FR2992822B1 - EX-SITU PLASMA SURFACE SURFACE TREATMENT EQUIPMENT AND ASSOCIATED METHOD. - Google Patents

EX-SITU PLASMA SURFACE SURFACE TREATMENT EQUIPMENT AND ASSOCIATED METHOD.

Info

Publication number
FR2992822B1
FR2992822B1 FR1256144A FR1256144A FR2992822B1 FR 2992822 B1 FR2992822 B1 FR 2992822B1 FR 1256144 A FR1256144 A FR 1256144A FR 1256144 A FR1256144 A FR 1256144A FR 2992822 B1 FR2992822 B1 FR 2992822B1
Authority
FR
France
Prior art keywords
treatment equipment
associated method
situ plasma
surface treatment
plasma surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1256144A
Other languages
French (fr)
Other versions
FR2992822A1 (en
Inventor
Jean Charles Loretz
Yvon Pellegrin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semco Engineering SA
Original Assignee
Semco Engineering SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semco Engineering SA filed Critical Semco Engineering SA
Priority to FR1256144A priority Critical patent/FR2992822B1/en
Priority to PCT/FR2013/051481 priority patent/WO2014001709A1/en
Publication of FR2992822A1 publication Critical patent/FR2992822A1/en
Application granted granted Critical
Publication of FR2992822B1 publication Critical patent/FR2992822B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
FR1256144A 2012-06-27 2012-06-27 EX-SITU PLASMA SURFACE SURFACE TREATMENT EQUIPMENT AND ASSOCIATED METHOD. Expired - Fee Related FR2992822B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1256144A FR2992822B1 (en) 2012-06-27 2012-06-27 EX-SITU PLASMA SURFACE SURFACE TREATMENT EQUIPMENT AND ASSOCIATED METHOD.
PCT/FR2013/051481 WO2014001709A1 (en) 2012-06-27 2013-06-26 Device for surface treatment with plasma generated ex situ, and related method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1256144A FR2992822B1 (en) 2012-06-27 2012-06-27 EX-SITU PLASMA SURFACE SURFACE TREATMENT EQUIPMENT AND ASSOCIATED METHOD.

Publications (2)

Publication Number Publication Date
FR2992822A1 FR2992822A1 (en) 2014-01-03
FR2992822B1 true FR2992822B1 (en) 2015-08-07

Family

ID=47080655

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1256144A Expired - Fee Related FR2992822B1 (en) 2012-06-27 2012-06-27 EX-SITU PLASMA SURFACE SURFACE TREATMENT EQUIPMENT AND ASSOCIATED METHOD.

Country Status (2)

Country Link
FR (1) FR2992822B1 (en)
WO (1) WO2014001709A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4192706A (en) * 1975-01-22 1980-03-11 Tokyo Shibaura Electric Co., Ltd. Gas-etching device
US20030164143A1 (en) * 2002-01-10 2003-09-04 Hitachi Kokusai Electric Inc. Batch-type remote plasma processing apparatus
KR100702010B1 (en) * 2005-03-07 2007-03-30 삼성전자주식회사 Reflector, substrate processing apparatus employing the same, and substrate processing methods using the same
JP2008241292A (en) * 2007-03-26 2008-10-09 Iwasaki Electric Co Ltd Weatherability testing device and weatherability testing method
KR100857541B1 (en) * 2007-07-04 2008-09-08 주식회사 테라텍 Batch type ashing apparatus using remote radical generator

Also Published As

Publication number Publication date
WO2014001709A1 (en) 2014-01-03
FR2992822A1 (en) 2014-01-03

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20160229