FR3038058B1 - Dispositif de mesure de topographie d'une surface d'un ensemble de systemes. - Google Patents

Dispositif de mesure de topographie d'une surface d'un ensemble de systemes. Download PDF

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Publication number
FR3038058B1
FR3038058B1 FR1555780A FR1555780A FR3038058B1 FR 3038058 B1 FR3038058 B1 FR 3038058B1 FR 1555780 A FR1555780 A FR 1555780A FR 1555780 A FR1555780 A FR 1555780A FR 3038058 B1 FR3038058 B1 FR 3038058B1
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FR
France
Prior art keywords
drawer
enclosure
guide
systems
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1555780A
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English (en)
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FR3038058A1 (fr
Inventor
Regis Braisaz
Pierre Vernhes
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INSIDIX
Original Assignee
INSIDIX
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Publication date
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Priority to FR1555780A priority Critical patent/FR3038058B1/fr
Publication of FR3038058A1 publication Critical patent/FR3038058A1/fr
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Publication of FR3038058B1 publication Critical patent/FR3038058B1/fr
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0009—Guiding surfaces; Arrangements compensating for non-linearity there-of
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/167—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by projecting a pattern on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/023—Controlling conditions in casing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Nonlinear Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Ce dispositif (1) comporte une enceinte, des moyens de chauffage infrarouge (8), des moyens de projection agencés pour projeter une lumière structurée à la surface de chaque système, des moyens de capture d'image agencés pour capturer la lumière structurée réfléchie par la surface de chaque système, le dispositif étant remarquable en ce qu'il comporte un tiroir (3) de chargement, des moyens de guidage agencés pour guider le tiroir (3) dans un plan de guidage (X, Y) entre une première position dans laquelle le tiroir (3) est situé hors de l'enceinte, et une deuxième position dans laquelle le tiroir (3) est situé à l'intérieur de l'enceinte, des moyens de déplacement motorisés (M1, M2) configurés pour déplacer une mire d'étalonnage des moyens de capture d'image suivant une direction perpendiculaire au plan de guidage (X, Y).
FR1555780A 2015-06-23 2015-06-23 Dispositif de mesure de topographie d'une surface d'un ensemble de systemes. Active FR3038058B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1555780A FR3038058B1 (fr) 2015-06-23 2015-06-23 Dispositif de mesure de topographie d'une surface d'un ensemble de systemes.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1555780A FR3038058B1 (fr) 2015-06-23 2015-06-23 Dispositif de mesure de topographie d'une surface d'un ensemble de systemes.

Publications (2)

Publication Number Publication Date
FR3038058A1 FR3038058A1 (fr) 2016-12-30
FR3038058B1 true FR3038058B1 (fr) 2020-08-07

Family

ID=53801087

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1555780A Active FR3038058B1 (fr) 2015-06-23 2015-06-23 Dispositif de mesure de topographie d'une surface d'un ensemble de systemes.

Country Status (1)

Country Link
FR (1) FR3038058B1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6564166B1 (en) * 1999-10-27 2003-05-13 Georgia Tech Research Corporation Projection moiré method and apparatus for dynamic measuring of thermal induced warpage
US20030148536A1 (en) * 2002-02-04 2003-08-07 Chi-Wang Liang Chemiluminescence analyzer
FR2870935A1 (fr) * 2004-05-25 2005-12-02 Insidix Sarl Dispositif de mesure de deformations de surface
US10281678B2 (en) * 2013-01-04 2019-05-07 Meso Scale Technologies, Llc Assay apparatuses, methods and reagants

Also Published As

Publication number Publication date
FR3038058A1 (fr) 2016-12-30

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