FR3035214A1 - - Google Patents
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- Publication number
- FR3035214A1 FR3035214A1 FR1652023A FR1652023A FR3035214A1 FR 3035214 A1 FR3035214 A1 FR 3035214A1 FR 1652023 A FR1652023 A FR 1652023A FR 1652023 A FR1652023 A FR 1652023A FR 3035214 A1 FR3035214 A1 FR 3035214A1
- Authority
- FR
- France
- Prior art keywords
- test
- optical element
- data
- electromagnetic radiation
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 144
- 238000012360 testing method Methods 0.000 claims abstract description 126
- 230000005670 electromagnetic radiation Effects 0.000 claims abstract description 62
- 230000004044 response Effects 0.000 claims abstract description 20
- 230000008021 deposition Effects 0.000 claims description 53
- 238000000034 method Methods 0.000 claims description 34
- 238000000572 ellipsometry Methods 0.000 claims description 14
- 238000004611 spectroscopical analysis Methods 0.000 claims description 10
- 238000010998 test method Methods 0.000 claims description 7
- 239000000523 sample Substances 0.000 description 86
- 238000004458 analytical method Methods 0.000 description 58
- 238000000151 deposition Methods 0.000 description 42
- 238000005259 measurement Methods 0.000 description 35
- 238000004519 manufacturing process Methods 0.000 description 31
- 239000000758 substrate Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 9
- 238000005240 physical vapour deposition Methods 0.000 description 9
- 238000005070 sampling Methods 0.000 description 8
- 238000005553 drilling Methods 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000012530 fluid Substances 0.000 description 5
- 238000005755 formation reaction Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012549 training Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000000541 cathodic arc deposition Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000005375 photometry Methods 0.000 description 1
- 238000003380 quartz crystal microbalance Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000009718 spray deposition Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000011364 vaporized material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0285—Testing optical properties by measuring material or chromatic transmission properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/005—Testing of reflective surfaces, e.g. mirrors
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2015/025922 WO2016167761A1 (en) | 2015-04-15 | 2015-04-15 | Parallel optical measurement system with broadband angle selective filters |
| PCT/US2015/025866 WO2016167757A1 (en) | 2015-04-15 | 2015-04-15 | Optical computing devices comprising broadband angle-selective filters |
| PCT/US2015/025869 WO2016167758A1 (en) | 2015-04-15 | 2015-04-15 | Optical computing devices comprising rotatable broadband angle-selective filters |
| PCT/US2015/044908 WO2016167825A1 (en) | 2015-04-15 | 2015-08-12 | Optical element testing methods and systems employing a broadband angle-selective filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR3035214A1 true FR3035214A1 (cg-RX-API-DMAC7.html) | 2016-10-21 |
Family
ID=57101221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR1652023A Pending FR3035214A1 (cg-RX-API-DMAC7.html) | 2015-04-15 | 2016-03-10 |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR3035214A1 (cg-RX-API-DMAC7.html) |
-
2016
- 2016-03-10 FR FR1652023A patent/FR3035214A1/fr active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PLFP | Fee payment |
Year of fee payment: 2 |
|
| PLSC | Search report ready |
Effective date: 20180406 |