FR3036976B1 - TREATMENT OF HYDROLYSIS EFFLUENTS OF CHLORINATED GASES - Google Patents

TREATMENT OF HYDROLYSIS EFFLUENTS OF CHLORINATED GASES

Info

Publication number
FR3036976B1
FR3036976B1 FR1555143A FR1555143A FR3036976B1 FR 3036976 B1 FR3036976 B1 FR 3036976B1 FR 1555143 A FR1555143 A FR 1555143A FR 1555143 A FR1555143 A FR 1555143A FR 3036976 B1 FR3036976 B1 FR 3036976B1
Authority
FR
France
Prior art keywords
effluents
hydrolysis
treatment
chlorinated gases
chlorinated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1555143A
Other languages
French (fr)
Other versions
FR3036976A1 (en
Inventor
Jean-Francois Potin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ArianeGroup SAS
Original Assignee
Herakles SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Herakles SA filed Critical Herakles SA
Priority to FR1555143A priority Critical patent/FR3036976B1/en
Priority to PCT/FR2016/051247 priority patent/WO2016193579A1/en
Publication of FR3036976A1 publication Critical patent/FR3036976A1/en
Application granted granted Critical
Publication of FR3036976B1 publication Critical patent/FR3036976B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/73—After-treatment of removed components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J41/00—Anion exchange; Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
    • B01J41/04—Processes using organic exchangers
    • B01J41/07—Processes using organic exchangers in the weakly basic form
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J49/00—Regeneration or reactivation of ion-exchangers; Apparatus therefor
    • B01J49/50—Regeneration or reactivation of ion-exchangers; Apparatus therefor characterised by the regeneration reagents
    • B01J49/57—Regeneration or reactivation of ion-exchangers; Apparatus therefor characterised by the regeneration reagents for anionic exchangers
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • C01B32/963—Preparation from compounds containing silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/991—Boron carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/30—Alkali metal compounds
    • B01D2251/304—Alkali metal compounds of sodium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/20—Organic adsorbents
    • B01D2253/206—Ion exchange resins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
FR1555143A 2015-06-05 2015-06-05 TREATMENT OF HYDROLYSIS EFFLUENTS OF CHLORINATED GASES Active FR3036976B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1555143A FR3036976B1 (en) 2015-06-05 2015-06-05 TREATMENT OF HYDROLYSIS EFFLUENTS OF CHLORINATED GASES
PCT/FR2016/051247 WO2016193579A1 (en) 2015-06-05 2016-05-26 Treatment of effluent from hydrolysis of chlorinated gases.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1555143A FR3036976B1 (en) 2015-06-05 2015-06-05 TREATMENT OF HYDROLYSIS EFFLUENTS OF CHLORINATED GASES

Publications (2)

Publication Number Publication Date
FR3036976A1 FR3036976A1 (en) 2016-12-09
FR3036976B1 true FR3036976B1 (en) 2017-06-23

Family

ID=53776816

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1555143A Active FR3036976B1 (en) 2015-06-05 2015-06-05 TREATMENT OF HYDROLYSIS EFFLUENTS OF CHLORINATED GASES

Country Status (2)

Country Link
FR (1) FR3036976B1 (en)
WO (1) WO2016193579A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10683572B2 (en) 2018-10-15 2020-06-16 Goodrich Corporation Silane recirculation for rapid carbon/silicon carbide or silicon carbide/silicon carbide ceramic matrix composites
CN112807949A (en) * 2020-08-13 2021-05-18 佰仕邦水处理环保科技(大连)有限公司 Process for treating low concentration acid and/or acid radical in solution

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3690041A (en) * 1971-09-30 1972-09-12 Du Pont SCRUBBING OF GASES CONTAINING TiCl{11
DE69833030T2 (en) * 1997-10-17 2006-08-24 Ebara Corp. METHOD AND DEVICE FOR TREATING EXHAUST GASES FROM SEMICONDUCTOR MANUFACTURING
US7470413B2 (en) * 1999-12-03 2008-12-30 Edwards Vacuum, Inc. Fluorine removal by ion exchange
DE19963433A1 (en) * 1999-12-28 2001-07-12 Degussa Process for the separation of chlorosilanes from gas streams
DE10102618A1 (en) * 2001-01-20 2002-08-01 Klaus J Huettinger Process for neutralizing halogens in effluent gases from CVD and CVI plants, comprises passing successively through two scrubbers containing alcohol and alkali respectively
JP4649631B2 (en) * 2004-09-27 2011-03-16 Ｊｆｅエンジニアリング株式会社 Treatment method of gas generated from incinerator

Also Published As

Publication number Publication date
WO2016193579A1 (en) 2016-12-08
FR3036976A1 (en) 2016-12-09

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