FR3064750B1 - SENSOR FOR MEASURING ACCELERATION FORCE ACCORDING TO THREE AXES - Google Patents

Abstract

The invention relates to a triaxial acceleration sensor for simultaneously measuring acceleration forces comprising: a piezoelectric element having an axis of revolution (S) mounted between a support and a seismic mass; - Electrodes (A, B, C, D, ...) and against electrode arranged on the one hand in a circular manner around the axis of revolution (S) and on the other hand, vis-à-vis each other to form at least three pairs each formed of an electrode and counter-electrode located opposite, and each delivering a measurement signal; a processing circuit for digitizing the measurement signals and processing the digitized measurement signals to deliver a sensitive signal along each axis from the combination of the digitized measurement signals.

Description

The present invention relates to the technical field of sensors measuring acceleration forces along three axes and more precisely to the piezoelectric triaxial accelerometers.

The operating principle of an accelerometer is well known. A seismic mass exerts, under the effect of the acceleration, compressive or shearing forces on a piezoelectric material which then generates an electric charge proportional to the force applied to it, in this case, proportional to the acceleration . In general, such a sensor comprises a piezoelectric element having an axis of symmetry parallel to one of the measurement axes. This piezoelectric element has a polarization axis parallel to this measurement axis. In the case of a compression type sensor, this piezoelectric element is mounted in compression between a seismic mass and a support or a base, using a screw ensuring the compression of the piezoelectric element and the assembly between the seismic mass and the support. An electrode is arranged on the face of the piezoelectric element in contact with the support while a counter-electrode is arranged on the face of the piezoelectric element in contact with the seismic mass. The electrode and the counter-electrode are connected to a processing circuit for processing the electrical signals delivered by the electrode and the counter-electrode. Indeed, when an acceleration occurs along this measurement axis in the seismic base-mass direction, the piezoelectric element which is subjected to compression produces positive charges on the counter-electrode. In the case where the acceleration occurs along this axis of measurement but in the opposite sense seismic mass-base, the piezoelectric element which is subjected to a relaxation produces negative charges on the counter-electrode.

In the state of the art, it is known to many accelerometer solutions implementing such a principle and allowing the measurement of acceleration forces along three axes. A first category of solutions consists in using at least three piezoelectric elements mounted to be sensitive to the acceleration forces along three axes. For example, US Pat. No. 6,038,924 discloses a triaxial accelerometer having three angularly shifted sensor elements and a logic circuit that cancels the transverse forces in each direction from the signals from the three directions. This category of accelerometers has a complexity of implementation relied in particular on the geometric conditions of the assembly of the elements to be respected.

A second category of solutions consists in using a single piezoelectric element comprising a plurality of differently polarized parts as proposed by US Pat. No. 5,052,226 or comprising several electrodes and counter-electrodes to reduce the external electrical or electromagnetic influences as proposed by US Pat. No. 5,117 696. If the use of a single piezoelectric element makes it possible to limit the cost of such a sensor, such a sensor does not make it possible to measure the acceleration forces along three axes and does not make it possible to eliminate parasitic transverse stresses.

The present invention aims to remedy the drawbacks of the state of the art by proposing a sensor of simple design, able to measure acceleration forces along three axes, this sensor implementing a piezoelectric element while allowing to remove in particular the parasitic transverse forces.

To achieve such an objective, the object of the invention relates to a triaxial acceleration sensor for simultaneously measuring acceleration forces along a first axis, a second axis and a third axis perpendicular to each other in pairs, the sensor comprising a piezoelectric element having an axis of revolution parallel to the third axis, the piezoelectric element being mounted between a support and a seismic mass, and having a polarization axis parallel to the axis of revolution; a series of electrodes arranged on one face of the piezoelectric element; a counter electrode arranged on one side of the piezoelectric element opposite to that provided with the electrodes; a processing circuit connected to the electrodes and against the electrode for processing the electrical measurement signals delivered by the electrodes and the counter-electrode.

According to the invention: the electrodes and the counter-electrode are arranged on the one hand in a circular manner around the axis of revolution and on the other hand, facing each other to constitute at least three pairs each formed of an electrode and the counter-electrode located opposite, and each delivering a measurement signal; the processing circuit ensures the digitization of the measurement signals and the processing of the digitized measurement signals in order to deliver: a sensitive signal along the first axis, from the combination of the digitized measurement signals; • a sensitive signal according to the second axis, from the combination of the digitized measurement signals; • a sensitive signal according to the third axis, from the combination of the measurement signals.

