FR3088924B1 - Method for producing a micromechanical component for an interferometer installation and component obtained - Google Patents

Method for producing a micromechanical component for an interferometer installation and component obtained Download PDF

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Publication number
FR3088924B1
FR3088924B1 FR1913100A FR1913100A FR3088924B1 FR 3088924 B1 FR3088924 B1 FR 3088924B1 FR 1913100 A FR1913100 A FR 1913100A FR 1913100 A FR1913100 A FR 1913100A FR 3088924 B1 FR3088924 B1 FR 3088924B1
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France
Prior art keywords
component
layer
producing
sacrificial layer
applying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1913100A
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French (fr)
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FR3088924A1 (en
Inventor
Benedikt Stein
Christian Huber
Christoph Daniel Kraemmer
Reinhold Roedel
Thomas Buck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
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Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR3088924A1 publication Critical patent/FR3088924A1/en
Application granted granted Critical
Publication of FR3088924B1 publication Critical patent/FR3088924B1/en
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/001—Structures having a reduced contact area, e.g. with bumps or with a textured surface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

Titre : Procédé de réalisation d’un composant micromécanique pour une installation d’interféromètre et composant obtenu Procédé consistant à fournir (S1) un support (T1) et y placer (S1a) une couche sacrificielle (O1) avec une résistance à la gravure sur le support (T1) et appliquer (S2) une couche intermédiaire (Z1), appliquer (S3) une couche sacrificielle (O2) qui a une autre résistance à la gravure sur la couche intermédiaire (Z1) ; structurer (S4) la couche sacrificielle (O2), et y modifier la résistance à la gravure, appliquer (S5) une couche intermédiaire (Z2) sur la couche sacrificielle (O2), pour que la couche (Z2) soit parallèle sur la première couche (Z1), et enlever partiellement (S6) la première et/ou la seconde couche sacrificielle (O1, O2) au-dessus ou dans la zone structurée (B2). Figure 1Title: Method for producing a micromechanical component for an interferometer installation and component obtained Method consisting in supplying (S1) a support (T1) and placing (S1a) thereon a sacrificial layer (O1) with an etching resistance on the support (T1) and applying (S2) an intermediate layer (Z1), applying (S3) a sacrificial layer (O2) which has another resistance to etching on the intermediate layer (Z1); structuring (S4) the sacrificial layer (O2), and modifying the etching resistance therein, applying (S5) an intermediate layer (Z2) on the sacrificial layer (O2), so that the layer (Z2) is parallel on the first layer (Z1), and partially removing (S6) the first and/or the second sacrificial layer (O1, O2) above or in the structured zone (B2). Figure 1

FR1913100A 2018-11-28 2019-11-22 Method for producing a micromechanical component for an interferometer installation and component obtained Active FR3088924B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018220463.2 2018-11-28
DE102018220463.2A DE102018220463A1 (en) 2018-11-28 2018-11-28 Method for producing a micromechanical component for an interferometer device, micromechanical component for an interferometer device and interferometer device

Publications (2)

Publication Number Publication Date
FR3088924A1 FR3088924A1 (en) 2020-05-29
FR3088924B1 true FR3088924B1 (en) 2022-07-08

Family

ID=70545917

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1913100A Active FR3088924B1 (en) 2018-11-28 2019-11-22 Method for producing a micromechanical component for an interferometer installation and component obtained

Country Status (2)

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DE (1) DE102018220463A1 (en)
FR (1) FR3088924B1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019217184A1 (en) * 2019-11-07 2021-05-12 Robert Bosch Gmbh Method for producing an intermediate component in a micromechanical Fabry-Perot interferometer device, method for producing a micromechanical Fabry-Perot interferometer device and micromechanical Fabry-Perot interferometer device
CN117003197B (en) * 2023-09-26 2024-03-26 之江实验室 Preparation method of high-temperature inertial chip capable of being integrated on crystal and provided with vertical Fabry-Perot cavity

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7429334B2 (en) * 2004-09-27 2008-09-30 Idc, Llc Methods of fabricating interferometric modulators by selectively removing a material
US7547568B2 (en) * 2006-02-22 2009-06-16 Qualcomm Mems Technologies, Inc. Electrical conditioning of MEMS device and insulating layer thereof
JP4784495B2 (en) 2006-11-28 2011-10-05 株式会社デンソー Optical multilayer mirror and Fabry-Perot interferometer having the same
US20120235970A1 (en) * 2011-03-18 2012-09-20 Qualcomm Mems Technologies, Inc. Thin film desiccant and method of fabrication

Also Published As

Publication number Publication date
FR3088924A1 (en) 2020-05-29
DE102018220463A1 (en) 2020-05-28

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