FR2950155B1 - Procede d'alignement pour controler un miroir - Google Patents

Procede d'alignement pour controler un miroir

Info

Publication number
FR2950155B1
FR2950155B1 FR0956396A FR0956396A FR2950155B1 FR 2950155 B1 FR2950155 B1 FR 2950155B1 FR 0956396 A FR0956396 A FR 0956396A FR 0956396 A FR0956396 A FR 0956396A FR 2950155 B1 FR2950155 B1 FR 2950155B1
Authority
FR
France
Prior art keywords
mirror
controlling
alignment method
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0956396A
Other languages
English (en)
Other versions
FR2950155A1 (fr
Inventor
Remi Bourgois
Emmanuel Carnis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Electronics and Defense SAS
Original Assignee
Sagem Defense Securite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem Defense Securite SA filed Critical Sagem Defense Securite SA
Priority to FR0956396A priority Critical patent/FR2950155B1/fr
Priority to US13/496,614 priority patent/US20120170038A1/en
Priority to PCT/FR2010/051868 priority patent/WO2011033211A1/fr
Priority to EP10770540A priority patent/EP2478395A1/fr
Priority to CN2010800527147A priority patent/CN102695972A/zh
Publication of FR2950155A1 publication Critical patent/FR2950155A1/fr
Application granted granted Critical
Publication of FR2950155B1 publication Critical patent/FR2950155B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/10—Mirrors with curved faces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
    • G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02058—Passive reduction of errors by particular optical compensation or alignment elements, e.g. dispersion compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/005—Testing of reflective surfaces, e.g. mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Holo Graphy (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR0956396A 2009-09-17 2009-09-17 Procede d'alignement pour controler un miroir Expired - Fee Related FR2950155B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0956396A FR2950155B1 (fr) 2009-09-17 2009-09-17 Procede d'alignement pour controler un miroir
US13/496,614 US20120170038A1 (en) 2009-09-17 2010-09-08 Alignment Method for Inspecting a Mirror
PCT/FR2010/051868 WO2011033211A1 (fr) 2009-09-17 2010-09-08 Procede d'alignement pour controler un miroir
EP10770540A EP2478395A1 (fr) 2009-09-17 2010-09-08 Procede d'alignement pour controler un miroir
CN2010800527147A CN102695972A (zh) 2009-09-17 2010-09-08 检测镜面的校正方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0956396A FR2950155B1 (fr) 2009-09-17 2009-09-17 Procede d'alignement pour controler un miroir

Publications (2)

Publication Number Publication Date
FR2950155A1 FR2950155A1 (fr) 2011-03-18
FR2950155B1 true FR2950155B1 (fr) 2011-10-14

Family

ID=41606611

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0956396A Expired - Fee Related FR2950155B1 (fr) 2009-09-17 2009-09-17 Procede d'alignement pour controler un miroir

Country Status (5)

Country Link
US (1) US20120170038A1 (fr)
EP (1) EP2478395A1 (fr)
CN (1) CN102695972A (fr)
FR (1) FR2950155B1 (fr)
WO (1) WO2011033211A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102661719B (zh) * 2012-04-16 2014-03-26 中国人民解放军国防科学技术大学 用于非球面子孔径拼接测量的近零位补偿器及面形测量仪和测量方法
US9319665B2 (en) * 2013-06-19 2016-04-19 TrackThings LLC Method and apparatus for a self-focusing camera and eyeglass system
CN105606036B (zh) * 2014-11-20 2018-07-06 中国航空工业第六一八研究所 一种基于表面形貌数据的面形偏差检验方法
DE102015202695A1 (de) 2015-02-13 2016-08-18 Carl Zeiss Smt Gmbh Prüfvorrichtung sowie Verfahren zum Prüfen eines Spiegels
CN106018421B (zh) * 2016-07-07 2019-03-08 脉泽(苏州)智能系统技术有限公司 调整平面元件表面与运动平面平行的方法
CN106907991B (zh) * 2017-02-24 2019-06-07 湖北航天技术研究院总体设计所 一种基于补偿器的离轴非球面镜零位检测对准方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000097650A (ja) * 1998-09-21 2000-04-07 Nikon Corp 非球面形状測定装置
US6559948B1 (en) * 1999-06-30 2003-05-06 Raytheon Company Method for locating a structure using holograms
DE10258248B4 (de) * 2002-12-13 2006-02-23 Carl Zeiss Smt Ag System zur interferometrischen Passeprüfung
JP2005156434A (ja) * 2003-11-27 2005-06-16 Fujinon Corp 計算機ホログラムを用いた光波干渉測定方法およびこれを用いた干渉計装置
US7061626B1 (en) * 2004-05-14 2006-06-13 Carl Zeiss Smt Ag Method of manufacturing an optical element using a hologram
US7643149B2 (en) * 2005-05-24 2010-01-05 Carl Zeiss Smt Ag Method of aligning an optical system
DE102006055070B4 (de) * 2006-11-22 2008-07-31 Carl Zeiss Smt Ag Verfahren und Vorrichtung zum interferometrischen Vermessen einer Form eines Testobjekts
DE102007021953B4 (de) * 2007-05-10 2009-01-29 Carl Zeiss Smt Ag Interferometrische Messvorrichtung zum Vermessen einer Oberfläche eines Prüflings
WO2009006919A1 (fr) * 2007-07-09 2009-01-15 Carl Zeiss Smt Ag Procédé permettant de mesurer une déviation d'une surface optique par rapport à une forme cible

Also Published As

Publication number Publication date
US20120170038A1 (en) 2012-07-05
EP2478395A1 (fr) 2012-07-25
FR2950155A1 (fr) 2011-03-18
WO2011033211A1 (fr) 2011-03-24
CN102695972A (zh) 2012-09-26

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20140530