In addition, the sensor according to the invention may additionally have in combination at least one and / or the following additional characteristics: the piezoelectric element is mounted in compression between the support and the seismic mass in such a way that the measured accelerations are converted into measurement signals by virtue of its longitudinal deformation mode and in that the piezoelectric element is in the form of a disc having two opposite flat faces on one of which the electrodes are arranged and on the other of which the counterelectrode is arranged; the piezoelectric element is mounted between the support and the seismic mass whose center of mass is offset from the plane of symmetry of the piezoelectric element normal to its axis of revolution so that the measured accelerations are converted into measurement signals by means of its mode of deformation in shear and in that the piezoelectric element is in the form of a disc having two opposite planar faces interconnected by internal and external cylindrical faces on one of which the electrodes are arranged and on the other of which the counterelectrode is arranged; - The processing circuit affects during the processing of each measurement signal, to deliver during a calibration phase, the sensitive signals along the three axes a set of correction coefficients determined beforehand during a calibration phase; the series of electrodes comprises a first and a second electrode arranged diametrically opposite with respect to the axis of revolution to recover charges from the element along the first axis, and a third and a fourth electrode arranged diametrically opposite with respect to the axis of revolution for recovering loads from the element along the second axis; - An annular electrode arranged symmetrically about the axis of revolution and vis-à-vis a counter electrode for delivering a sensitive signal along the third axis; the processing circuit comprises, at the input, at least one circuit for digitizing the signals delivered by the electrodes and against the electrode; the piezoelectric element comprises a stack of piezoelectric materials; the piezoelectric element comprises a stack of two piezoelectric materials having axes of polarization of opposite direction; - The base and the seismic mass are interconnected by a device ensuring the compression of the piezoelectric element.

Various other characteristics appear from the description given below with reference to the accompanying drawings which show, by way of non-limiting examples, embodiments of the subject of the invention.

Figure 1 is an elevational sectional view of an embodiment of a triaxial acceleration sensor according to the invention, operating in a compression deformation mode.

FIG. 2 is a view of a preferred embodiment of the electrodes of the triaxial acceleration sensor according to the invention illustrated in FIG. 1.

FIG. 3 is a view of another exemplary embodiment of the electrodes of the triaxial acceleration sensor according to the invention illustrated in FIG. 1.

Figure 4 is an elevational sectional view of an embodiment of a triaxial acceleration sensor according to the invention, operating in a shear deformation mode.

Figure 5 is a perspective view of the piezoelectric element used for the sensor shown in FIG. 4.

Figure 6 is a block diagram illustrating the signal processing of the triaxial acceleration sensor according to the invention.

As is more precisely apparent from the Figures, the object of the invention relates to an acceleration sensor 1 adapted to simultaneously measure acceleration forces along a first axis X, a second axis Y and a third axis Z perpendicular to each other two by two. The sensor 1 comprises a piezoelectric element 2 having a polarization axis P parallel to the third axis Z. This piezoelectric element 2 comprises an axis of revolution S parallel to the third axis Z. In the example illustrated in FIG. 1, the piezoelectric element 2 is in the form of a disc having two opposite planar faces 2a, 2b extending parallel to one another in the X, Y plane. The piezoelectric element 2 is provided at its center, a through passage 3 centered on the axis of revolution S.

According to a first embodiment illustrated by FIGS. 1 and 2, this piezoelectric element 2 is mounted in compression between a support or a base 5 and a seismic mass 6 according to the longitudinal deformation mode d33. In the example illustrated in the drawings, the base 5 and the seismic mass 6 are interconnected by a device 7 ensuring the compression of the piezoelectric element 2 along the third axis Z. For example, the compression device is a screw 7 which is supported by its head 8 on the seismic mass 6, being screwed into a threaded hole 9 made in the base 5, through the piezoelectric element 2 through the passage 3. Of course, the compression fitting of the piezoelectric element 2 can be made differently, for example using an axis instead of the screw 7.

Conventionally, the piezoelectric element 2 is electrically isolated from the base 5 and the seismic mass 6. This piezoelectric element 2 is provided on its flat face 2a in contact with the support 5, with a series of electrodes A, B , C, D, ... and on its opposite plane face 2b in contact with the seismic mass 6, a counter-electrode K. These electrodes A, B, C, D, ... and this counter-electrode K are connected to a processing circuit 10 shown in FIG. 6, adapted to acquire and process the electrical signals Sa, Sb, Sc, Sd, ... delivered by the electrodes and against the electrode, as will be explained in the following description.

