FR2962804B1 - Dispositif et procede de mesure polarimetrique a resolution microscopique, accessoire de polarimetrie pour microscope, ellipso-microscope et microscope a contraste ellipsometrique - Google Patents
Dispositif et procede de mesure polarimetrique a resolution microscopique, accessoire de polarimetrie pour microscope, ellipso-microscope et microscope a contraste ellipsometriqueInfo
- Publication number
- FR2962804B1 FR2962804B1 FR1055837A FR1055837A FR2962804B1 FR 2962804 B1 FR2962804 B1 FR 2962804B1 FR 1055837 A FR1055837 A FR 1055837A FR 1055837 A FR1055837 A FR 1055837A FR 2962804 B1 FR2962804 B1 FR 2962804B1
- Authority
- FR
- France
- Prior art keywords
- microscope
- ellipso
- polarimetry
- accessory
- measurement device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005259 measurement Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 238000000711 polarimetry Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G01J4/04—Polarimeters using electric detection means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/0092—Polarisation microscopes
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1055837A FR2962804B1 (fr) | 2010-07-19 | 2010-07-19 | Dispositif et procede de mesure polarimetrique a resolution microscopique, accessoire de polarimetrie pour microscope, ellipso-microscope et microscope a contraste ellipsometrique |
PCT/FR2011/051715 WO2012017158A1 (fr) | 2010-07-19 | 2011-07-18 | Dispositif et procède de mesure polarimétrique a résolution microscopique, accessoire de polarimétrie pour microscope, ellipso-microscope et microscope a contraste ellipsométrique |
US13/810,791 US8908180B2 (en) | 2010-07-19 | 2011-07-18 | Device and method for polarimetric measurement with microscopic resolution, polarimetry accessory for a microscope, ellipsomicroscope and ellipsometric contrast microscope |
EP11754441.1A EP2596325A1 (fr) | 2010-07-19 | 2011-07-18 | Dispositif et procède de mesure polarimétrique a résolution microscopique, accessoire de polarimétrie pour microscope, ellipso-microscope et microscope a contraste ellipsométrique |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1055837A FR2962804B1 (fr) | 2010-07-19 | 2010-07-19 | Dispositif et procede de mesure polarimetrique a resolution microscopique, accessoire de polarimetrie pour microscope, ellipso-microscope et microscope a contraste ellipsometrique |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2962804A1 FR2962804A1 (fr) | 2012-01-20 |
FR2962804B1 true FR2962804B1 (fr) | 2014-04-18 |
Family
ID=43629409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1055837A Expired - Fee Related FR2962804B1 (fr) | 2010-07-19 | 2010-07-19 | Dispositif et procede de mesure polarimetrique a resolution microscopique, accessoire de polarimetrie pour microscope, ellipso-microscope et microscope a contraste ellipsometrique |
Country Status (4)
Country | Link |
---|---|
US (1) | US8908180B2 (fr) |
EP (1) | EP2596325A1 (fr) |
FR (1) | FR2962804B1 (fr) |
WO (1) | WO2012017158A1 (fr) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10119901B2 (en) * | 2013-11-15 | 2018-11-06 | Mikroscan Technologies, Inc. | Geological scanner |
US11085901B2 (en) * | 2014-08-19 | 2021-08-10 | Dan Slater | Acoustical microscope |
WO2016069794A1 (fr) | 2014-10-28 | 2016-05-06 | Mikroscan Technologies, Inc. | Système de visualisation de microdissection |
US10101265B1 (en) | 2014-11-07 | 2018-10-16 | Board Of Regents For The University Of Nebraska | Birefringence imaging chromatography based on highly ordered 3D nanostructures |
