FR2957938B1 - GAS INJECTION DEVICE WITH UNIFORM GAS SPEED - Google Patents
GAS INJECTION DEVICE WITH UNIFORM GAS SPEEDInfo
- Publication number
- FR2957938B1 FR2957938B1 FR1001255A FR1001255A FR2957938B1 FR 2957938 B1 FR2957938 B1 FR 2957938B1 FR 1001255 A FR1001255 A FR 1001255A FR 1001255 A FR1001255 A FR 1001255A FR 2957938 B1 FR2957938 B1 FR 2957938B1
- Authority
- FR
- France
- Prior art keywords
- gas
- injection device
- speed
- uniform
- gas injection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45582—Expansion of gas before it reaches the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
- B01J4/002—Nozzle-type elements
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
- F15D1/00—Influencing flow of fluids
- F15D1/08—Influencing flow of fluids of jets leaving an orifice
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2204/00—Aspects relating to feed or outlet devices; Regulating devices for feed or outlet devices
- B01J2204/002—Aspects relating to feed or outlet devices; Regulating devices for feed or outlet devices the feeding side being of particular interest
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1001255A FR2957938B1 (en) | 2010-03-29 | 2010-03-29 | GAS INJECTION DEVICE WITH UNIFORM GAS SPEED |
US13/638,094 US9410248B2 (en) | 2010-03-29 | 2011-03-25 | Modular gas injection device |
EP11717025.8A EP2553144B1 (en) | 2010-03-29 | 2011-03-25 | Gas injection device with uniform gas velocity |
EP11716061.4A EP2553143B1 (en) | 2010-03-29 | 2011-03-25 | Modular gas injection device |
PCT/IB2011/051274 WO2011121508A1 (en) | 2010-03-29 | 2011-03-25 | Modular gas injection device |
PCT/IB2011/051273 WO2011121507A1 (en) | 2010-03-29 | 2011-03-25 | Gas injection device with uniform gas velocity |
US13/638,047 US8721835B2 (en) | 2010-03-29 | 2011-03-25 | Gas injection device with uniform gas velocity |
US15/204,404 US10221479B2 (en) | 2010-03-29 | 2016-07-07 | Modular gas injection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1001255A FR2957938B1 (en) | 2010-03-29 | 2010-03-29 | GAS INJECTION DEVICE WITH UNIFORM GAS SPEED |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2957938A1 FR2957938A1 (en) | 2011-09-30 |
FR2957938B1 true FR2957938B1 (en) | 2012-10-05 |
Family
ID=42735569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1001255A Active FR2957938B1 (en) | 2010-03-29 | 2010-03-29 | GAS INJECTION DEVICE WITH UNIFORM GAS SPEED |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2957938B1 (en) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3525527A1 (en) * | 1985-07-17 | 1987-01-29 | Vsr Eng Foerdertechnik | HIGH-SPEED BLOW-OUT NOZZLE |
FI84573C (en) * | 1990-03-20 | 1991-12-27 | Raute Oy | BLAOSANORDNING FOER VINDSPRIDNING AV SPAONOR. |
FR2661554A1 (en) * | 1990-04-30 | 1991-10-31 | Philips Electronique Lab | Device for introducing gases into the chamber of an epitaxy reactor, reactor chamber including such a gas-introduction device, and use of such a chamber for producing semiconducting layers |
GB2286856B (en) * | 1994-02-16 | 1998-09-16 | Mitsubishi Electric Corp | Blower |
US20010032588A1 (en) * | 2000-04-21 | 2001-10-25 | Kenji Harafuji | Semiconductor film deposition apparatus |
US6544869B1 (en) * | 2000-06-23 | 2003-04-08 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus for depositing semiconductor film and method for fabricating semiconductor device |
US7163587B2 (en) * | 2002-02-08 | 2007-01-16 | Axcelis Technologies, Inc. | Reactor assembly and processing method |
-
2010
- 2010-03-29 FR FR1001255A patent/FR2957938B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
FR2957938A1 (en) | 2011-09-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
CL | Concession to grant licences |
Name of requester: ENCAPSULIX, FR Effective date: 20130415 |
|
PLFP | Fee payment |
Year of fee payment: 7 |
|
PLFP | Fee payment |
Year of fee payment: 8 |