FR3021744A1 - DEVICE AND METHOD FOR REMOVING ELEMENTS FROM A SURFACE - Google Patents

Abstract

Device for removing elements from a surface, comprising: - a housing (4) provided with a main cavity (9) having an opening (10) shaped to define a zone to be treated (11) of the surface; - a first circuit (5) configured to project at least one fluid (15, 16) on the area to be treated (11); - a second circuit (7) configured to recover a portion of at least one projected fluid containing elements (2) removed from the area to be treated (11); an additional cavity (19) having an opening (20) shaped to face an area of the surface (21) outside the area to be treated (11); and - a unit (8) connected to the additional cavity (19) and configured to create a vacuum within the additional cavity (19).

Description

FIELD OF THE INVENTION The invention relates to the removal of elements from a surface, and in particular elements invisible to the naked eye. STATE OF THE ART The removal of elements of a surface, also noted as contaminants, makes it possible to collect these elements for the purpose of analyzing them in order to measure the cleanliness or the residual pollution of a surface. The analysis can be an identification or a quantification of the elements contained on the surface. Currently, you can measure the cleanliness of a surface by observing it with a microscope, but the surface must be small enough to be installed under a microscope. You can also use a cloth soaked in a liquid and wipe a surface manually with the soaked cloth. Then, the tissue is immersed in an analysis liquid. But the wiping force differs depending on the operator. In addition, some contaminants remain trapped in the tissue and the test fluid may not contain all the removed contaminants. Air-blown probes can still be used and include a suction system to collect contaminants. But air blowing does not remove the majority of contaminants. In addition, contaminants can be dispersed by moving them to other areas of the surface.

For example, US Pat. No. 3,748,905 discloses a probe for taking samples on a surface by suction of air.

The probe comprises a head provided with a first tube comprising two feet located at one end of the tube and which come into contact with the surface to keep the end of the tube away from the surface. The head has a second tube, taken in hand by an operator to hold the probe in contact with the surface, and which is connected to a pump for sucking up the elements from the surface. But the probe does not prevent any contamination of the surface by moving the elements to neighboring areas of the surface. o US patent application US 2011/0126643 discloses a sample probe on a surface, comprising a blowing duct by which air is blown on a portion of the surface and a duct suction in which the air is sucked on the periphery of the portion of the surface. In addition, the probe has a skirt 15 located at the end of the probe to make the portion of the surface tight. But the seal is not sufficient, because the probe does not work effectively when the surface is inclined or positioned vertically. OBJECT OF THE INVENTION An object of the invention is to overcome the drawbacks mentioned above, and more particularly to provide a means for improving the maintenance of a device for removing elements on a surface, whatever the inclination of the surface.

Another object of the invention is to improve the removal of surface elements, regardless of the nature of the contaminants. According to one aspect of the invention, there is provided a device 30 for removing elements from a surface, comprising: a housing having a main cavity having an opening shaped to define an area to be treated of the surface; a first circuit connected to at least one input port opening into the main cavity and configured to project at least one fluid onto the area to be treated; and a second circuit connected to at least one outlet opening opening into the main cavity and configured to recover a portion of at least one projected fluid containing elements removed from the area to be treated.

The housing comprises an additional cavity having an opening shaped to be located opposite an area of the outer surface to the area to be treated, the device further comprising a unit connected to the additional cavity and configured to create a void within additional cavity. Thanks to the vacuum made in the additional cavity, the device can be held in abutment against the surface without intervention of an external operator. In addition, the device may be used to remove contaminants from an inclined surface, or even when the inlet of the main cavity is below the surface. The device may further include hydraulic distribution means connected to the first circuit for circulating liquid in the first circuit. Thus, by projecting a liquid, it is possible to detach contaminants that are not detachable by air blowing.

The first circuit may comprise a first portion for the circulation of a liquid connected to said at least one inlet orifice, and a second portion for the circulation of a gas connected to the first portion so as to project a mixture of gas and liquid on the area to be treated. This provides a better control of the amount of liquid sprayed onto the surface. The diffusion of contaminants in the first circuit is also prevented. The housing may include a seal surrounding the additional cavity.

