FR2993101A1 - Procede d'assemblage et d'encapsulation de microbatteries au lithium et microbatteries ainsi obtenue - Google Patents
Procede d'assemblage et d'encapsulation de microbatteries au lithium et microbatteries ainsi obtenue Download PDFInfo
- Publication number
- FR2993101A1 FR2993101A1 FR1256530A FR1256530A FR2993101A1 FR 2993101 A1 FR2993101 A1 FR 2993101A1 FR 1256530 A FR1256530 A FR 1256530A FR 1256530 A FR1256530 A FR 1256530A FR 2993101 A1 FR2993101 A1 FR 2993101A1
- Authority
- FR
- France
- Prior art keywords
- microbatteries
- microbattery
- current collectors
- assembling
- encapsulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/04—Construction or manufacture in general
- H01M10/0472—Vertically superposed cells with vertically disposed plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/04—Construction or manufacture in general
- H01M10/0436—Small-sized flat cells or batteries for portable equipment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/052—Li-accumulators
- H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
- H01M50/10—Primary casings; Jackets or wrappings
- H01M50/116—Primary casings; Jackets or wrappings characterised by the material
- H01M50/117—Inorganic material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
- H01M50/10—Primary casings; Jackets or wrappings
- H01M50/116—Primary casings; Jackets or wrappings characterised by the material
- H01M50/117—Inorganic material
- H01M50/119—Metals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
- H01M50/10—Primary casings; Jackets or wrappings
- H01M50/116—Primary casings; Jackets or wrappings characterised by the material
- H01M50/121—Organic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
- H01M50/10—Primary casings; Jackets or wrappings
- H01M50/116—Primary casings; Jackets or wrappings characterised by the material
- H01M50/124—Primary casings; Jackets or wrappings characterised by the material having a layered structure
- H01M50/126—Primary casings; Jackets or wrappings characterised by the material having a layered structure comprising three or more layers
- H01M50/128—Primary casings; Jackets or wrappings characterised by the material having a layered structure comprising three or more layers with two or more layers of only inorganic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
- H01M50/10—Primary casings; Jackets or wrappings
- H01M50/131—Primary casings; Jackets or wrappings characterised by physical properties, e.g. gas permeability, size or heat resistance
- H01M50/133—Thickness
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/284—Applying non-metallic protective coatings for encapsulating mounted components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
- H05K3/303—Assembling printed circuits with electric components, e.g. with resistors with surface mounted components
- H05K3/305—Affixing by adhesive
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W42/00—Arrangements for protection of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/058—Construction or manufacture
- H01M10/0585—Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
- H01M50/10—Primary casings; Jackets or wrappings
- H01M50/116—Primary casings; Jackets or wrappings characterised by the material
- H01M50/124—Primary casings; Jackets or wrappings characterised by the material having a layered structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M6/00—Primary cells; Manufacture thereof
- H01M6/40—Printed batteries, e.g. thin film batteries
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
- H05K2203/1305—Moulding and encapsulation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
- H10W70/65—Shapes or dispositions of interconnections
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/941—Dispositions of bond pads
- H10W72/9413—Dispositions of bond pads on encapsulations
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49108—Electric battery cell making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49108—Electric battery cell making
- Y10T29/4911—Electric battery cell making including sealing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49108—Electric battery cell making
- Y10T29/49114—Electric battery cell making including adhesively bonding
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
