FR3000050B1 - Dispositif micro-electromecanique possedant au moins deux elements deformables de dimensions differentes - Google Patents

Dispositif micro-electromecanique possedant au moins deux elements deformables de dimensions differentes

Info

Publication number
FR3000050B1
FR3000050B1 FR1262511A FR1262511A FR3000050B1 FR 3000050 B1 FR3000050 B1 FR 3000050B1 FR 1262511 A FR1262511 A FR 1262511A FR 1262511 A FR1262511 A FR 1262511A FR 3000050 B1 FR3000050 B1 FR 3000050B1
Authority
FR
France
Prior art keywords
different dimensions
deformable elements
microelectromechanical device
microelectromechanical
deformable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1262511A
Other languages
English (en)
Other versions
FR3000050A1 (fr
Inventor
Francois-Xavier Boillot
Remi Laoubi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tronics Microsystems SA
Original Assignee
Tronics Microsystems SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tronics Microsystems SA filed Critical Tronics Microsystems SA
Priority to FR1262511A priority Critical patent/FR3000050B1/fr
Priority to PCT/FR2013/053094 priority patent/WO2014096655A1/fr
Publication of FR3000050A1 publication Critical patent/FR3000050A1/fr
Application granted granted Critical
Publication of FR3000050B1 publication Critical patent/FR3000050B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0154—Torsion bars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0163—Spring holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0307—Anchors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
FR1262511A 2012-12-20 2012-12-20 Dispositif micro-electromecanique possedant au moins deux elements deformables de dimensions differentes Expired - Fee Related FR3000050B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1262511A FR3000050B1 (fr) 2012-12-20 2012-12-20 Dispositif micro-electromecanique possedant au moins deux elements deformables de dimensions differentes
PCT/FR2013/053094 WO2014096655A1 (fr) 2012-12-20 2013-12-16 Dispositif micro-electromecanique possedant au moins deux elements deformables de dimensions differentes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1262511A FR3000050B1 (fr) 2012-12-20 2012-12-20 Dispositif micro-electromecanique possedant au moins deux elements deformables de dimensions differentes

Publications (2)

Publication Number Publication Date
FR3000050A1 FR3000050A1 (fr) 2014-06-27
FR3000050B1 true FR3000050B1 (fr) 2016-03-04

Family

ID=48289239

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1262511A Expired - Fee Related FR3000050B1 (fr) 2012-12-20 2012-12-20 Dispositif micro-electromecanique possedant au moins deux elements deformables de dimensions differentes

Country Status (2)

Country Link
FR (1) FR3000050B1 (fr)
WO (1) WO2014096655A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6044607B2 (ja) 2014-08-28 2016-12-14 横河電機株式会社 振動式センサ装置
FR3058409A1 (fr) * 2016-11-10 2018-05-11 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif microelectromecanique et/ou nanoelectromecanique articule a deplacement hors-plan
FR3086801B1 (fr) 2018-10-02 2021-01-01 Commissariat Energie Atomique Capteur microelectronique a detection hors-plan offrant une sensibilite transverse maitrisee

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2700065B1 (fr) 1992-12-28 1995-02-10 Commissariat Energie Atomique Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant.
US5962786A (en) * 1995-09-26 1999-10-05 Onera (Office National D'eudes Et De Recheres Aerospatiales) Monolithic accelerometric transducer
FR2941533B1 (fr) * 2009-01-23 2011-03-11 Commissariat Energie Atomique Capteur inertiel ou resonnant en technologie de surface, a detection hors plan par jauge de contrainte.
FR2951826B1 (fr) 2009-10-23 2012-06-15 Commissariat Energie Atomique Capteur a detection piezoresistive dans le plan
FR2954505B1 (fr) 2009-12-22 2012-08-03 Commissariat Energie Atomique Structure micromecanique comportant une partie mobile presentant des butees pour des deplacements hors plan de la structure et son procede de realisation
FR2972263B1 (fr) 2011-03-03 2013-09-27 Tronics Microsystems Capteur inertiel et procede de fabrication correspondant

Also Published As

Publication number Publication date
WO2014096655A1 (fr) 2014-06-26
FR3000050A1 (fr) 2014-06-27

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