FR2967149B1 - MICRO-ACTUATOR AND METHOD OF MANUFACTURING THE SAME - Google Patents

MICRO-ACTUATOR AND METHOD OF MANUFACTURING THE SAME

Info

Publication number
FR2967149B1
FR2967149B1 FR1059087A FR1059087A FR2967149B1 FR 2967149 B1 FR2967149 B1 FR 2967149B1 FR 1059087 A FR1059087 A FR 1059087A FR 1059087 A FR1059087 A FR 1059087A FR 2967149 B1 FR2967149 B1 FR 2967149B1
Authority
FR
France
Prior art keywords
actuator
micro
nano
electrodes
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1059087A
Other languages
French (fr)
Other versions
FR2967149A1 (en
Inventor
Benoit Guiffard
Daniel Guyomar
Laurence Seveyrat
Philippe Miele
Arnaud Brioude
Anne-Laure Deman
Jean Francois Chateaux
Christophe Malhaire
Mickael Roussel
Jean Yves Cavaille
Van De Moortele Agnes Bogner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INST NAT SCIENCES APPLIQ
Centre National de la Recherche Scientifique CNRS
Universite Claude Bernard Lyon 1 UCBL
Institut National des Sciences Appliquees de Lyon
Original Assignee
INST NAT SCIENCES APPLIQ
Centre National de la Recherche Scientifique CNRS
Universite Claude Bernard Lyon 1 UCBL
Institut National des Sciences Appliquees de Lyon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INST NAT SCIENCES APPLIQ, Centre National de la Recherche Scientifique CNRS, Universite Claude Bernard Lyon 1 UCBL, Institut National des Sciences Appliquees de Lyon filed Critical INST NAT SCIENCES APPLIQ
Priority to FR1059087A priority Critical patent/FR2967149B1/en
Publication of FR2967149A1 publication Critical patent/FR2967149A1/en
Application granted granted Critical
Publication of FR2967149B1 publication Critical patent/FR2967149B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The micro-actuator has a set of electrodes (1, 2) separated by a deformable membrane (3), where the micro-actuator is activated by electric voltage applied between the electrodes to deform the deformable membrane. A silicon substrate (4) forms a support on which the electrodes rest. The membrane includes a mixture of polymer and nano-object conductor or semi-conductor material, where thickness of the membrane ranges between one and hundred micrometer. The nano-objects are nano-wires having diameter ranging between zero and hundred nanometers. The nano-objects are made of material chosen among silicon carbide, carbon black, carbon nanotubes, iron, copper, silver, nickel, aluminum, conducting polymer such as copper polyphtalocyanine or polynaniline, and oxide such as silicon oxide, zinc oxide, barium titanate or titanium oxide, or a silicate. An independent claim is also included for a method for fabricating a micro-actuator.
FR1059087A 2010-11-04 2010-11-04 MICRO-ACTUATOR AND METHOD OF MANUFACTURING THE SAME Expired - Fee Related FR2967149B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1059087A FR2967149B1 (en) 2010-11-04 2010-11-04 MICRO-ACTUATOR AND METHOD OF MANUFACTURING THE SAME

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1059087A FR2967149B1 (en) 2010-11-04 2010-11-04 MICRO-ACTUATOR AND METHOD OF MANUFACTURING THE SAME

Publications (2)

Publication Number Publication Date
FR2967149A1 FR2967149A1 (en) 2012-05-11
FR2967149B1 true FR2967149B1 (en) 2013-10-25

Family

ID=44547736

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1059087A Expired - Fee Related FR2967149B1 (en) 2010-11-04 2010-11-04 MICRO-ACTUATOR AND METHOD OF MANUFACTURING THE SAME

Country Status (1)

Country Link
FR (1) FR2967149B1 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6518690B2 (en) * 2000-04-19 2003-02-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film type elements and process for producing the same
US7369396B2 (en) * 2005-07-07 2008-05-06 Lucent Technologies Inc. Composite electroactive material for electromechanical actuators

Also Published As

Publication number Publication date
FR2967149A1 (en) 2012-05-11

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Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 6

ST Notification of lapse

Effective date: 20170731