- Y10T29/49146—Assembling to base an electrical component, e.g., capacitor, etc. with encapsulating, e.g., potting, etc.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Secondary Cells (AREA)
- Primary Cells (AREA)
Abstract
Ce procédé d'encapsulation d'une microbatterie au lithium, contenant un support, des électrodes positive et négative, un électrolyte et des collecteurs de courant positif et négatif (12a, 12b), comprend les étapes suivantes : - former au moins une couche d'isolation électrique et/ou d'étanchéité (14, 15) sur au moins la totalité des flancs latéraux et de la face comprenant les collecteurs de courant de la microbatterie ; - rendre accessible les collecteurs de courant de la microbatterie ; - former une couche métallique (16a, 16b) s'étendant depuis les collecteurs de courant (12a, 12b) jusqu'aux flancs latéraux de la microbatterie.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1256530A FR2993101B1 (fr) | 2012-07-06 | 2012-07-06 | Procede d'assemblage et d'encapsulation de microbatteries au lithium et microbatteries ainsi obtenue |
| EP13737346.0A EP2870654B1 (fr) | 2012-07-06 | 2013-06-20 | Procédé d'assemblage et d'encapsulation de microbatteries au lithium et microbatteries ainsi obtenues |
| US14/403,065 US10290893B2 (en) | 2012-07-06 | 2013-06-20 | Method for assembling and encapsulating lithium microbatteries and microbatteries produced thereby |
| PCT/FR2013/051448 WO2014006296A1 (fr) | 2012-07-06 | 2013-06-20 | Procédé d'assemblage et d ' encapsulation de microbatteries au lithium et microbatteries ainsi obtenues |
| CN201380029162.1A CN104396079A (zh) | 2012-07-06 | 2013-06-20 | 组装和封装锂微电池的方法以及由此生产的微电池 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1256530A FR2993101B1 (fr) | 2012-07-06 | 2012-07-06 | Procede d'assemblage et d'encapsulation de microbatteries au lithium et microbatteries ainsi obtenue |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2993101A1 true FR2993101A1 (fr) | 2014-01-10 |
| FR2993101B1 FR2993101B1 (fr) | 2015-07-17 |
Family
ID=47137824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR1256530A Active FR2993101B1 (fr) | 2012-07-06 | 2012-07-06 | Procede d'assemblage et d'encapsulation de microbatteries au lithium et microbatteries ainsi obtenue |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10290893B2 (fr) |
| EP (1) | EP2870654B1 (fr) |
| CN (1) | CN104396079A (fr) |
| FR (1) | FR2993101B1 (fr) |
| WO (1) | WO2014006296A1 (fr) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9876200B2 (en) * | 2015-08-07 | 2018-01-23 | International Business Machines Corporation | All-silicon hermetic package and processing for narrow, low-profile microbatteries |
| GB2548361B (en) | 2016-03-15 | 2020-12-02 | Dyson Technology Ltd | Method of fabricating an energy storage device |
| FR3054372A1 (fr) * | 2016-07-21 | 2018-01-26 | St Microelectronics Tours Sas | Montage de composants electroniques |
| WO2018122827A1 (fr) * | 2017-01-02 | 2018-07-05 | 3Dbatteries Ltd. | Dispositifs et systèmes de stockage d'énergie |
| FR3062520B1 (fr) | 2017-01-31 | 2019-03-29 | Stmicroelectronics (Tours) Sas | Batterie a contacts en face avant et en face arriere |
| EP3840110B1 (fr) * | 2017-06-29 | 2022-04-13 | I-Ten | Système d'encapsulation pour composants électroniques et batteries |
| US11637325B2 (en) * | 2017-08-10 | 2023-04-25 | International Business Machines Corporation | Large capacity solid state battery |
| GB2566472B (en) | 2017-09-14 | 2020-03-04 | Dyson Technology Ltd | Magnesium salts |
| GB2566473B (en) | 2017-09-14 | 2020-03-04 | Dyson Technology Ltd | Magnesium salts |
| GB2569387B (en) | 2017-12-18 | 2022-02-02 | Dyson Technology Ltd | Electrode |
| GB2569390A (en) | 2017-12-18 | 2019-06-19 | Dyson Technology Ltd | Compound |
| GB2569388B (en) | 2017-12-18 | 2022-02-02 | Dyson Technology Ltd | Compound |
| GB2569392B (en) | 2017-12-18 | 2022-01-26 | Dyson Technology Ltd | Use of aluminium in a cathode material |
| FR3077426B1 (fr) | 2018-01-29 | 2022-11-25 | St Microelectronics Tours Sas | Assemblage de microbatteries |
| US11043690B2 (en) | 2019-01-02 | 2021-06-22 | International Business Machines Corporation | Sandwich-parallel micro-battery |
| US11664550B2 (en) * | 2019-12-23 | 2023-05-30 | I-Ten | Encapsulation system for electronic components and batteries |
| US11539088B2 (en) * | 2020-03-09 | 2022-12-27 | International Business Machines Corporation | Ultra-thin microbattery packaging and handling |