KR102436474B1 (ko) * | 2015-08-07 | 2022-08-29 | 에스케이하이닉스 주식회사 | 반도체 패턴 계측 장치, 이를 이용한 반도체 패턴 계측 시스템 및 방법 |
US10184903B2 (en) * | 2015-09-11 | 2019-01-22 | Samsung Display Co., Ltd. | Device for evaluating crystallinity and method of evaluating crystallinity |
US10139528B1 (en) * | 2016-01-20 | 2018-11-27 | Kla-Tencor Corporation | Compound objectives for imaging and scatterometry overlay |
CN106595521B (zh) * | 2016-12-12 | 2019-12-13 | 武汉颐光科技有限公司 | 基于液晶调相的垂直物镜式穆勒矩阵成像椭偏仪 |
EP3580546A1 (fr) | 2017-02-08 | 2019-12-18 | Yissum Research Development Company of The Hebrew University of Jerusalem Ltd. | Système et procédé destinés à être utilisés dans une ellipsométrie à haute résolution spatiale |
US11193882B2 (en) | 2019-11-26 | 2021-12-07 | Samsung Electronics Co., Ltd. | Ellipsometer and inspection device for semiconductor device |
US11346769B2 (en) | 2020-02-20 | 2022-05-31 | Onto Innovation Inc. | Fast generalized multi-wavelength ellipsometer |
KR20220004527A (ko) | 2020-07-03 | 2022-01-11 | 삼성전자주식회사 | 타원 분광기 및 반도체 장치의 검사 장치 |
JP7420667B2 (ja) | 2020-07-03 | 2024-01-23 | 三星電子株式会社 | エリプソメータ及び半導体装置の検査装置 |
CN111947892B (zh) * | 2020-07-17 | 2022-03-08 | 中国科学院上海光学精密机械研究所 | 一种深紫外退偏器检测装置及检测方法 |
US11346768B1 (en) * | 2020-12-02 | 2022-05-31 | Onto Innovation Inc. | Vortex polarimeter |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19842364C1 (de) | 1998-09-16 | 2000-04-06 | Nanophotonics Ag | Mikropolarimeter und Ellipsometer |
US6693711B1 (en) | 2000-05-15 | 2004-02-17 | Regents Of The University Of Minnesota | Ellipsometer using radial symmetry |
US7317531B2 (en) * | 2002-12-05 | 2008-01-08 | Kla-Tencor Technologies Corporation | Apparatus and methods for detecting overlay errors using scatterometry |
US6698511B2 (en) | 2001-05-18 | 2004-03-02 | Incep Technologies, Inc. | Vortex heatsink for high performance thermal applications |
FR2841339B1 (fr) | 2002-06-19 | 2004-09-10 | Centre Nat Rech Scient | Supports anti-reflechissants et supports amplificateurs de contraste pour la lumiere polarisee en reflexion |
US7609373B2 (en) | 2005-05-31 | 2009-10-27 | Kla-Tencor Technologies Corporation | Reducing variations in energy reflected from a sample due to thin film interference |
ES2302461B1 (es) * | 2006-12-15 | 2009-05-21 | Universidad De Zaragoza | Conversor de polarizacion y dispositivo de focalizacion basado en dicho conversor. |
NL1036123A1 (nl) | 2007-11-13 | 2009-05-14 | Asml Netherlands Bv | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method. |
US8228601B2 (en) * | 2008-05-13 | 2012-07-24 | Applied Materials Israel, Ltd. | Scanning microscopy using inhomogeneous polarization |
-
2010
- 2010-07-19 FR FR1055837A patent/FR2962804B1/fr not_active Expired - Fee Related
-
2011
- 2011-07-18 US US13/810,791 patent/US8908180B2/en not_active Expired - Fee Related
- 2011-07-18 EP EP11754441.1A patent/EP2596325A1/fr not_active Withdrawn
- 2011-07-18 WO PCT/FR2011/051715 patent/WO2012017158A1/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2012017158A1 (fr) | 2012-02-09 |
EP2596325A1 (fr) | 2013-05-29 |
FR2962804A1 (fr) | 2012-01-20 |
US8908180B2 (en) | 2014-12-09 |
US20130265576A1 (en) | 2013-10-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 7 |
|
PLFP | Fee payment |
Year of fee payment: 8 |
|
PLFP | Fee payment |
Year of fee payment: 9 |
|
PLFP | Fee payment |
Year of fee payment: 11 |
|
ST | Notification of lapse |
Effective date: 20220305 |