The housing may also include an additional seal located between the main cavity and the additional cavity and surrounding the main cavity.

The housing may be made of a deformable material such that the respective openings of the main and additional cavities conform to a curvature of the surface. According to another aspect of the invention, there is provided a system for recovering elements of a surface, comprising a device for removing elements as defined above, and a recovery container connected to the second circuit of the device. device for removing elements. According to yet another aspect of the invention, there is provided a method of removing elements from a surface, comprising a housing placed against the surface, the housing having a main cavity provided with an opening defining an area to be treated from the surface. The housing has an additional cavity having an opening defining an area of the outer surface of the area to be treated, and the method comprises the steps of: creating a void within the additional cavity; projecting at least one fluid on the area to be treated; and recovering a portion of at least one projected fluid containing elements removed from the area to be treated.

At least one sprayed fluid may be inert with respect to the material of the surface. At least one projected fluid may also be inert with respect to the material of the housing and the material of the circuits. BRIEF DESCRIPTION OF THE DRAWINGS Other advantages and features will become more clearly apparent from the following description of particular embodiments and implementations of the invention given by way of nonlimiting example and represented in the accompanying drawings, in which: Figure 1 schematically illustrates an embodiment of an element removal device according to the invention, Figure 2 schematically illustrates another embodiment of an element removal device; and Figure 3 schematically illustrates an embodiment of a recovery container.

