FR3038057B1 - DEVICE FOR MEASURING THE TOPOGRAPHY OF A SURFACE OF A SYSTEM. - Google Patents

DEVICE FOR MEASURING THE TOPOGRAPHY OF A SURFACE OF A SYSTEM. Download PDF

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Publication number
FR3038057B1
FR3038057B1 FR1555779A FR1555779A FR3038057B1 FR 3038057 B1 FR3038057 B1 FR 3038057B1 FR 1555779 A FR1555779 A FR 1555779A FR 1555779 A FR1555779 A FR 1555779A FR 3038057 B1 FR3038057 B1 FR 3038057B1
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FR
France
Prior art keywords
enclosure
wall
structured light
separation medium
topography
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1555779A
Other languages
French (fr)
Other versions
FR3038057A1 (en
Inventor
Regis Braisaz
Pierre Vernhes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INSIDIX
Original Assignee
INSIDIX
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INSIDIX filed Critical INSIDIX
Priority to FR1555779A priority Critical patent/FR3038057B1/en
Publication of FR3038057A1 publication Critical patent/FR3038057A1/en
Application granted granted Critical
Publication of FR3038057B1 publication Critical patent/FR3038057B1/en
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/167—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by projecting a pattern on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/023—Controlling conditions in casing

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

Ce dispositif comporte une enceinte (2) adaptée pour recevoir le système, des moyens de chauffage agencés dans l'enceinte (2) pour chauffer le système, des moyens de projection (3) agencés hors de l'enceinte (2) pour projeter une lumière structurée dans le domaine visible à la surface du système, des moyens de capture d'image (4) agencés hors de l'enceinte (2) pour capturer la lumière structurée réfléchie par la surface du système, le dispositif étant remarquable en ce que l'enceinte (2) comporte une paroi interne, et une paroi externe (22), un milieu de séparation agencé pour séparer la paroi interne et la paroi externe (22), le milieu de séparation (23) présentant une effusivité thermique inférieure à 5000 J. K-1. m-2. s-1/2This device comprises an enclosure (2) adapted to receive the system, heating means arranged in the enclosure (2) for heating the system, projection means (3) arranged outside the enclosure (2) to project a system. structured light in the visible range on the surface of the system, image capture means (4) arranged outside the enclosure (2) to capture the structured light reflected from the surface of the system, the device being remarkable in that the enclosure (2) has an inner wall, and an outer wall (22), a separation medium arranged to separate the inner wall and the outer wall (22), the separation medium (23) having a thermal effusivity lower than 5000 J. K-1. m-2. s-1/2

FR1555779A 2015-06-23 2015-06-23 DEVICE FOR MEASURING THE TOPOGRAPHY OF A SURFACE OF A SYSTEM. Active FR3038057B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1555779A FR3038057B1 (en) 2015-06-23 2015-06-23 DEVICE FOR MEASURING THE TOPOGRAPHY OF A SURFACE OF A SYSTEM.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1555779 2015-06-23
FR1555779A FR3038057B1 (en) 2015-06-23 2015-06-23 DEVICE FOR MEASURING THE TOPOGRAPHY OF A SURFACE OF A SYSTEM.

Publications (2)

Publication Number Publication Date
FR3038057A1 FR3038057A1 (en) 2016-12-30
FR3038057B1 true FR3038057B1 (en) 2019-05-03

Family

ID=53801086

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1555779A Active FR3038057B1 (en) 2015-06-23 2015-06-23 DEVICE FOR MEASURING THE TOPOGRAPHY OF A SURFACE OF A SYSTEM.

Country Status (1)

Country Link
FR (1) FR3038057B1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6564166B1 (en) * 1999-10-27 2003-05-13 Georgia Tech Research Corporation Projection moiré method and apparatus for dynamic measuring of thermal induced warpage
FR2832800B1 (en) * 2001-11-29 2004-06-04 Gerard Samman REPRESENTATIVE SPEAKER OF A THERMAL SYSTEM AND DEVICE THUS EQUIPPED
FR2870935A1 (en) * 2004-05-25 2005-12-02 Insidix Sarl DEVICE FOR MEASURING SURFACE DEFORMATIONS
JP5709160B2 (en) * 2010-03-29 2015-04-30 株式会社日立ハイテクサイエンス Thermal analyzer
JP5436706B2 (en) * 2012-03-12 2014-03-05 キヤノン株式会社 Measuring device

Also Published As

Publication number Publication date
FR3038057A1 (en) 2016-12-30

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