FR3074579B1 - Procede de fabrication simplifie d'un capteur de pression differentielle - Google Patents
Procede de fabrication simplifie d'un capteur de pression differentielle Download PDFInfo
- Publication number
- FR3074579B1 FR3074579B1 FR1761618A FR1761618A FR3074579B1 FR 3074579 B1 FR3074579 B1 FR 3074579B1 FR 1761618 A FR1761618 A FR 1761618A FR 1761618 A FR1761618 A FR 1761618A FR 3074579 B1 FR3074579 B1 FR 3074579B1
- Authority
- FR
- France
- Prior art keywords
- pressure
- ceramic support
- differential pressure
- pressure sensor
- tubular element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000000919 ceramic Substances 0.000 abstract 6
- 239000000523 sample Substances 0.000 abstract 5
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/24—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid specially adapted for measuring pressure in inlet or exhaust ducts of internal-combustion engines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N13/00—Exhaust or silencing apparatus characterised by constructional features ; Exhaust or silencing apparatus, or parts thereof, having pertinent characteristics not provided for in, or of interest apart from, groups F01N1/00 - F01N5/00, F01N9/00, F01N11/00
- F01N13/008—Mounting or arrangement of exhaust sensors in or on exhaust apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M26/00—Engine-pertinent apparatus for adding exhaust gases to combustion-air, main fuel or fuel-air mixture, e.g. by exhaust gas recirculation [EGR] systems
- F02M26/45—Sensors specially adapted for EGR systems
- F02M26/46—Sensors specially adapted for EGR systems for determining the characteristics of gases, e.g. composition
- F02M26/47—Sensors specially adapted for EGR systems for determining the characteristics of gases, e.g. composition the characteristics being temperatures, pressures or flow rates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M35/00—Combustion-air cleaners, air intakes, intake silencers, or induction systems specially adapted for, or arranged on, internal-combustion engines
- F02M35/02—Air cleaners
- F02M35/0201—Housings; Casings; Frame constructions; Lids; Manufacturing or assembling thereof
- F02M35/0205—Details, e.g. sensors or measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2560/00—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics
- F01N2560/08—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics the means being a pressure sensor
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Fluid Mechanics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
La présente invention a pour objet un module de pression (2), un capteur de pression différentielle (1) comprenant un tel module de pression, et un procédé de fabrication de ce module de pression et de ce capteur. Le module de pression (2) comprend un support en céramique (3) traversé par un orifice (4) et présentant une première surface (5) et une deuxième surface (6) opposée. Il comprend également une sonde de pression (7) montée sur la première surface (5) du support en céramique (3) de façon à recouvrir l'orifice (4). La sonde de pression (7) est reliée électriquement au support en céramique (3) par des moyens de connexion (8). Selon l'invention, le module de pression (2) comprend : - un premier élément tubulaire (9) fixé sur la première surface (5) du support en céramique (3), ledit premier élément tubulaire (9) entourant la sonde de pression (7) de façon à former un premier canal tubulaire (10) intégrant la sonde de pression (7), et - un deuxième élément tubulaire (11) fixé sur la deuxième surface (6) du support en céramique (3), ledit deuxième élément tubulaire (11) entourant l'orifice (4) du support en céramique (3) de façon à former un deuxième canal d'entrée de pression (12) reliant la sonde de pression (7) à un milieu à mesurer dans le véhicule.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1761618A FR3074579B1 (fr) | 2017-12-05 | 2017-12-05 | Procede de fabrication simplifie d'un capteur de pression differentielle |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1761618A FR3074579B1 (fr) | 2017-12-05 | 2017-12-05 | Procede de fabrication simplifie d'un capteur de pression differentielle |
FR1761618 | 2017-12-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3074579A1 FR3074579A1 (fr) | 2019-06-07 |
FR3074579B1 true FR3074579B1 (fr) | 2021-02-19 |
Family
ID=61873414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1761618A Active FR3074579B1 (fr) | 2017-12-05 | 2017-12-05 | Procede de fabrication simplifie d'un capteur de pression differentielle |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR3074579B1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3123983B1 (fr) * | 2021-06-11 | 2023-12-22 | Sc2N Sa | Capteur de pression |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7992441B2 (en) * | 2008-07-31 | 2011-08-09 | Sensata Technologies, Inc. | Pressure sensor for measuring pressure in a medium |
-
2017
- 2017-12-05 FR FR1761618A patent/FR3074579B1/fr active Active
Also Published As
Publication number | Publication date |
---|---|
FR3074579A1 (fr) | 2019-06-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE102008000128B4 (de) | Halbleitersensorvorrichtung und deren Herstellungsverfahren | |
CN102782456B (zh) | 传感器元件是传感器外壳的一部分的传感器 | |
US9513181B2 (en) | Flat covered leadless pressure sensor assemblies suitable for operation in extreme environments | |
JP2004347387A (ja) | 圧力センサ | |
CN1231745C (zh) | 流量传感器 | |
ATE528634T1 (de) | Dichte- und viskositätssensor | |
EA004582B1 (ru) | Датчик давления и способ изготовления датчика давления | |
CN104272074A (zh) | 压力传感器 | |
WO2007019577A3 (fr) | Capteur detectant la qualite d'un fluide | |
US10544035B2 (en) | Sensor component having two sensor functions | |
EP2687920A3 (fr) | Module électronique à résonateur à quartz muni de moyens de fixation antichoc | |
KR101601229B1 (ko) | 마이크로폰 | |
FR3074579B1 (fr) | Procede de fabrication simplifie d'un capteur de pression differentielle | |
CN103968994A (zh) | 流体压力传感器 | |
EP3304020B1 (fr) | Dispositif de detection de pression | |
CN110220636B (zh) | 一种毛细连通管式差压传感器及测量方法 | |
US20040237658A1 (en) | Capacitive micromechanical pressure sensor | |
TW200510700A (en) | Vibration sensor | |
FR3090121B1 (fr) | Capteur de courant à conducteur de courant intégré | |
AU2018407961B2 (en) | Integrated physiological signal detection sensor | |
CN104931193A (zh) | 一种带有参考真空室的mems皮拉尼计 | |
CN105008882A (zh) | 压力传感器及其制造方法 | |
CN208984269U (zh) | 基于倒装焊芯片介质隔离型压力传感器 | |
US20090212899A1 (en) | Low Pressure Transducer Using Beam and Diaphragm | |
FR3041759B1 (fr) | Procede de modification d'une electrode de travail pour capteur detectant un metal dissous a l'etat de traces dans un liquide, electrode, capteur et son utilisation. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLSC | Publication of the preliminary search report |
Effective date: 20190607 |
|
PLFP | Fee payment |
Year of fee payment: 3 |
|
PLFP | Fee payment |
Year of fee payment: 4 |
|
PLFP | Fee payment |
Year of fee payment: 5 |
|
PLFP | Fee payment |
Year of fee payment: 6 |
|
PLFP | Fee payment |
Year of fee payment: 7 |