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ALF SINDING LARSEN
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ALF SINDING LARSEN
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C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
C01B21/00—Nitrogen; Compounds thereof
C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
C01B21/0682—Preparation by direct nitridation of silicon
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Chemical & Material Sciences
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Organic Chemistry
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Inorganic Chemistry
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Chemical Vapour Deposition
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FR399445A1908-02-171909-02-13Procédé de fabrication de l'azoture de silicium
ExpiredFR399445A
(fr)