FR3019471B1 - DEVICE FOR CONVERTING A MULTI-SOURCE PLASMA GASEOUS EFFLUENT - Google Patents

DEVICE FOR CONVERTING A MULTI-SOURCE PLASMA GASEOUS EFFLUENT

Info

Publication number
FR3019471B1
FR3019471B1 FR1400824A FR1400824A FR3019471B1 FR 3019471 B1 FR3019471 B1 FR 3019471B1 FR 1400824 A FR1400824 A FR 1400824A FR 1400824 A FR1400824 A FR 1400824A FR 3019471 B1 FR3019471 B1 FR 3019471B1
Authority
FR
France
Prior art keywords
converting
gaseous effluent
source plasma
plasma gaseous
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1400824A
Other languages
French (fr)
Other versions
FR3019471A1 (en
Inventor
Guillaume Regnard
Bernard Darges
Pascal Ponard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thales SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales SA filed Critical Thales SA
Priority to FR1400824A priority Critical patent/FR3019471B1/en
Priority to PCT/EP2015/056097 priority patent/WO2015150142A1/en
Publication of FR3019471A1 publication Critical patent/FR3019471A1/en
Application granted granted Critical
Publication of FR3019471B1 publication Critical patent/FR3019471B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B01D53/323—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00 by electrostatic effects or by high-voltage electric fields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/79—Injecting reactants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2045—Hydrochloric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B01D2257/2066—Fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/30—Sulfur compounds
    • B01D2257/302—Sulfur oxides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/30—Sulfur compounds
    • B01D2257/304—Hydrogen sulfide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/40—Nitrogen compounds
    • B01D2257/404—Nitrogen oxides other than dinitrogen oxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/40—Nitrogen compounds
    • B01D2257/406—Ammonia
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/50—Carbon oxides
    • B01D2257/504—Carbon dioxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
    • B01D2257/708—Volatile organic compounds V.O.C.'s
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
FR1400824A 2014-04-04 2014-04-04 DEVICE FOR CONVERTING A MULTI-SOURCE PLASMA GASEOUS EFFLUENT Expired - Fee Related FR3019471B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1400824A FR3019471B1 (en) 2014-04-04 2014-04-04 DEVICE FOR CONVERTING A MULTI-SOURCE PLASMA GASEOUS EFFLUENT
PCT/EP2015/056097 WO2015150142A1 (en) 2014-04-04 2015-03-23 Device for converting a gas effluent via multi-source plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1400824A FR3019471B1 (en) 2014-04-04 2014-04-04 DEVICE FOR CONVERTING A MULTI-SOURCE PLASMA GASEOUS EFFLUENT

Publications (2)

Publication Number Publication Date
FR3019471A1 FR3019471A1 (en) 2015-10-09
FR3019471B1 true FR3019471B1 (en) 2016-05-06

Family

ID=51167972

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1400824A Expired - Fee Related FR3019471B1 (en) 2014-04-04 2014-04-04 DEVICE FOR CONVERTING A MULTI-SOURCE PLASMA GASEOUS EFFLUENT

Country Status (2)

Country Link
FR (1) FR3019471B1 (en)
WO (1) WO2015150142A1 (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19927540A1 (en) * 1999-06-16 2000-12-21 Ct Therm Elek Sche Anlagen Gmb Emission control system
US7220396B2 (en) * 2001-07-11 2007-05-22 Battelle Memorial Institute Processes for treating halogen-containing gases
FR2863103B1 (en) * 2003-12-01 2006-07-14 Cit Alcatel INTEGRATED PLASMA GAS TREATMENT SYSTEM IN A VACUUM PUMP
FR2864913B1 (en) * 2004-01-08 2006-05-05 Air Liquide PROCESS FOR PRE-CONCENTRATION AND DESTRUCTION OF EFFLUENTS USING PLASMA
JP2007196160A (en) * 2006-01-27 2007-08-09 Taiyo Nippon Sanso Corp Waste gas treatment apparatus
WO2008093442A1 (en) * 2007-01-30 2008-08-07 Kanken Techno Co., Ltd. Gas processing apparatus
KR100987978B1 (en) * 2008-10-27 2010-10-18 (주)트리플코어스코리아 Appratus and method for gas scrubbing

Also Published As

Publication number Publication date
FR3019471A1 (en) 2015-10-09
WO2015150142A1 (en) 2015-10-08

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Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLFP Fee payment

Year of fee payment: 3

ST Notification of lapse

Effective date: 20171229