DETAILED DESCRIPTION FIG. 1 shows a device 1 for removing elements 2 from a surface 3 of an object. The object may be any and subsequently, surface 3 will be noted as being the outer surface of the object. The elements 2 may be inert, such as organic, inorganic or metallic elements, or may be living organisms, such as bacteria. These elements 2 are particularly invisible to the naked eye. For example the elements have a size between 0.05 mt and 50 iam. These elements 2 are, in particular, distributed randomly on the surface 3. They can be attached to the surface 3, more or less strongly, or simply deposited and retained on the surface 3 by weak links. The device 1 comprises a housing 4, a first circuit 5 in which circulates at least one fluid 15, 16, a second circuit 7 to recover elements 2, and a unit 8 configured to create a vacuum within a cavity. The casing 4 comprises a main cavity 9 having an opening 10 shaped to delimit an area to be treated 11 of the surface 3. In order to remove contaminants 2, the casing 4 of the device 1 is placed against the surface 3 in order to form a decontamination chamber corresponding to the main cavity 9 whose opening 10 is closed by the surface 3. Thus, the opening 15 of the housing 4 defines the area to be treated 11 containing the elements 2 to be removed. The first circuit 5 is connected to at least one inlet opening 12 opening into the main cavity 9. Thus, at least one fluid 15, 16 which flows in the first circuit 5 is projected onto the surface 3, when the housing 4 is affixed against the surface 3. The inlet port 12 is located on one end of the main cavity 9 opposite the end comprising the opening 10. For example, the inlet port 12 may be centrally located. of the main cavity 9. In general, the inlet orifice 12 is oriented so as to project one or more fluids 15, 16 over all or part of the zone to be treated 11 of the surface 3. Preferably, the inlet port 12 is oriented parallel to the opening 10 of the main cavity 9 so as to project at least one fluid 15, 16 perpendicular to the area to be treated 11, to promote the removal of elements 2. The fluids projected 15, 16 may be gases or liquids. In general, the first circuit 5 comprises a tubular conduit 13 connecting the inlet orifice 12 to at least one dispensing means 15a, 15b for circulating at least one fluid 15, 16. The device 1 may comprise a means hydraulic distributor 15a 3021744 7 connected to the first circuit 5 to circulate a liquid 15 in the first circuit 5. In addition, the device 1 may also comprise a pneumatic distribution means 15b connected to the first circuit 5 for circulating a gas 16 in the first circuit 5. The pneumatic distribution means 15b can circulate a gas 16 under pressure, for example compressed air. The hydraulic distribution means can circulate a liquid under pressure in the main cavity 9. According to a preferred embodiment, a mixture 6 of a gas 16 and a liquid 15 is projected onto the area to be treated 11. In this preferred embodiment, the first circuit 5 comprises a first portion 14 and a second portion 13. The first portion 14, in which a liquid 15 circulates, is connected to the tubular duct 13, upstream of the inlet orifice In other words, the first portion 14 is connected to the inlet orifice 12 and makes it possible to project the liquid 15 onto the zone to be treated 11. In addition, the first portion 14 is connected to the distribution means. hydraulic 15a to circulate the liquid 15 in the first portion 14. The second portion 13, in turn, for circulating a gas 16, for example compressed air, which is mixed with the liquid 15. Preferably, it is made first circulate the g 16, then the liquid 15. Thus, the gas 16 can drive the liquid 15 through the inlet port 12 by Venturi effect. The fact of projecting the liquid 15 and the gas 16 through the same inlet 12, simplifies the device 1. Moreover, it prevents a diffusion of the removed elements 2 in the first circuit 5. The drive of the liquid 15 by the gas 16 can be improved by giving conical shapes to the internal surfaces of the ducts of the portions 13, 14 of the first circuit 5, 25 as illustrated in FIG. 1. The gas 16 thus makes it possible to spray the liquid 15 on the zone to be treated 11, that is to say to project the liquid 15 into fine droplets. In addition, the projected liquid detaches the elements 2 from the surface 3 and traps them. Thus, the gas 16 projected into the main cavity 9 makes it possible to ventilate the liquid 15 outside the main cavity 9, and to expel the liquid 16 containing the elements 2 removed by the second circuit 7. The second portion 13 is also connected by means of pneumatic distribution 15b to circulate the gas 16 in the second portion 13. The projected liquid 15 makes it possible to improve the detachment of the elements 2 from the surface 3. In a variant, it is possible to project one or more 11. It is still possible to project one or more gases 5 on the zone 11 to be treated. According to yet another variant, a liquid can be sprayed on the zone to be treated 11 by the first circuit 5, and can be injected. a gas by another circuit connected to another inlet of the main cavity 9. In this other variant, the blown gas can be directed to the area to be treated 11, or be directed to another area of the cavity. In this alternative embodiment, the liquid sprayed can remove the surface elements 2, and the blown gas can ventilate the liquid and the removed elements outside the main cavity 9, through the second circuit 7. More particularly, liquids suitable for the type of contaminant to be removed may be used. In general, deionized water is used. For example, acidified deionized water may be used to remove minerals. The liquid may be a solvent, such as methanol or acetone, to remove organic elements. In particular, deionized or demineralized water can be used to remove living organisms. Depending on the type of liquid used, some parts of the device 1 will be made of a suitable material which is not denatured by the liquid 15. More particularly, the liquid 15 may be inert with respect to the material of the casing 4 and the material of the circuits 5, 7, i.e. it is passive to the material, in other words it does not react with the material so as to denature it. For example, the housing 4 and the circuits 5, 7 are made of quartz, or borosilicate glass, or soda-lime glass, when the liquid is deionized water. Housing 4 and circuits 5, 7 may be made of polytetrafluoroethylene or polyoxymethylene when acidified deionized water or deionized or deionized water is used as liquid. When the liquid is a solvent, stainless steel will be used. Moreover, in order not to denature the surface 3, the liquid may be inert with respect to the material of the surface 3. After the removal of elements 2 by the projected mixture 6, it is recovered via of the second circuit 7, an outlet mixture 18 comprising a part of the projected mixture 6 and elements 2 removed. The second circuit 7 comprises one or more ducts connected to at least one outlet orifice 17 opening into the main cavity 9. The second circuit 7 is configured to recover the mixture at the outlet 18 and thus the elements 2 o removed from the zone to be removed. 11. The housing 4 further comprises at least one additional cavity 19 having an opening 20 shaped to be located facing an area 21 of the surface 3 outside the area to be treated 11. At least one additional cavity 19 is connected, by a conduit 22, to the unit 8. In a variant, the housing 4 comprises several additional cavities connected to the unit 8. Preferably, the housing comprises an additional cavity 19 to simplify the embodiment of the device 1. The Unit 8 makes it possible to create a vacuum within the additional cavity 19 to keep the device 1 bearing against the surface 3, without the aid of an external operator. Indeed, the unit 8 creates a depression in the additional cavity 19, which gives a suction effect to mechanically maintain the device 1 in contact with the surface 3. In this case, we can remove elements 2 even when the surface 3 is inclined, even when the device 1 is situated upside down below the surface 3. In this case, the device 1 remains held against the surface 3 whatever the angle of inclination of the surface 3 with respect to the horizontal. In order to guarantee the retention of the device 1 against the surface 3, the casing 4 may comprise a seal 23, for example made of elastomer, located at the periphery of the casing 4, that is to say around the additional cavities 19. In general, the seal 23 at least surrounds an additional cavity 19. Advantageously, the housing 4 may comprise an additional seal 24 located between the main cavity 9 and at least one Additional cavity 19. In particular, the additional seal 24 surrounds the main cavity 9. When the casing 4 has an additional seal 24, the opening 10 of the main cavity 9 extends to the seal In other words, the zone to be treated 11 extends to the additional seal 24, and the latter also delimits the zone to be treated 11. The mixture 6 of the gas 16 and the liquid 15 can then be projected on the surface 3, o in the area to be treated 11 delimited by the additional seal 24, to remove elements of this area to be treated 11. The additional seal 24 allows to isolate the additional cavity 19 from the main cavity 9 and improves the retention of the device 1 against the surface 3. This prevents the dispersion of the elements 2 outside the zone to be treated 11 and prevents the contamination of the zones of surface 3 which are outside the area to be treated 11. The insulation of the additional cavity 19 also prevents the mixing of fluids 6 to enter the additional cavities, which could reduce the maintenance of in addition, the seals 23, 24 can be separated from the casing 4, being made of a material distinct from that of the casing 4, preferably based on lastomère. Such joints are suitable for a housing 4 made of a non-deformable material. In a variant, and in the case where the casing 4 is made of a deformable and flexible material, the seals 23, 24 form an integral part of the casing 4.