| US11522243B2 (en) * | 2020-12-21 | 2022-12-06 | International Business Machines Corporation | Hermetic packaging of a micro-battery device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070139001A1 (en) * | 2003-10-06 | 2007-06-21 | Robert Hahn | Battery, especially a microbattery, and the production thereof using wafer-level technology |
| US20080032236A1 (en) * | 2006-07-18 | 2008-02-07 | Wallace Mark A | Method and apparatus for solid-state microbattery photolithographic manufacture, singulation and passivation |
| US20100291431A1 (en) * | 2009-05-13 | 2010-11-18 | Front Edge Technology, Inc. | Thin film battery with protective packaging |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6982132B1 (en) | 1997-10-15 | 2006-01-03 | Trustees Of Tufts College | Rechargeable thin film battery and method for making the same |
| US6610440B1 (en) * | 1998-03-10 | 2003-08-26 | Bipolar Technologies, Inc | Microscopic batteries for MEMS systems |
| US6778850B1 (en) * | 1999-03-16 | 2004-08-17 | Accuray, Inc. | Frameless radiosurgery treatment system and method |
| KR100387121B1 (ko) * | 2000-08-31 | 2003-06-12 | 주식회사 애니셀 | 수직 방향으로 집적된 다층 박막전지 및 그의 제조방법 |
| US6806559B2 (en) | 2002-04-22 | 2004-10-19 | Irvine Sensors Corporation | Method and apparatus for connecting vertically stacked integrated circuit chips |
| JP4043296B2 (ja) * | 2002-06-13 | 2008-02-06 | 松下電器産業株式会社 | 全固体電池 |
| KR100588475B1 (ko) * | 2004-06-07 | 2006-06-09 | 한국화학연구원 | 폴리실록산계 화합물을 포함하는 고체 고분자 전해질 조성물 |
| WO2007066409A1 (fr) * | 2005-12-09 | 2007-06-14 | Spansion Llc | Dispositif a semi-conducteurs et son procede de fabrication |
| US8154881B2 (en) * | 2006-11-13 | 2012-04-10 | Telecommunication Systems, Inc. | Radiation-shielded semiconductor assembly |
| US20090136839A1 (en) | 2007-11-28 | 2009-05-28 | Front Edge Technology, Inc. | Thin film battery comprising stacked battery cells and method |
| FR2925227B1 (fr) * | 2007-12-12 | 2009-11-27 | Commissariat Energie Atomique | Dispositif electrochimique au lithium encaspule. |
-
2012
- 2012-07-06 FR FR1256530A patent/FR2993101B1/fr active Active
-
2013
- 2013-06-20 EP EP13737346.0A patent/EP2870654B1/fr active Active
- 2013-06-20 US US14/403,065 patent/US10290893B2/en active Active
- 2013-06-20 CN CN201380029162.1A patent/CN104396079A/zh active Pending
- 2013-06-20 WO PCT/FR2013/051448 patent/WO2014006296A1/fr not_active Ceased
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070139001A1 (en) * | 2003-10-06 | 2007-06-21 | Robert Hahn | Battery, especially a microbattery, and the production thereof using wafer-level technology |
| US20080032236A1 (en) * | 2006-07-18 | 2008-02-07 | Wallace Mark A | Method and apparatus for solid-state microbattery photolithographic manufacture, singulation and passivation |
| US20100291431A1 (en) * | 2009-05-13 | 2010-11-18 | Front Edge Technology, Inc. | Thin film battery with protective packaging |
Non-Patent Citations (4)
| Title |
|---|
| CHIANG ET AL: "Deposition and permeation properties of SiNX/parylene multilayers on polymeric substrates", SURFACE AND COATINGS TECHNOLOGY, ELSEVIER, AMSTERDAM, NL, vol. 200, no. 20-21, 22 May 2006 (2006-05-22), pages 5843 - 5848, XP005386465, ISSN: 0257-8972, DOI: 10.1016/J.SURFCOAT.2005.08.133 * |
| ELLIS MENG ET AL: "Plasma removal of Parylene C", JOURNAL OF MICROMECHANICS & MICROENGINEERING, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 18, no. 4, 1 April 2008 (2008-04-01), pages 45004, XP020136803, ISSN: 0960-1317 * |
| EUGENE ZAKAR ET AL: "Patterning of Thick Parylene Films by Oxygen Plasma for Application as Exploding Foil Initiator Flyer Material", U.S. ARMY RESEARCH LABORATORY REPORT ARL-TR-4956, 1 September 2009 (2009-09-01), Adelphi, Maryland, USA, XP055053613, Retrieved from the Internet <URL:http://www.dtic.mil/cgi-bin/GetTRDoc?AD=ADA506670> [retrieved on 20130215] * |
| FLÁVIA R. DE ALMEIDA ET AL: "Reactive ion etching of PECVD silicon nitride in SF6 plasma", JOURNAL OF NUCLEAR MATERIALS, vol. 200, no. 3, 1 May 1993 (1993-05-01), pages 371 - 374, XP055053641, ISSN: 0022-3115, DOI: 10.1016/0022-3115(93)90311-L * |
Also Published As
| Publication number | Publication date |
|---|---|
| US10290893B2 (en) | 2019-05-14 |
| EP2870654A1 (fr) | 2015-05-13 |
| FR2993101B1 (fr) | 2015-07-17 |
| WO2014006296A1 (fr) | 2014-01-09 |
| CN104396079A (zh) | 2015-03-04 |
| US20150188186A1 (en) | 2015-07-02 |
| EP2870654B1 (fr) | 2016-03-30 |
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