According to the invention, the electrodes A, B, C, D, ... and the counter-electrode K are arranged in a circular manner about the axis of revolution S and facing each other or facing each other. others to constitute at least three, and in the example illustrated in FIG. 2, four pairs each formed of an electrode and the counter-electrode. For each of the pairs, an electrode and the counter-electrode are located opposite one another.

In the example illustrated in FIG. 2, each electrode A, B, C, D has the shape of a circular sector extending in a range of the order of 90 °. Thus, the electrodes A, B, C, D are distributed in a circular manner about the axis of revolution S. In the example shown, the electrodes A and B are symmetrically opposite with respect to the axis of revolution S parallel to the third axis Z, being centered substantially along the first axis X to be mainly sensitive to an acceleration along the first axis X while the electrodes C and D are symmetrically opposite with respect to the axis of revolution S parallel to the third axis Z, by being centered substantially along the second axis Y to be mainly sensitive to an acceleration along the second axis Y. It should be noted that the electrodes A, B, C, D may be made unsymmetrically.

Each electrode A, B, C, D is positioned facing the counter-electrode K made in a circular manner around the axis of revolution S, so that each electrode A, B, C, D is located opposite in accordance with direction of the third axis Z, against the electrode K. It is thus formed four pairs of electrodes and against electrode AK, BK, CK, DK each delivering a measurement signal respectively Sa, Sb, Sc, Sd in the illustrated example. Typically, the counter-electrode is a common reference, like mass.

Of course, the number of electrodes distributed in a circular manner around the axis of revolution S may be different from four.

Fig. 3 illustrates another embodiment in which the series of electrodes further comprises electrodes A, B, C, D, of FIG. 2, an annular electrode E centered around the third axis Z and more precisely sensitive to compression along the third axis Z. According to this variant embodiment, the counter-electrode K furthermore comprises an annular part centered around the third axis Z and located in front of the annular electrode E. In the illustrated example, the annular electrode E is located in the center but it can also be located at the periphery of the electrodes.

Figs. 4 and 5 illustrate a second embodiment of the sensor for which the seismic mass 6 exerts, under the effect of acceleration, shear forces on the piezoelectric element 2. As explained above, this piezoelectric element 2 presents a polarization axis P parallel to the third axis Z. According to this embodiment, the piezoelectric element 2 is mounted between the support 5 and the seismic mass 6 whose center of mass is offset relative to the plane of symmetry of the element piezoelectric 2 which is normal to its axis of revolution S. Given the offset of the center of mass, the measured accelerations are converted into measurement signals Sa, Sb, Sc, Sd, ... thanks to its mode of deformation in shear ! 5. The piezoelectric element 2 is made in the form of a disc having two opposite planar faces 2a, 2b interconnected by internal cylindrical faces 2I and external second centered on the axis of revolution S. One of the cylindrical faces ( ie the outer cylindrical face 2e in the illustrated example) is arranged to receive the electrodes A, B, C, D, ... while the other of the cylindrical faces (namely the internal cylindrical face 2i in the example illustrated) is arranged to receive the counter-electrode K.

Each electrode A, B, C, D is positioned facing the counter-electrode K made in a circular manner about the axis of revolution S. Thus, each electrode A, B, C, D is located opposite the counter-electrode K in a direction normal to the direction of the third axis Z. There are thus formed four pairs of electrodes and against electrode AK, BK, CK, DK each delivering a measurement signal Sa, Sb, Sc, Sd respectively. in the example shown.

In the example illustrated in Fîg. 5, the electrodes A and B are symmetrically opposite with respect to the axis of revolution S parallel to the third axis Z, centered substantially along the first axis X to be sensitive mainly to an acceleration along the first axis X while the electrodes C and D are symmetrically opposite with respect to the axis of revolution S parallel to the third axis Z, being centered substantially along the second axis Y to be sensitive mainly to an acceleration along the second axis Y. It should be noted that the electrodes A, B, C, D may be made unsymmetrically.

The measurement signals Sa, Sb, Sc, Sd are recovered by the processing circuit 10 which provides the digitization of these measurement signals and the processing of the digitized measurement signals to deliver; A sensitive signal Sx along the first axis X, from the combination of the digitized measurement signals; • a signa! sensitive Sy along the second axis Y, from the combination of the digitized measurement signals; A sensitive signal Sz along the third axis Z, from the combination of the digitized measurement signals.

The processing circuit thus performs a numerical calculation using a choice of measurement signals to obtain a sensitive signal on each of the three axes X, Y, Z.

