FR3097091B1 - device provided with a plurality of resonators collectively exhibiting an improved quality factor - Google Patents

device provided with a plurality of resonators collectively exhibiting an improved quality factor Download PDF

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Publication number
FR3097091B1
FR3097091B1 FR1906055A FR1906055A FR3097091B1 FR 3097091 B1 FR3097091 B1 FR 3097091B1 FR 1906055 A FR1906055 A FR 1906055A FR 1906055 A FR1906055 A FR 1906055A FR 3097091 B1 FR3097091 B1 FR 3097091B1
Authority
FR
France
Prior art keywords
device provided
quality factor
improved quality
resonators
collectively exhibiting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1906055A
Other languages
French (fr)
Other versions
FR3097091A1 (en
Inventor
Bruno Fain
Bruno Ghyselen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Soitec SA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Soitec SA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1906055A priority Critical patent/FR3097091B1/en
Publication of FR3097091A1 publication Critical patent/FR3097091A1/en
Application granted granted Critical
Publication of FR3097091B1 publication Critical patent/FR3097091B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/32—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise
    • G01N29/323—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise compensating for pressure or tension variations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0271—Resonators; ultrasonic resonators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/05—Arrays
    • B81B2207/053—Arrays of movable structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/106—Number of transducers one or more transducer arrays

Abstract

L’invention concerne un dispositif (1) pourvu d’une pluralité de résonateurs (2), formés chacun par une membrane scellant une cavité, les résonateurs (2) étant reliés les uns aux autres par des canaux fluidiques (3a) destinés à assurer un équilibre des pressions d’un résonateur (2) à l’autre. Figure pour l’abrégé : figure 1b.The invention relates to a device (1) provided with a plurality of resonators (2), each formed by a membrane sealing a cavity, the resonators (2) being connected to each other by fluidic channels (3a) intended to ensure a balance of pressures from one resonator (2) to another. Figure for the abstract: Figure 1b.

FR1906055A 2019-06-07 2019-06-07 device provided with a plurality of resonators collectively exhibiting an improved quality factor Active FR3097091B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1906055A FR3097091B1 (en) 2019-06-07 2019-06-07 device provided with a plurality of resonators collectively exhibiting an improved quality factor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1906055 2019-06-07
FR1906055A FR3097091B1 (en) 2019-06-07 2019-06-07 device provided with a plurality of resonators collectively exhibiting an improved quality factor

Publications (2)

Publication Number Publication Date
FR3097091A1 FR3097091A1 (en) 2020-12-11
FR3097091B1 true FR3097091B1 (en) 2021-07-23

Family

ID=68281583

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1906055A Active FR3097091B1 (en) 2019-06-07 2019-06-07 device provided with a plurality of resonators collectively exhibiting an improved quality factor

Country Status (1)

Country Link
FR (1) FR3097091B1 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102237662B1 (en) * 2014-04-18 2021-04-09 버터플라이 네트워크, 인크. Ultrasonic transducers in complementary metal oxide semiconductor (cmos) wafers and related apparatus and methods
US9821340B2 (en) * 2014-07-28 2017-11-21 Kolo Medical Ltd. High displacement ultrasonic transducer
CN112075090B (en) * 2018-05-03 2022-10-14 蝴蝶网络有限公司 Pressure port for ultrasonic transducer on CMOS sensor

Also Published As

Publication number Publication date
FR3097091A1 (en) 2020-12-11

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