FR3057675B1 - METHOD FOR PRODUCING A WAVEGUIDE - Google Patents

METHOD FOR PRODUCING A WAVEGUIDE

Info

Publication number
FR3057675B1
FR3057675B1 FR1659924A FR1659924A FR3057675B1 FR 3057675 B1 FR3057675 B1 FR 3057675B1 FR 1659924 A FR1659924 A FR 1659924A FR 1659924 A FR1659924 A FR 1659924A FR 3057675 B1 FR3057675 B1 FR 3057675B1
Authority
FR
France
Prior art keywords
waveguide
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1659924A
Other languages
French (fr)
Other versions
FR3057675A1 (en
Inventor
Folly Eli Ayi-Yovo
Cedric Durand
Frederic Gianesello
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR1659924A priority Critical patent/FR3057675B1/en
Priority to US15/499,261 priority patent/US10067291B2/en
Priority to US15/730,415 priority patent/US10782468B2/en
Publication of FR3057675A1 publication Critical patent/FR3057675A1/en
Priority to US16/101,127 priority patent/US10488594B2/en
Application granted granted Critical
Publication of FR3057675B1 publication Critical patent/FR3057675B1/en
Priority to US16/662,810 priority patent/US10976494B2/en
Priority to US17/026,819 priority patent/US11774664B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12038—Glass (SiO2 based materials)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Optical Integrated Circuits (AREA)
FR1659924A 2016-10-13 2016-10-13 METHOD FOR PRODUCING A WAVEGUIDE Expired - Fee Related FR3057675B1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR1659924A FR3057675B1 (en) 2016-10-13 2016-10-13 METHOD FOR PRODUCING A WAVEGUIDE
US15/499,261 US10067291B2 (en) 2016-10-13 2017-04-27 Method of manufacturing a waveguide
US15/730,415 US10782468B2 (en) 2016-10-13 2017-10-11 Method for manufacturing an optical device
US16/101,127 US10488594B2 (en) 2016-10-13 2018-08-10 Method of manufacturing a waveguide
US16/662,810 US10976494B2 (en) 2016-10-13 2019-10-24 Method of manufacturing a waveguide
US17/026,819 US11774664B2 (en) 2016-10-13 2020-09-21 Method for manufacturing an optical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1659924A FR3057675B1 (en) 2016-10-13 2016-10-13 METHOD FOR PRODUCING A WAVEGUIDE

Publications (2)

Publication Number Publication Date
FR3057675A1 FR3057675A1 (en) 2018-04-20
FR3057675B1 true FR3057675B1 (en) 2018-11-30

Family

ID=57539501

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1659924A Expired - Fee Related FR3057675B1 (en) 2016-10-13 2016-10-13 METHOD FOR PRODUCING A WAVEGUIDE

Country Status (1)

Country Link
FR (1) FR3057675B1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5894538A (en) * 1997-09-17 1999-04-13 Lucent Technologies Inc. Method of forming integrated optical circuit planar waveguide turning mirrors
WO2002054120A1 (en) * 2000-12-28 2002-07-11 Keio University Optical signal processing circuit and method of producing same
JP2003226551A (en) * 2002-02-05 2003-08-12 Nippon Sheet Glass Co Ltd Glass substrate having fine pore and production method therefor
CA2428187C (en) * 2002-05-08 2012-10-02 National Research Council Of Canada Method of fabricating sub-micron structures in transparent dielectric materials

Also Published As

Publication number Publication date
FR3057675A1 (en) 2018-04-20

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