1992-11-19 1994-04-26 Humonics International Inc. Piezoelectric vibrator assembly
US7272976B2 (en) * 2004-03-30 2007-09-25 Asml Holdings N.V. Pressure sensor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3146360A (en) * 1961-04-07 1964-08-25 John M Marshall Piezoelectric time-of-arrival gage
US3294988A (en) * 1964-09-24 1966-12-27 Hewlett Packard Co Transducers

Also Published As

Publication number Publication date
DE1264819B (en) 1968-03-28
US3322980A (en) 1967-05-30
GB1043064A (en) 1966-09-21

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