FR3067619B1 - Buse d'ejection configuree pour projeter un fluide sous la forme d'un jet convergent - Google Patents

Buse d'ejection configuree pour projeter un fluide sous la forme d'un jet convergent Download PDF

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Publication number
FR3067619B1
FR3067619B1 FR1755370A FR1755370A FR3067619B1 FR 3067619 B1 FR3067619 B1 FR 3067619B1 FR 1755370 A FR1755370 A FR 1755370A FR 1755370 A FR1755370 A FR 1755370A FR 3067619 B1 FR3067619 B1 FR 3067619B1
Authority
FR
France
Prior art keywords
project
fluid
ejection nozzle
nozzle configured
convergent jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1755370A
Other languages
English (en)
Other versions
FR3067619A1 (fr
Inventor
Soriba Franciszek Sylla
Cedric Sire
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sourcelab
Original Assignee
Sourcelab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sourcelab filed Critical Sourcelab
Priority to FR1755370A priority Critical patent/FR3067619B1/fr
Priority to PCT/FR2018/051377 priority patent/WO2018229424A1/fr
Publication of FR3067619A1 publication Critical patent/FR3067619A1/fr
Application granted granted Critical
Publication of FR3067619B1 publication Critical patent/FR3067619B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/005—Nozzles or other outlets specially adapted for discharging one or more gases
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H05G2/006—X-ray radiation generated from plasma being produced from a liquid or gas details of the ejection system, e.g. constructional details of the nozzle
FR1755370A 2017-06-14 2017-06-14 Buse d'ejection configuree pour projeter un fluide sous la forme d'un jet convergent Active FR3067619B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1755370A FR3067619B1 (fr) 2017-06-14 2017-06-14 Buse d'ejection configuree pour projeter un fluide sous la forme d'un jet convergent
PCT/FR2018/051377 WO2018229424A1 (fr) 2017-06-14 2018-06-12 Buse d'éjection configurée pour projeter un fluide sous la forme d'un jet convergent

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1755370A FR3067619B1 (fr) 2017-06-14 2017-06-14 Buse d'ejection configuree pour projeter un fluide sous la forme d'un jet convergent
FR1755370 2017-06-14

Publications (2)

Publication Number Publication Date
FR3067619A1 FR3067619A1 (fr) 2018-12-21
FR3067619B1 true FR3067619B1 (fr) 2022-05-20

Family

ID=60515448

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1755370A Active FR3067619B1 (fr) 2017-06-14 2017-06-14 Buse d'ejection configuree pour projeter un fluide sous la forme d'un jet convergent

Country Status (2)

Country Link
FR (1) FR3067619B1 (fr)
WO (1) WO2018229424A1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5577092A (en) * 1995-01-25 1996-11-19 Kublak; Glenn D. Cluster beam targets for laser plasma extreme ultraviolet and soft x-ray sources
US6105885A (en) * 1998-04-03 2000-08-22 Advanced Energy Systems, Inc. Fluid nozzle system and method in an emitted energy system for photolithography
JP2005285675A (ja) * 2004-03-30 2005-10-13 Toudai Tlo Ltd ガスターゲット生成装置および生成方法
FR2976440B1 (fr) * 2011-06-09 2014-01-17 Ecole Polytech Procede et agencement pour engendrer un jet de fluide, procede et systeme de transformation du jet en un plasma et applications de ce systeme

Also Published As

Publication number Publication date
FR3067619A1 (fr) 2018-12-21
WO2018229424A1 (fr) 2018-12-20

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