FR2960064B1 - Capteur micromecanique et procede de mesure utilisant un tel capteur - Google Patents

Capteur micromecanique et procede de mesure utilisant un tel capteur

Info

Publication number
FR2960064B1
FR2960064B1 FR1154014A FR1154014A FR2960064B1 FR 2960064 B1 FR2960064 B1 FR 2960064B1 FR 1154014 A FR1154014 A FR 1154014A FR 1154014 A FR1154014 A FR 1154014A FR 2960064 B1 FR2960064 B1 FR 2960064B1
Authority
FR
France
Prior art keywords
same
measuring method
micromechanical sensor
micromechanical
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1154014A
Other languages
English (en)
Other versions
FR2960064A1 (fr
Inventor
Daniel Christoph Meisel
Manuel Engesser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2960064A1 publication Critical patent/FR2960064A1/fr
Application granted granted Critical
Publication of FR2960064B1 publication Critical patent/FR2960064B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0857—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a particular shape of the suspension spring
    • G01P2015/086—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a particular shape of the suspension spring using a torsional suspension spring

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
FR1154014A 2010-05-12 2011-05-10 Capteur micromecanique et procede de mesure utilisant un tel capteur Expired - Fee Related FR2960064B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201010028962 DE102010028962A1 (de) 2010-05-12 2010-05-12 Mikromechanischer Sensor und zugehöriges Messverfahren

Publications (2)

Publication Number Publication Date
FR2960064A1 FR2960064A1 (fr) 2011-11-18
FR2960064B1 true FR2960064B1 (fr) 2015-12-04

Family

ID=44859769

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1154014A Expired - Fee Related FR2960064B1 (fr) 2010-05-12 2011-05-10 Capteur micromecanique et procede de mesure utilisant un tel capteur

Country Status (2)

Country Link
DE (1) DE102010028962A1 (fr)
FR (1) FR2960064B1 (fr)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008017156A1 (de) 2008-04-03 2009-10-08 Continental Teves Ag & Co. Ohg Mikromechanischer Beschleunigungssensor

Also Published As

Publication number Publication date
FR2960064A1 (fr) 2011-11-18
CN102288787A (zh) 2011-12-21
DE102010028962A1 (de) 2011-11-17

Similar Documents

Publication Publication Date Title
BR112013015856A2 (pt) aparelho e método de medição optoeletrônica de brillouin.
DK2469296T3 (da) Optoelectronic sensor and method for recording and determining the distance of an object
FI20080182A0 (fi) Mittausmenetelmä ja -laite
IL209456A0 (en) Pointer detection apparatus and detection sensor
PL2850401T3 (pl) Czujnikowy moduł systemu WIM i sposób pomiaru
FR2983965B1 (fr) Sonde de mesure d'incidence locale et procede mettant en oeuvre la sonde
BR112014028202A2 (pt) método de medição e sensor de constituinte de material
FR2963100B1 (fr) Capteur de pression et son procede de fabrication
DK2782828T3 (da) Testapparat til flysensorer og fremgangsmåde til testing af flysensorer
BR112014012574A2 (pt) sensor químico, módulo de sensor químico, e, aparelho e método de detecção de substância química
FR2985565B1 (fr) Dispositif de capteur
FR2975488B1 (fr) Capteur
EE05616B1 (et) Meetod ja seade sageduskarakteristiku m??tmiseks
EP2711689A4 (fr) Dispositif de mesure de fluorescence améliorée par champ de plasmons de surface et procédé de détection de fluorescence l'utilisant
EP2750190A4 (fr) Capteur d'image, son procédé de fabrication et dispositif de contrôle
EP2570798A4 (fr) Procédé et dispositif de mesure fret
IL227492A0 (en) Sensor test device and sensor test slow
EP2799843A4 (fr) Puce capteur de mesure spfs, procédé et dispositif de mesure spfs l'utilisant
FR2966926B1 (fr) Systeme interferometrique apolarise et procede de mesure interferometrique apolarise
DK2618180T3 (da) Sensorindretnig, fremstillingsfremgangsmåde og detekteringsindretning
BRPI1009213A2 (pt) método de medição de distância e aparelho de medição de distância.
FR2947629B1 (fr) Dispositif de mesure de pression et son procede de fabrication
DK2384695T3 (da) Målesystem til analytbestemmelse og fremgangsmåde
FR2974410B1 (fr) Capteur passif et reversible de deformations
FR2956510B1 (fr) Procede et dispositif de detection autonome

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 6

PLFP Fee payment

Year of fee payment: 7

PLFP Fee payment

Year of fee payment: 8

PLFP Fee payment

Year of fee payment: 9

PLFP Fee payment

Year of fee payment: 10

PLFP Fee payment

Year of fee payment: 11

PLFP Fee payment

Year of fee payment: 12

ST Notification of lapse

Effective date: 20240105