FR81843E - Method for measuring the thickness of thin interference layers - Google Patents
Method for measuring the thickness of thin interference layersInfo
- Publication number
- FR81843E FR81843E FR902521A FR902521A FR81843E FR 81843 E FR81843 E FR 81843E FR 902521 A FR902521 A FR 902521A FR 902521 A FR902521 A FR 902521A FR 81843 E FR81843 E FR 81843E
- Authority
- FR
- France
- Prior art keywords
- measuring
- thickness
- interference layers
- thin interference
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
- G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1199051D FR1199051A (en) | 1962-06-29 | 1958-06-09 | Method for measuring the thickness of thin interference layers |
FR902521A FR81843E (en) | 1962-06-29 | 1962-06-29 | Method for measuring the thickness of thin interference layers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR902521A FR81843E (en) | 1962-06-29 | 1962-06-29 | Method for measuring the thickness of thin interference layers |
Publications (1)
Publication Number | Publication Date |
---|---|
FR81843E true FR81843E (en) | 1963-11-15 |
Family
ID=8782209
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1199051D Expired FR1199051A (en) | 1962-06-29 | 1958-06-09 | Method for measuring the thickness of thin interference layers |
FR902521A Expired FR81843E (en) | 1962-06-29 | 1962-06-29 | Method for measuring the thickness of thin interference layers |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1199051D Expired FR1199051A (en) | 1962-06-29 | 1958-06-09 | Method for measuring the thickness of thin interference layers |
Country Status (1)
Country | Link |
---|---|
FR (2) | FR1199051A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3700366A1 (en) * | 1987-01-08 | 1988-07-21 | Leybold Ag | DEVICE FOR DETERMINING THE THICKNESS OF CHANGING MATERIAL LAYERS ON A SUBSTRATE DURING THE COATING PROCESS |
-
1958
- 1958-06-09 FR FR1199051D patent/FR1199051A/en not_active Expired
-
1962
- 1962-06-29 FR FR902521A patent/FR81843E/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR1199051A (en) | 1959-12-11 |
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