FR2998045B1 - DEVICE FOR THE THERMAL TREATMENT OF A MATERIAL AND ENCLOSURE COMPRISING SUCH A DEVICE - Google Patents

DEVICE FOR THE THERMAL TREATMENT OF A MATERIAL AND ENCLOSURE COMPRISING SUCH A DEVICE Download PDF

Info

Publication number
FR2998045B1
FR2998045B1 FR1260759A FR1260759A FR2998045B1 FR 2998045 B1 FR2998045 B1 FR 2998045B1 FR 1260759 A FR1260759 A FR 1260759A FR 1260759 A FR1260759 A FR 1260759A FR 2998045 B1 FR2998045 B1 FR 2998045B1
Authority
FR
France
Prior art keywords
enclosure
thermal treatment
thermal
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1260759A
Other languages
French (fr)
Other versions
FR2998045A1 (en
Inventor
Gregory Savidand
Daniel Lincot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electricite de France SA
Centre National de la Recherche Scientifique CNRS
Original Assignee
Electricite de France SA
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electricite de France SA, Centre National de la Recherche Scientifique CNRS filed Critical Electricite de France SA
Priority to FR1260759A priority Critical patent/FR2998045B1/en
Publication of FR2998045A1 publication Critical patent/FR2998045A1/en
Application granted granted Critical
Publication of FR2998045B1 publication Critical patent/FR2998045B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated
    • C30B23/066—Heating of the material to be evaporated
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/46—Sulfur-, selenium- or tellurium-containing compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Physical Vapour Deposition (AREA)
FR1260759A 2012-11-12 2012-11-12 DEVICE FOR THE THERMAL TREATMENT OF A MATERIAL AND ENCLOSURE COMPRISING SUCH A DEVICE Active FR2998045B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1260759A FR2998045B1 (en) 2012-11-12 2012-11-12 DEVICE FOR THE THERMAL TREATMENT OF A MATERIAL AND ENCLOSURE COMPRISING SUCH A DEVICE

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1260759 2012-11-12
FR1260759A FR2998045B1 (en) 2012-11-12 2012-11-12 DEVICE FOR THE THERMAL TREATMENT OF A MATERIAL AND ENCLOSURE COMPRISING SUCH A DEVICE

Publications (2)

Publication Number Publication Date
FR2998045A1 FR2998045A1 (en) 2014-05-16
FR2998045B1 true FR2998045B1 (en) 2018-08-24

Family

ID=48170552

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1260759A Active FR2998045B1 (en) 2012-11-12 2012-11-12 DEVICE FOR THE THERMAL TREATMENT OF A MATERIAL AND ENCLOSURE COMPRISING SUCH A DEVICE

Country Status (1)

Country Link
FR (1) FR2998045B1 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5080870A (en) * 1988-09-08 1992-01-14 Board Of Regents, The University Of Texas System Sublimating and cracking apparatus
US6030458A (en) * 1997-02-14 2000-02-29 Chorus Corporation Phosphorus effusion source
JP4673190B2 (en) * 2005-11-01 2011-04-20 長州産業株式会社 Molecular beam source for thin film deposition and its molecular dose control method

Also Published As

Publication number Publication date
FR2998045A1 (en) 2014-05-16

Similar Documents

Publication Publication Date Title
FR2992976B1 (en) EVAPORATION DEVICE FOR VACUUM DEPOSITION APPARATUS AND VACUUM DEPOSITION APPARATUS COMPRISING SUCH EVAPORATION DEVICE
FR2982697B3 (en) CURVED DISPLAY DEVICE
FR2984707B1 (en) REMOVABLE DEVICE FOR HEATING AND EMULSIONING LIQUID AND MACHINE EQUIPPED WITH SUCH A DEVICE
FR3012228B1 (en) MOBILE APPARATUS FOR EQUIPPING AND PROTECTING A WATCH AND WATCH EQUIPPED WITH SUCH A MOBILE DEVICE
FR3008286B1 (en) ACCESSORY FOR BLOWING HAIRDRESSING APPARATUS AND APPARATUS EQUIPPED WITH SUCH ACCESSORY
FR3008809B1 (en) CUSTOM ACCESSORY DEVICE FOR AN ELECTRONIC AND / OR COMPUTER APPARATUS, AND APPARATUS EQUIPPED WITH SUCH AN ACCESSORY DEVICE
FR2982076B3 (en) DISPLAY APPARATUS AND TELEVISION
FR3013472B1 (en) COVERING ACCESSORY DEVICE FOR AN ELECTRONIC AND / OR COMPUTER PORTABLE APPARATUS, AND APPARATUS EQUIPPED WITH SUCH AN ACCESSORY DEVICE
FR3000781B3 (en) SUPPORT FRAME AND DISPLAY DEVICE COMPRISING THE SUSDIT
FR3008168B1 (en) ASSIGNED LIQUID SUPPLY DEVICE FOR AN INTEGRATED AIR TREATMENT DEVICE IN EQUIPMENT
FR3026546B3 (en) PORTABLE CONTAINMENT DEVICE FOR THE HANDLING OF BIOLOGICAL AND / OR CHEMICAL SUBSTANCES AND REMOVABLE CONTAINMENT ENCLOSURE FOR SUCH A DEVICE
FR2987486B1 (en) METHOD AND DEVICE FOR CONTROLLING THE SEALING OF A CONFINEMENT ENCLOSURE
FR2971877B1 (en) DEVICE FOR PREVENTING THE FORGOTTEN OF A PORTABLE DEVICE
FR3017699B1 (en) THERMAL ENERGY STORAGE AND RESTITUTION DEVICE
FR2996256B1 (en) SUPPLY AND PURGE DEVICE FOR INJECTOR.
FR3001742B1 (en) HYDROLIAN CHASSIS COMPRISING A LESTAGE ASSEMBLY AND LESTAGE ASSEMBLY FOR SUCH A CHASSIS
FR2998045B1 (en) DEVICE FOR THE THERMAL TREATMENT OF A MATERIAL AND ENCLOSURE COMPRISING SUCH A DEVICE
FR2994206B1 (en) MOTORIZED DRIVE DEVICE OF A MOBILE STRUCTURE AND MOBILE STRUCTURE COMPRISING SUCH A DEVICE
FR2986412B1 (en) MAINTENANCE ARTICLE AND CLEANING DEVICE COMPRISING SUCH A MAINTENANCE ARTICLE.
FR3007137B1 (en) DEVICE FOR SAMPLING SOLID FROM CLOSED ENCLOSURE AND METHOD FOR USING SUCH A DEVICE.
FR2987007B1 (en) HOST DEVICE FOR PORTABLE COMMUNICATOR
FR3004524B1 (en) CONTAINER OBJECT SUPPORT COMPRISING ISO CORNERS
FR3010092B1 (en) METHOD AND DEVICE FOR TREATING THE FREE SURFACE OF A MATERIAL
FR3025033B1 (en) SCREEN AND DISPLAY DEVICE IN RETROPROJECTION
FR3011396B1 (en) ALERT DEVICE FOR CABIN FLOW ENCLOSURE

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 4

PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 6

PLFP Fee payment

Year of fee payment: 7

PLFP Fee payment

Year of fee payment: 8

PLFP Fee payment

Year of fee payment: 9

PLFP Fee payment

Year of fee payment: 10

PLFP Fee payment

Year of fee payment: 11

PLFP Fee payment

Year of fee payment: 12