FR648160A - Procédés de reproduction photolithographique - Google Patents
Procédés de reproduction photolithographiqueInfo
- Publication number
- FR648160A FR648160A FR648160DA FR648160A FR 648160 A FR648160 A FR 648160A FR 648160D A FR648160D A FR 648160DA FR 648160 A FR648160 A FR 648160A
- Authority
- FR
- France
- Prior art keywords
- reproduction processes
- photolithographic
- photolithographic reproduction
- processes
- reproduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR648160T | 1927-04-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR648160A true FR648160A (fr) | 1928-12-06 |
Family
ID=9002489
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR648160D Expired FR648160A (fr) | 1927-04-07 | 1927-04-07 | Procédés de reproduction photolithographique |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR648160A (fr) |
-
1927
- 1927-04-07 FR FR648160D patent/FR648160A/fr not_active Expired
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