FR3077161B1 - TUNABLE PIEZOELECTRIC ACOUSTIC TRANSDUCER - Google Patents

TUNABLE PIEZOELECTRIC ACOUSTIC TRANSDUCER Download PDF

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Publication number
FR3077161B1
FR3077161B1 FR1850474A FR1850474A FR3077161B1 FR 3077161 B1 FR3077161 B1 FR 3077161B1 FR 1850474 A FR1850474 A FR 1850474A FR 1850474 A FR1850474 A FR 1850474A FR 3077161 B1 FR3077161 B1 FR 3077161B1
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FR
France
Prior art keywords
electrodes
piezoelectric layer
acoustic transducer
piezoelectric acoustic
tunable piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
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FR1850474A
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French (fr)
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FR3077161A1 (en
Inventor
Bruno Fain
Alexandre Reinhardt
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Priority to FR1850474A priority Critical patent/FR3077161B1/en
Publication of FR3077161A1 publication Critical patent/FR3077161A1/en
Application granted granted Critical
Publication of FR3077161B1 publication Critical patent/FR3077161B1/en
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Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00Piezoelectric transducers; Electrostrictive transducers
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00Piezoelectric transducers; Electrostrictive transducers
    • H04R17/10Resonant transducers, i.e. adapted to produce maximum output at a predetermined frequency

Abstract

L'invention concerne un dispositif d'émission et/ou de réception d'ondes acoustiques, comportant : une membrane flexible (201) suspendue par sa périphérie à un support rigide (103), la membrane comprenant une première couche piézoélectrique (209), des première (A) et deuxième (C) électrodes disposées sur une première face de la première couche piézoélectrique, et des troisième (B) et quatrième (D) électrodes disposées sur une deuxième face de la première couche piézoélectrique ; un circuit de commande (213) configuré pour appliquer un signal électrique d'excitation entre les première et troisième électrodes et/ou lire un signal électrique généré par effet piézoélectrique entre les première et troisième électrodes ; et un circuit d'impédance variable (215) couplé entre les deuxième et quatrième électrodes.The invention relates to a device for transmitting and / or receiving acoustic waves, comprising: a flexible membrane (201) suspended at its periphery from a rigid support (103), the membrane comprising a first piezoelectric layer (209), first (A) and second (C) electrodes disposed on a first side of the first piezoelectric layer, and third (B) and fourth (D) electrodes disposed on a second side of the first piezoelectric layer; a control circuit (213) configured to apply an electrical excitation signal between the first and third electrodes and / or read an electrical signal generated by piezoelectric effect between the first and third electrodes; and a variable impedance circuit (215) coupled between the second and fourth electrodes.

FR1850474A 2018-01-22 2018-01-22 TUNABLE PIEZOELECTRIC ACOUSTIC TRANSDUCER Active FR3077161B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1850474A FR3077161B1 (en) 2018-01-22 2018-01-22 TUNABLE PIEZOELECTRIC ACOUSTIC TRANSDUCER

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1850474 2018-01-22
FR1850474A FR3077161B1 (en) 2018-01-22 2018-01-22 TUNABLE PIEZOELECTRIC ACOUSTIC TRANSDUCER

Publications (2)

Publication Number Publication Date
FR3077161A1 FR3077161A1 (en) 2019-07-26
FR3077161B1 true FR3077161B1 (en) 2021-09-03

Family

ID=62167481

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1850474A Active FR3077161B1 (en) 2018-01-22 2018-01-22 TUNABLE PIEZOELECTRIC ACOUSTIC TRANSDUCER

Country Status (1)

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FR (1) FR3077161B1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4985926A (en) * 1988-02-29 1991-01-15 Motorola, Inc. High impedance piezoelectric transducer
US5446306A (en) * 1993-12-13 1995-08-29 Trw Inc. Thin film voltage-tuned semiconductor bulk acoustic resonator (SBAR)
US8350633B1 (en) * 2010-10-15 2013-01-08 The Board Of Regents For Oklahoma State University Microelectromechanical resonators with passive frequency tuning using variable impedance circuits
US20150358740A1 (en) * 2014-06-04 2015-12-10 Invensense, Inc. Electrical tuning of parameters of piezoelectric actuated transducers

Also Published As

Publication number Publication date
FR3077161A1 (en) 2019-07-26

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