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H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
H01J37/32055—Arc discharge
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FR349227D1903-12-231904-12-20Procédé et appareil pour traiter les gaz et les mélanges de gaz par l'arc galvanique
ExpiredFR349227A
(fr)
Procédé et appareil pour faire jaillir intérieurement des arcs lumineux électriques, spécialement en vue du traitement des gaz et mélanges gazeux au moyen d'arcs lumineux électriques mobiles