Thus, for the example illustrated in FIG. 2, the electrodes A and B are assigned to the recovery of the electrical charges of the sensitive piezoelectric element along the first axis X. The electrode A recovers the negative compression charges for an acceleration along the first axis X and the incoming direction represented by the arrow in FIG. 2. The electrode B recovers the positive expansion charges for an acceleration along the first axis X and the incoming direction represented by the arrow in FIG. 2.

Similarly, the electrodes C and D are assigned to the recovery of the electrical charges of the sensitive piezoelectric element along the second axis Y. The electrode C recovers the negative compression charges for an acceleration along the second axis Y and the direction incoming represented by the arrow in FIG. 2. The electrode D recovers the positive expansion charges for an acceleration along the second Y axis and the incoming direction represented by the arrow in FIG. 2. As explained above, these four electrodes A, B, C, D, are combined with the counter-electrode K.

In a perfect embodiment, for an acceleration purely along the first axis X and zero along the second axis Y, each pair CK or DK electrode and against electrode receives a portion of compressive force and a portion of stress relaxation which cause a cancellation of the electric charges appearing on these pairs CK or DK of electrode and against electrode. The sensor 1 according to the invention is therefore only sensitive along the first axis X, being insensitive in the transverse direction, namely the second axis Y.

Similarly, for an acceleration purely along the second axis Y and zero along the first axis X, each pair AK or BK of electrode and counter-electrode receives a compressive force part and a relaxation force part which generate a cancellation of the electrical charges appearing on these pairs AK or BK of electrodes and against electrode. The sensor 1 according to the invention is therefore only sensitive along the second axis Y, being insensitive in the transverse direction, namely the first axis X.

For an acceleration along any axis in the plane formed by the first axis X and the second axis Y, the electrical charges appear on the pairs of electrodes and counterelectrodes, assigned to the first axis X and the second axis Y, proportionally to the vector decomposition of the axis of application of the acceleration, according to the first and second axes X, Y. In general, it seems advantageous to assign to each measurement signal, a correction coefficient for suppressing the influences of parasitic transverse stresses or orientation defects of the piezoelectric element, electrodes or counter-electrode. This correction is performed during a calibration phase of the sensor for each of the three axes.

Advantageously, during this calibration phase, it may be envisaged to adjust the sensitive signals along each axis to a normed value.

In the example of a perfect embodiment of the sensors, without parasitic transverse effects or orientation defects of the piezoelectric element, electrodes or counterelectrodes, the processing circuit 10 illustrated in FIG. 6 provides the digitization of the signals. Sa, Sb, Sc, Sd and, for example, provides the processing of these digitized measurement signals Sa, Sb, Sc, Sd to deliver: a sensitive signal Sx along the first axis X, obtained for example from the difference between the first Sa and second Sb measurement signals; A sensitive signal Sy along the second axis Y, obtained for example from the difference between the third Sc and fourth Sd measurement signals; A sensible signal Sz along the third axis Z, obtained from the sum of, for example, the first Sa, second Sb, third Sc and fourth Sd measurement signals.

Thus the sensitive signals become:

Of course, as explained above, a set of correction coefficients H is advantageously assigned to each measurement signal Sa, Sb, Sc, Sd, to compensate for the orientation defects and the transverse effects as well as potentially all the imperfections of realization. of the sensor.

Advantageously, during this calibration phase, the processing circuit 10 adjusts the sensitive signals Sx, Sy and Sz to a normed value by multiplying the values by a correction gain G specific to each axis X, y, z.

Thus, more generally, the sensitive signals become:

As is apparent from the foregoing description, the sensor 1 according to the invention makes it possible to measure the accelerations along three axes X, Y, Z, with a single piezoelectric element 2 used in longitudinal mode d33 or in shear mode d15, with possibility compensation for transverse effects, orientation defects of the piezoelectric element 2 or electrodes A, B, C, D, or other defects in the embodiment of the sensor, and with possibility of adjustment of the final sensitivities to values normed. This design is particularly interesting to guarantee excellent metrological quality while reducing the cost of the sensor by avoiding precise mechanical assembly.

In the examples illustrated in FIGS. 2 and 5, the electrodes and the counter electrode have a circular sector profile. Of course, the

The shape of the electrodes and the counterelectrode may be different while being circular.

