FR2998485B1 - Dispositif pour la synthese de nanoparticules de type cœur-coquille par pyrolyse laser et procede associe. - Google Patents

Dispositif pour la synthese de nanoparticules de type cœur-coquille par pyrolyse laser et procede associe.

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Publication number
FR2998485B1
FR2998485B1 FR1261243A FR1261243A FR2998485B1 FR 2998485 B1 FR2998485 B1 FR 2998485B1 FR 1261243 A FR1261243 A FR 1261243A FR 1261243 A FR1261243 A FR 1261243A FR 2998485 B1 FR2998485 B1 FR 2998485B1
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France
Prior art keywords
core
synthesis
shell type
shell
chamber
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1261243A
Other languages
English (en)
Other versions
FR2998485A1 (fr
Inventor
Yann Leconte
Olivier Sublemontier
Nathalie Herlin-Boime
Cecile Reynaud
Dominique Porterat
Axelle Quinsac
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1261243A priority Critical patent/FR2998485B1/fr
Priority to PCT/EP2013/074537 priority patent/WO2014079997A1/fr
Priority to US14/646,781 priority patent/US11293100B2/en
Priority to EP13802270.2A priority patent/EP2922626B1/fr
Publication of FR2998485A1 publication Critical patent/FR2998485A1/fr
Application granted granted Critical
Publication of FR2998485B1 publication Critical patent/FR2998485B1/fr
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/483—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using coherent light, UV to IR, e.g. lasers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J13/00—Colloid chemistry, e.g. the production of colloidal materials or their solutions, not otherwise provided for; Making microcapsules or microballoons
    • B01J13/02—Making microcapsules or microballoons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/121—Coherent waves, e.g. laser beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05—Metallic powder characterised by the size or surface area of the particles
    • B22F1/054—Nanosized particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/16—Making metallic powder or suspensions thereof using chemical processes
    • B22F9/30—Making metallic powder or suspensions thereof using chemical processes with decomposition of metal compounds, e.g. by pyrolysis
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/05—Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0254—Physical treatment to alter the texture of the surface, e.g. scratching or polishing
    • C23C16/0263—Irradiation with laser or particle beam
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4417—Methods specially adapted for coating powder
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00002—Chemical plants
    • B01J2219/00027—Process aspects
    • B01J2219/00033—Continuous processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/18—Non-metallic particles coated with metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/134—Electrodes based on metals, Si or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/362—Composites
    • H01M4/366—Composites as layered products
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/38—Selection of substances as active materials, active masses, active liquids of elements or alloys
    • H01M4/386—Silicon or alloys based on silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/62—Selection of inactive substances as ingredients for active masses, e.g. binders, fillers
    • H01M4/624—Electric conductive fillers
    • H01M4/625—Carbon or graphite
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Toxicology (AREA)
  • Dispersion Chemistry (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Nanotechnology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Silicon Compounds (AREA)

Abstract

L'invention concerne un dispositif de synthèse de nanoparticules de type cœur-coquille par pyrolyse laser, caractérisé en ce qu'il comprend : - un réacteur (100) comportant : • une première chambre (1) pour la synthèse du cœur, laquelle est munie d'une entrée (11) pour un précurseur du cœur ; • une deuxième chambre (2) pour la synthèse de la coquille, laquelle est munie d'une entrée (21) pour un précurseur de la coquille ; et • au moins un canal de communication (3) entre les deux chambres (1, 2) pour transmettre le cœur des nanoparticules destinées à être formées dans la première chambre (1) en direction de la deuxième chambre ; - un dispositif optique (200) pour éclairer chacune des deux chambres (1, 2), ce dispositif comportant au moins un laser (8) apte à émettre un faisceau laser (10) destiné à interagir avec lesdits précurseurs afin de former le cœur et la coquille.
FR1261243A 2012-11-26 2012-11-26 Dispositif pour la synthese de nanoparticules de type cœur-coquille par pyrolyse laser et procede associe. Active FR2998485B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR1261243A FR2998485B1 (fr) 2012-11-26 2012-11-26 Dispositif pour la synthese de nanoparticules de type cœur-coquille par pyrolyse laser et procede associe.
PCT/EP2013/074537 WO2014079997A1 (fr) 2012-11-26 2013-11-25 Dispositif pour la synthese de nanoparticules de type cœur-coquille par pyrolyse laser et procede associe.
US14/646,781 US11293100B2 (en) 2012-11-26 2013-11-25 Device for synthesising core-shell nanoparticles by laser pyrolysis and associated method
EP13802270.2A EP2922626B1 (fr) 2012-11-26 2013-11-25 Dispositif pour la synthese de nanoparticules de type coeur-coquille par pyrolyse laser et procede associe.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1261243A FR2998485B1 (fr) 2012-11-26 2012-11-26 Dispositif pour la synthese de nanoparticules de type cœur-coquille par pyrolyse laser et procede associe.

