FR2950441B1 - OPTICAL SENSOR WITH LATERAL FIELD FOR 3D SCANNING - Google Patents

OPTICAL SENSOR WITH LATERAL FIELD FOR 3D SCANNING

Info

Publication number
FR2950441B1
FR2950441B1 FR0904528A FR0904528A FR2950441B1 FR 2950441 B1 FR2950441 B1 FR 2950441B1 FR 0904528 A FR0904528 A FR 0904528A FR 0904528 A FR0904528 A FR 0904528A FR 2950441 B1 FR2950441 B1 FR 2950441B1
Authority
FR
France
Prior art keywords
scanning
optical sensor
lateral field
lateral
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0904528A
Other languages
French (fr)
Other versions
FR2950441A1 (en
Inventor
Sabban Youssef Cohen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sciences Et Techniques Industrielles de la Lum Fr
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=41395513&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=FR2950441(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Individual filed Critical Individual
Priority to FR0904528A priority Critical patent/FR2950441B1/en
Publication of FR2950441A1 publication Critical patent/FR2950441A1/en
Application granted granted Critical
Publication of FR2950441B1 publication Critical patent/FR2950441B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR0904528A 2009-09-23 2009-09-23 OPTICAL SENSOR WITH LATERAL FIELD FOR 3D SCANNING Active FR2950441B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0904528A FR2950441B1 (en) 2009-09-23 2009-09-23 OPTICAL SENSOR WITH LATERAL FIELD FOR 3D SCANNING

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0904528A FR2950441B1 (en) 2009-09-23 2009-09-23 OPTICAL SENSOR WITH LATERAL FIELD FOR 3D SCANNING

Publications (2)

Publication Number Publication Date
FR2950441A1 FR2950441A1 (en) 2011-03-25
FR2950441B1 true FR2950441B1 (en) 2012-05-18

Family

ID=41395513

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0904528A Active FR2950441B1 (en) 2009-09-23 2009-09-23 OPTICAL SENSOR WITH LATERAL FIELD FOR 3D SCANNING

Country Status (1)

Country Link
FR (1) FR2950441B1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103196568B (en) * 2012-01-05 2017-05-24 株式会社三丰 Wavelength detector and contact probe using it
CN107063127A (en) * 2015-12-03 2017-08-18 欧姆龙株式会社 Optical measuring device
CN109073369A (en) * 2016-03-25 2018-12-21 Fogale 纳米技术公司 For with variable spaces resolution ratio the objects such as chip to be carried out with the confocal color difference device and method of 2D/3D detection
CN109073368A (en) * 2016-03-25 2018-12-21 Fogale 纳米技术公司 The color difference confocal device and method that 2D/3D for objects such as chips is detected

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2489722B (en) 2011-04-06 2017-01-18 Precitec Optronik Gmbh Apparatus and method for determining a depth of a region having a high aspect ratio that protrudes into a surface of a semiconductor wafer
DE102011051146B3 (en) 2011-06-17 2012-10-04 Precitec Optronik Gmbh Test method for testing a bonding layer between wafer-shaped samples
EP2667151A1 (en) 2012-05-21 2013-11-27 Sysmelec SA Chromatic altimetry converter
DE102012111008B4 (en) * 2012-11-15 2014-05-22 Precitec Optronik Gmbh Optical measuring method and optical measuring device for detecting a surface topography
JP6247752B2 (en) * 2013-06-17 2017-12-13 プレシテック オプトロニック ゲーエムベーハーＰｒｅｃｉｔｅｃ Ｏｐｔｒｏｎｉｋ ＧｍｂＨ Optical measuring apparatus and optical measuring method for obtaining distance difference
WO2016092348A1 (en) 2014-12-09 2016-06-16 Asentys Sas Integrated optical device for contactless measurement of altitudes and thicknesses
DE102015112769B4 (en) 2015-08-04 2022-09-08 Carl Zeiss Ag Device and method for optical sample examination
US10317344B2 (en) 2016-09-07 2019-06-11 Kla-Tencor Corporation Speed enhancement of chromatic confocal metrology
US10260941B2 (en) 2016-10-04 2019-04-16 Precitec Optronik Gmbh Chromatic confocal distance sensor
DE102016221630A1 (en) 2016-11-04 2018-05-09 Carl Zeiss Industrielle Messtechnik Gmbh Confocal chromatic sensor for determining coordinates of a measurement object
US10234265B2 (en) 2016-12-12 2019-03-19 Precitec Optronik Gmbh Distance measuring device and method for measuring distances
DE102017126310A1 (en) 2017-11-09 2019-05-09 Precitec Optronik Gmbh Distance measuring device
DE102018201211B4 (en) 2018-01-26 2021-08-12 Carl Zeiss Industrielle Messtechnik Gmbh Chromatic confocal multi-spot sensor for determining the coordinates of a measurement object
EP3567339A1 (en) * 2018-05-10 2019-11-13 Nanovea, Inc. 3d surface scanning white light axial chromatism device and method
DE102018118290A1 (en) * 2018-07-27 2020-01-30 Carl Zeiss Industrielle Messtechnik Gmbh Sensor for determining the geometric properties of a measurement object
DE102018130901A1 (en) 2018-12-04 2020-06-04 Precitec Optronik Gmbh Optical measuring device
US11997248B2 (en) 2020-12-18 2024-05-28 Yoed Abraham Fiber-optic 3D imaging
US11162783B1 (en) * 2020-12-18 2021-11-02 Yoed Abraham Fiber-optic 3D imaging
DE102022207032A1 (en) * 2022-07-11 2024-01-11 Micro-Epsilon Optronic Gmbh Device, device and method for confocal-chromatic distance and/or thickness measurement

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990000754A1 (en) * 1988-07-13 1990-01-25 Martin Russell Harris Scanning confocal microscope
FR2738343B1 (en) * 1995-08-30 1997-10-24 Cohen Sabban Joseph OPTICAL MICROSTRATIGRAPHY DEVICE
US7450243B2 (en) * 2006-07-10 2008-11-11 The Board Of Trustees Of The University Of Illinois Volumetric endoscopic coherence microscopy using a coherent fiber bundle

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103196568B (en) * 2012-01-05 2017-05-24 株式会社三丰 Wavelength detector and contact probe using it
CN107063127A (en) * 2015-12-03 2017-08-18 欧姆龙株式会社 Optical measuring device
CN107063127B (en) * 2015-12-03 2020-06-30 欧姆龙株式会社 Optical measuring device
CN109073369A (en) * 2016-03-25 2018-12-21 Fogale 纳米技术公司 For with variable spaces resolution ratio the objects such as chip to be carried out with the confocal color difference device and method of 2D/3D detection
CN109073368A (en) * 2016-03-25 2018-12-21 Fogale 纳米技术公司 The color difference confocal device and method that 2D/3D for objects such as chips is detected

Also Published As

Publication number Publication date
FR2950441A1 (en) 2011-03-25

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