According to a preferred embodiment, the piezoelectric element 2 is made of a single ceramic. According to another exemplary embodiment, the piezoelectric element 2 comprises a stack of piezoelectric materials. In the case of use with large thermal transients, the piezoelectric element 2 comprises a stack of two piezoelectric materials having axes of polarization in the opposite direction. The invention is not limited to the examples described and shown because various modifications can be made without departing from its scope.

Claims (6)

REVER DICATÏOIMS ί - Triaxial acceleration sensor for simultaneously measuring acceleration forces along a first axis (X), a second axis (Y) and a third axis (Z) perpendicular to each other in pairs, the sensor comprising: a piezoelectric element (2) having an axis of revolution (S) parallel to the third axis (Z), the piezoelectric element (2) being mounted between a support (5) and a seismic mass (6), and having an axis of polarization (P) parallel to revolution axis (S); a series of electrodes (A, B, C, D, E,...) arranged on one face of the piezoelectric element; - a counter electrode (R) arranged on one side of the piezoelectric element opposite to that provided with the electrodes; the electrodes (A, B, C, D, E, etc.) and the counter-electrode (R) being arranged on the one hand in a circular manner around the axis of revolution (S) and on the other hand , facing each other to form at least three pairs formed each of an electrode and counter-electrode located opposite, and each delivering a measurement signal (Sa, 8b, Se , Sd, Se, ...); - a processing circuit (10) connected to the electrodes and against the electrode for processing the electrical measurement signals (Sa, Sb, Se, Sd, Se, ...) delivered by the electrodes and against the electrode; characterized in that: the processing circuit (10) digitizes the measurement signals and processes the digitized measurement signals to output; A sensitive signal (Sx) along the first axis (X) from the combination of the digitized measurement signals; A sensitive signal (Sy) along the second axis (Y) from the combination of the digitized measurement signals; A sensitive signal (Sz) along the third axis (Z), from the combination of the measurement signals; the processing circuit affecting the processing of each measurement signal (Sa, Sb, Sc, Sd, Se,...), in order to deliver, during a calibration phase, the sensitive signals (Sx, Sy, Sz ) along the three axes (X, V, Z) a set of correction coefficients determined in advance during a calibration phase, 2 ~ triaxial acceleration sensor according to claim 1, characterized in that the piezoelectric element (2 ) is mounted in compression between the support (5) and the seismic mass (6) so that the measured accelerations are converted into measurement signals (Sa, Sb, Sc, Sd, Se,.,.) by virtue of its mode of measurement. longitudinal deformation and in that the piezoelectric element (2) is in the form of a disc have two opposite flat faces on one of which the electrodes are arranged and on the other of which is arranged against the electrode. 3 - triaxial acceleration sensor according to claim 1, characterized in that the piezoelectric element (2) is mounted between the support (5) and the seismic mass (6) whose center of mass is offset from the plane of symmetry of the piezoelectric element (2) normal to its axis of revolution (S) so that the measured accelerations are converted into measurement signals (Sa, Sb, Sc, Sd, Se, ...) by virtue of its mode of deformation in shearing and in that the piezoelectric element (2) is in the form of a disk have two opposite planar faces interconnected by internal cylindrical faces (2i) and external (2e) on one of which the electrodes are arranged and on the other side of which the counter-electrode is 4 - triaxial acceleration sensor according to one of the preceding claims, characterized in that the series of electrodes comprises a first (A) and a second electrode (B) arranged diametrically opposite to the axis of revolution (S ) to recover charges of the element along the first axis (X), and a third (C) and a fourth (D) electrode disposed diametrically opposite to the axis of revolution (S) to recover charges of the element according to the second axis (Y), 5 ~ triaxial acceleration sensor according to claim 4, characterized in that it comprises an annular electrode (E) arranged symmetrically about the axis of revolution and vis-a-vis against a counter-electrode for delivering a sensitive signal along the third axis (Z). 6 - triaxial acceleration sensor according to one of claims-1 to 5f, characterized in that the processing circuit (10) comprises at the input, at least one digitization circuit of the signals delivered by the electrodes and against the electrode. 7 »triaxial acceleration sensor according to one of claims 1 to 6, characterized in that the piezoelectric element (2) comprises a stack of piezoelectric materials, 8 - triaxial acceleration sensor according to claim 7, characterized in that the piezoelectric element (2) comprises a stack of two piezoelectric materials having axes of polarization (P) of opposite direction. 9 - triaxial acceleration sensor according to one of claims 1 to 2 and 4 to 8, characterized in that the base (5) and the seismic mass (6) are interconnected by a device (7) ensuring the compression of the piezoelectric element.