Publications (2)

Publication Number Publication Date
FR2998485A1 FR2998485A1 (fr) 2014-05-30
FR2998485B1 true FR2998485B1 (fr) 2015-01-02

Family

ID=47714304

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1261243A Active FR2998485B1 (fr) 2012-11-26 2012-11-26 Dispositif pour la synthese de nanoparticules de type cœur-coquille par pyrolyse laser et procede associe.

Country Status (4)

Country Link
US (1) US11293100B2 (fr)
EP (1) EP2922626B1 (fr)
FR (1) FR2998485B1 (fr)
WO (1) WO2014079997A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3116214A1 (fr) 2020-11-18 2022-05-20 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif de synthèse colinéaire de nanoparticules par pyrolyse laser, système et procédé associés

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3013991B1 (fr) * 2013-11-29 2019-04-26 Nanomakers Particules submicroniques comprenant de l'aluminium
FR3059248B1 (fr) * 2016-11-30 2021-05-21 Commissariat Energie Atomique Dispositif pour la synthese de nanoparticules de type cœur-coquille par pyrolyse laser et procede associe.
FR3061664A1 (fr) * 2017-01-09 2018-07-13 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de preparation de nanoparticules, procede de fabrication d'un materiau les comprenant, materiau, son utilisation et dispositif le comprenant
US11571675B2 (en) 2017-05-26 2023-02-07 King Abdullah University Of Science And Technology Method and apparatus for fabricating high performance optoelectronic devices
CN107706092B (zh) * 2017-10-13 2021-01-26 京东方科技集团股份有限公司 一种准分子激光退火设备
FR3151321A1 (fr) * 2023-07-19 2025-01-24 Renault S.A.S Procédé de formation de silicium à partir de silice et silicium passivé

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4642227A (en) * 1982-08-20 1987-02-10 California Institute Of Technology Reactor for producing large particles of materials from gases
JPS61225819A (ja) * 1985-03-29 1986-10-07 Fuji Electric Co Ltd レ−ザｃｖｄ装置
US5958348A (en) * 1997-02-28 1999-09-28 Nanogram Corporation Efficient production of particles by chemical reaction
US6974367B1 (en) * 1999-09-02 2005-12-13 Micron Technology, Inc. Chemical mechanical polishing process
US7527824B2 (en) * 2004-06-25 2009-05-05 Becker Michael F Methods for producing coated nanoparticles from microparticles
US7404983B1 (en) * 2004-08-04 2008-07-29 The United States Of America, As Represented By The Secretary Of The Navy Method and apparatus for open-air coating by laser-induced chemical vapor deposition
FR2877591B1 (fr) 2004-11-09 2007-06-08 Commissariat Energie Atomique Systeme et procede de production de poudres nanometriques ou sub-micrometriques en flux continu sous l'action d'une pyrolyse laser
FR2894493B1 (fr) 2005-12-08 2008-01-18 Commissariat Energie Atomique Systeme et procede de production de poudres nanometriques ou sub-micrometriques en flux continu sous l'action d'une pyrolyse laser
US8247764B2 (en) * 2008-06-13 2012-08-21 Sociedad Europea de Analisis Diferencial de Movilidad Method and apparatus to sharply focus aerosol particles at high flow rate and over a wide range of sizes

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3116214A1 (fr) 2020-11-18 2022-05-20 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif de synthèse colinéaire de nanoparticules par pyrolyse laser, système et procédé associés
WO2022106517A1 (fr) 2020-11-18 2022-05-27 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif de synthèse colinéaire de nanoparticules par pyrolyse laser, système et procédé associés

Also Published As

Publication number Publication date
EP2922626A1 (fr) 2015-09-30
US20150299861A1 (en) 2015-10-22
WO2014079997A1 (fr) 2014-05-30
EP2922626B1 (fr) 2019-09-25
US11293100B2 (en) 2022-04-05
FR2998485A1 (fr) 2014-05-30

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