FR3046291B1 - ELECTRONIC CIRCUIT COMPRISING TRENCHES OF ELECTRICAL INSULATION - Google Patents

ELECTRONIC CIRCUIT COMPRISING TRENCHES OF ELECTRICAL INSULATION Download PDF

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Publication number
FR3046291B1
FR3046291B1 FR1563329A FR1563329A FR3046291B1 FR 3046291 B1 FR3046291 B1 FR 3046291B1 FR 1563329 A FR1563329 A FR 1563329A FR 1563329 A FR1563329 A FR 1563329A FR 3046291 B1 FR3046291 B1 FR 3046291B1
Authority
FR
France
Prior art keywords
trenches
electronic circuit
electrical insulation
insulation
electrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1563329A
Other languages
French (fr)
Other versions
FR3046291A1 (en
Inventor
Bertrand Chambion
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1563329A priority Critical patent/FR3046291B1/en
Priority to PCT/FR2016/053617 priority patent/WO2017109414A1/en
Publication of FR3046291A1 publication Critical patent/FR3046291A1/en
Application granted granted Critical
Publication of FR3046291B1 publication Critical patent/FR3046291B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
    • H01L29/0692—Surface layout
FR1563329A 2015-12-24 2015-12-24 ELECTRONIC CIRCUIT COMPRISING TRENCHES OF ELECTRICAL INSULATION Expired - Fee Related FR3046291B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1563329A FR3046291B1 (en) 2015-12-24 2015-12-24 ELECTRONIC CIRCUIT COMPRISING TRENCHES OF ELECTRICAL INSULATION
PCT/FR2016/053617 WO2017109414A1 (en) 2015-12-24 2016-12-21 Electronic circuit comprising electrical insulation trenches

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1563329A FR3046291B1 (en) 2015-12-24 2015-12-24 ELECTRONIC CIRCUIT COMPRISING TRENCHES OF ELECTRICAL INSULATION
FR1563329 2015-12-24

Publications (2)

Publication Number Publication Date
FR3046291A1 FR3046291A1 (en) 2017-06-30
FR3046291B1 true FR3046291B1 (en) 2018-02-16

Family

ID=56117777

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1563329A Expired - Fee Related FR3046291B1 (en) 2015-12-24 2015-12-24 ELECTRONIC CIRCUIT COMPRISING TRENCHES OF ELECTRICAL INSULATION

Country Status (2)

Country Link
FR (1) FR3046291B1 (en)
WO (1) WO2017109414A1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005059035B4 (en) * 2005-12-10 2007-11-08 X-Fab Semiconductor Foundries Ag Isolation trench structures for high voltages
JP5431638B2 (en) * 2006-10-27 2014-03-05 ローム株式会社 Semiconductor integrated circuit
US20110049668A1 (en) * 2009-09-02 2011-03-03 Ming-Cheng Lin Deep trench isolation structures between high voltage semiconductor devices and fabrication methods thereof
FR3012665A1 (en) * 2013-10-31 2015-05-01 St Microelectronics Crolles 2

Also Published As

Publication number Publication date
WO2017109414A1 (en) 2017-06-29
FR3046291A1 (en) 2017-06-30

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