FR84875E - Improvements to the thin-film deposition processes and to the devices for implementing said improved process - Google Patents
Improvements to the thin-film deposition processes and to the devices for implementing said improved processInfo
- Publication number
- FR84875E FR84875E FR955784A FR955784A FR84875E FR 84875 E FR84875 E FR 84875E FR 955784 A FR955784 A FR 955784A FR 955784 A FR955784 A FR 955784A FR 84875 E FR84875 E FR 84875E
- Authority
- FR
- France
- Prior art keywords
- implementing
- thin
- devices
- film deposition
- improved process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR955784A FR84875E (en) | 1963-12-03 | 1963-12-03 | Improvements to the thin-film deposition processes and to the devices for implementing said improved process |
GB1164A GB1017741A (en) | 1963-01-22 | 1964-01-01 | Improvements relating to vacuum coating processes |
DE19641521356 DE1521356A1 (en) | 1963-01-22 | 1964-01-16 | Method of applying thin layers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR955784A FR84875E (en) | 1963-12-03 | 1963-12-03 | Improvements to the thin-film deposition processes and to the devices for implementing said improved process |
Publications (1)
Publication Number | Publication Date |
---|---|
FR84875E true FR84875E (en) | 1965-04-30 |
Family
ID=8817937
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR955784A Expired FR84875E (en) | 1963-01-22 | 1963-12-03 | Improvements to the thin-film deposition processes and to the devices for implementing said improved process |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR84875E (en) |
-
1963
- 1963-12-03 FR FR955784A patent/FR84875E/en not_active Expired
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