The surface 3 may be flat or curved. The casing 4 can thus be made of a deformable material, for example plastic, so that the respective openings 10, 20 of the main and additional cavities 9 and 9, follow a curvature of the surface 3.

In Figure 2, there is shown a bottom view of the device 1 according to another embodiment. In this other embodiment, the main cavity 9 has a plurality of inlet orifices 12a located around the center of the cavity 9, preferably regularly located equidistant from the center 5 of the cavity 9. The inlet orifices 12a are connected by respective ducts to the tubular duct 13. The main cavity 9 may further comprise a plurality of outlet orifices 17a located at the periphery of the main cavity 9, preferably located at the edge of the opening 10 of the cavity 9. The outlet orifices 17a are also connected by respective conduits 10 to the conduit of the recovery circuit 7. Several outlet orifices 17a allow better recovery of the mixture at the outlet 18. Moreover, the housing 4 may comprise a single additional cavity 19 having a circular shape. In a variant, the casing 4 comprises several additional cavities situated outside the main cavity 9, for example at the edge thereof. Seals 23, 24 which have a circular shape are also shown. In Figure 3, there is shown a container 30 for recovery of the elements 2 removed by the device 1 withdrawal. The container 30 is connected to the conduit of the second circuit 7, via a connecting conduit 31. The container 30 separates the output mixture 18 into two parts 32, 33. A first part 32 comprises the part of the liquid The second portion 33 includes the portion of the recovered gas 16. The container 30 may further include an exhaust conduit 34 for allowing the gas of the second portion 33 to be evacuated so as to depressurize the container 30 and the main cavity 9. The exhaust duct 34 may comprise a valve The container 30 advantageously includes a filter 36 located in the exhaust duct 34 to retain the removed members 2 in the container 30. The container 30 may also include an outlet circuit 37 for discharging the liquid 32 from the container. container 30 and allow to transfer the elements 2 in solution to an analysis device. In addition, the output circuit 37 may include a valve 38 for opening or closing the exhaust duct 37 as required. The liquid of the first part 32 is then analyzed to determine the nature and / or quantity of the elements recovered.

