FR324233A - Improvements in apparatus for subjecting gases to high voltage electric discharges - Google Patents

Improvements in apparatus for subjecting gases to high voltage electric discharges

Info

Publication number
FR324233A
FR324233A FR324233DA FR324233A FR 324233 A FR324233 A FR 324233A FR 324233D A FR324233D A FR 324233DA FR 324233 A FR324233 A FR 324233A
Authority
FR
France
Prior art keywords
high voltage
voltage electric
electric discharges
subjecting gases
subjecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ATMOSPHERIC PRODUCTS Co S
Original Assignee
ATMOSPHERIC PRODUCTS Co S
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ATMOSPHERIC PRODUCTS Co S filed Critical ATMOSPHERIC PRODUCTS Co S
Application granted granted Critical
Publication of FR324233A publication Critical patent/FR324233A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR324233D 1902-07-11 1902-07-11 Improvements in apparatus for subjecting gases to high voltage electric discharges Expired FR324233A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR324233T 1902-07-11

Publications (1)

Publication Number Publication Date
FR324233A true FR324233A (en) 1903-03-26

Family

ID=1374483

Family Applications (1)

Application Number Title Priority Date Filing Date
FR324233D Expired FR324233A (en) 1902-07-11 1902-07-11 Improvements in apparatus for subjecting gases to high voltage electric discharges

Country Status (1)

Country Link
FR (1) FR324233A (en)

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