FR3052326B1 - Generateur de plasma - Google Patents

Generateur de plasma Download PDF

Info

Publication number
FR3052326B1
FR3052326B1 FR1600911A FR1600911A FR3052326B1 FR 3052326 B1 FR3052326 B1 FR 3052326B1 FR 1600911 A FR1600911 A FR 1600911A FR 1600911 A FR1600911 A FR 1600911A FR 3052326 B1 FR3052326 B1 FR 3052326B1
Authority
FR
France
Prior art keywords
plasma generator
plasma
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1600911A
Other languages
English (en)
Other versions
FR3052326A1 (fr
Inventor
Guillaume Regnard
Didier Dumont
Bernard Darges
Nicolas Martinez
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thales SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales SA filed Critical Thales SA
Priority to FR1600911A priority Critical patent/FR3052326B1/fr
Publication of FR3052326A1 publication Critical patent/FR3052326A1/fr
Application granted granted Critical
Publication of FR3052326B1 publication Critical patent/FR3052326B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32266—Means for controlling power transmitted to the plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/463—Microwave discharges using antennas or applicators

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
FR1600911A 2016-06-07 2016-06-07 Generateur de plasma Active FR3052326B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1600911A FR3052326B1 (fr) 2016-06-07 2016-06-07 Generateur de plasma

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1600911 2016-06-07
FR1600911A FR3052326B1 (fr) 2016-06-07 2016-06-07 Generateur de plasma

Publications (2)

Publication Number Publication Date
FR3052326A1 FR3052326A1 (fr) 2017-12-08
FR3052326B1 true FR3052326B1 (fr) 2018-06-29

Family

ID=56896613

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1600911A Active FR3052326B1 (fr) 2016-06-07 2016-06-07 Generateur de plasma

Country Status (1)

Country Link
FR (1) FR3052326B1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2840451B1 (fr) * 2002-06-04 2004-08-13 Centre Nat Rech Scient Dispositif de production d'une nappe de plasma
FR2955451A1 (fr) * 2010-05-25 2011-07-22 Centre Nat Rech Scient Dispositif de production d'un plasma, comportant au moins un applicateur coaxial
FR2993428B1 (fr) * 2012-07-11 2014-08-08 Centre Nat Rech Scient Applicateur d'onde de surface pour la production de plasma

Also Published As

Publication number Publication date
FR3052326A1 (fr) 2017-12-08

Similar Documents

Publication Publication Date Title
GB2548382B (en) Plasma generation
DK3067559T3 (da) Inflator
DK3330593T3 (da) Halo-lysenhed
GB201508568D0 (en) Generator
GB201508567D0 (en) Generator
FR3040838B1 (fr) Generateur magnetohydrodynamique
DK3407944T3 (da) Forstøver
DK3218906T3 (da) Elektrisk generatorsystem
FR3023396B1 (fr) Generateur de nombres aleatoires
UA37226S (uk) Генератор
DK3469445T3 (da) Termoelektrisk generator
GB201608288D0 (en) Plasma generation
DK3642475T3 (da) Hvirvelgenerator
DK3414973T3 (da) Varmegenerator
GB2539482B (en) Sound generator
ES2658113B8 (es) Conjunto de envasado
GB201520998D0 (en) Generator
FR3045811B1 (fr) Generateur de gaz
DK3578014T3 (da) Plasmakilde
ES1147283Y (es) Dispositivo generador de energía eléctrica.
FR3040942B1 (fr) Generateur de gaz
FR3052326B1 (fr) Generateur de plasma
ES1128405Y (es) Equipo generador de energía
UA36870S (uk) Хрестовина генератора
DK3481316T3 (da) Elektrokirurgisk generator

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20171208

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 6

PLFP Fee payment

Year of fee payment: 7

PLFP Fee payment

Year of fee payment: 8

PLFP Fee payment

Year of fee payment: 9