The assembly comprising the device 1 and the container 30 forms a system for recovering elements 2 from a surface 3. The method of removing elements 2 from surface 3 can be implemented by o the device 1 which comes to be described. This method consists in placing the housing 4 against the surface 3, then creating a vacuum within at least one additional cavity 19. Then, at least one fluid 15, 16 is sprayed onto the zone to be treated 11. During the projection of the fluid 15, 16 the vacuum is maintained to ensure the mechanical retention of the housing 4 against the surface 3 and the sealing 15 of the main cavity 9. The invention which has just been described makes it possible to analyze elements deposited on a surface and to measure the cleanliness of the surfaces. The invention is particularly suited to those fields of industry which need to control their environment, and in particular to control the nature and amount of surface contaminants, such as microelectronics, especially for clean rooms, space industry with the integration of satellites, optics for the manufacture of mirrors or lasers, or that of agribusiness or the medical field. 25

Claims (10)

REVENDICATIONS1. Device for removing elements from a surface, comprising: a housing (4) provided with a main cavity (9) having an opening (10) shaped to define an area to be treated (11) of the surface; a first circuit (5) connected to at least one input port (12) opening into the main cavity (9) and configured to project at least one fluid (15, 16) onto the area to be treated (11); and a second circuit (7) connected to at least one outlet port (17) opening into the main cavity (9) and configured to recover a portion of at least one projected fluid (18) containing removed elements (2) the area to be treated; characterized in that the housing (4) comprises an additional cavity (19) having an opening (20) shaped to be located opposite an area of the surface (21) outside the area to be treated (11), the device further comprising a unit (8) connected to the additional cavity (19) and configured to create a vacuum within the additional cavity (19). 2. Device according to claim 1, comprising a hydraulic distribution means (15a) connected to the first circuit (5) for circulating a liquid (15) in the first circuit (5). 3. Device according to claim 1, wherein the first circuit (5) comprises a first portion (14) for the circulation of a liquid (15) connected to said at least one inlet (12), and a second portion (13) for the circulation of a gas (16) connected to the first portion (14) so as to project a mixture of the gas (16) and the liquid (15) on the area to be treated (11). 30 4. Device according to one of claims 1 to 3, wherein the housing (4) comprises a seal (23) surrounding the additional cavity (19). 3021744 14 5. Device according to claim 4, wherein the housing (4) comprises an additional seal (24) located between the main cavity (9) and the additional cavity (19) and surrounding the main cavity (9). 5 6. Device according to one of claims 1 to 5, wherein the housing (4) is made of a deformable material so that the respective openings (10, 20) of the main and additional cavities (9, 19) follow a curvature from the surface. 7. A surface element recovery system, comprising an element removal device according to one of claims 1 to 6, and a recovery vessel (30) connected to the second circuit (7) of the withdrawal device. elements. 8. A method of removing elements from a surface, comprising a housing (4) placed against the surface, the housing (4) having a main cavity (9) provided with an opening (10) delimiting an area to be treated ( 11) of the surface, characterized in that the housing (4) comprises an additional cavity (19) having an opening (20) delimiting an area of the surface (21) outside the area to be treated (11), the method comprising the following steps: creating a vacuum within the additional cavity (19); projecting at least one fluid (15, 16) on the area to be treated (11); and recovering a portion of at least one projected fluid (18) containing elements (2) removed from the area to be treated (11). 9. The method of claim 8, wherein at least one sprayed fluid (15, 16) is inert with respect to the material of the surface. 3021744 15 10. The method of claim 8 or 9, wherein at least one sprayed fluid (15, 16) is inert vis-a-vis the material of the housing (4) and the material of the circuits (5, 7). 5