FR2947628B1 - METHOD FOR MANUFACTURING INTEGRATED CIRCUIT DEFORMATION GAUGE - Google Patents

METHOD FOR MANUFACTURING INTEGRATED CIRCUIT DEFORMATION GAUGE

Info

Publication number
FR2947628B1
FR2947628B1 FR0903227A FR0903227A FR2947628B1 FR 2947628 B1 FR2947628 B1 FR 2947628B1 FR 0903227 A FR0903227 A FR 0903227A FR 0903227 A FR0903227 A FR 0903227A FR 2947628 B1 FR2947628 B1 FR 2947628B1
Authority
FR
France
Prior art keywords
integrated circuit
manufacturing integrated
deformation gauge
circuit deformation
gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0903227A
Other languages
French (fr)
Other versions
FR2947628A1 (en
Inventor
Raymond Buisson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre Technique des Industries Mecaniques CETIM
Original Assignee
Centre Technique des Industries Mecaniques CETIM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Technique des Industries Mecaniques CETIM filed Critical Centre Technique des Industries Mecaniques CETIM
Priority to FR0903227A priority Critical patent/FR2947628B1/en
Publication of FR2947628A1 publication Critical patent/FR2947628A1/en
Application granted granted Critical
Publication of FR2947628B1 publication Critical patent/FR2947628B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Micromachines (AREA)
FR0903227A 2009-07-01 2009-07-01 METHOD FOR MANUFACTURING INTEGRATED CIRCUIT DEFORMATION GAUGE Expired - Fee Related FR2947628B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0903227A FR2947628B1 (en) 2009-07-01 2009-07-01 METHOD FOR MANUFACTURING INTEGRATED CIRCUIT DEFORMATION GAUGE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0903227A FR2947628B1 (en) 2009-07-01 2009-07-01 METHOD FOR MANUFACTURING INTEGRATED CIRCUIT DEFORMATION GAUGE

Publications (2)

Publication Number Publication Date
FR2947628A1 FR2947628A1 (en) 2011-01-07
FR2947628B1 true FR2947628B1 (en) 2011-08-26

Family

ID=41334357

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0903227A Expired - Fee Related FR2947628B1 (en) 2009-07-01 2009-07-01 METHOD FOR MANUFACTURING INTEGRATED CIRCUIT DEFORMATION GAUGE

Country Status (1)

Country Link
FR (1) FR2947628B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113820334B (en) * 2021-10-26 2022-06-21 江西交通职业技术学院 Bridge life cycle management system based on big data processing

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3614678A (en) * 1967-08-11 1971-10-19 Gen Electric Electromechanical filters with integral piezoresistive output and methods of making same
JP2861477B2 (en) * 1991-06-03 1999-02-24 株式会社デンソー Semiconductor strain sensor
US5856722A (en) * 1996-01-02 1999-01-05 Cornell Research Foundation, Inc. Microelectromechanics-based frequency signature sensor
US6332359B1 (en) * 1997-04-24 2001-12-25 Fuji Electric Co., Ltd. Semiconductor sensor chip and method for producing the chip, and semiconductor sensor and package for assembling the sensor

Also Published As

Publication number Publication date
FR2947628A1 (en) 2011-01-07

Similar Documents

Publication Publication Date Title
FR2943175B1 (en) METHOD FOR MANUFACTURING AN ELECTRONIC UNIT AND THE ELECTRONIC UNIT OBTAINED
FR2933884B1 (en) PROCESS FOR MANUFACTURING AN AUBING PIECE
FR2914308B1 (en) PROCESS FOR PRODUCING POLYAMIDE
FR2952008B1 (en) METHOD FOR MANUFACTURING WIPER ARM AND WIPER ARM PRODUCED THEREBY
FR2913421B1 (en) PROCESS FOR PRODUCING DICHLOROPROPANOL
FR2943348B1 (en) PROCESS FOR PRODUCING POLYAMIDE
FR2947197B1 (en) METHOD FOR MANUFACTURING A FORGED PART WITH ADAPTIVE POLISHING
FR2927270B1 (en) PROCESS FOR MANUFACTURING DIRECTED SOLIDIFICATION AUBES
FR2931293B1 (en) PROCESS FOR MANUFACTURING AN EPITAXIA SUPPORT HETEROSTRUCTURE AND CORRESPONDING HETEROSTRUCTURE
FR2903983B1 (en) PROCESS FOR PRODUCING DIESTERS
FR2913816B1 (en) METHOD FOR MANUFACTURING A CAVITE INTERCONNECTION STRUCTURE FOR AN INTEGRATED CIRCUIT
FR2954669B1 (en) METHOD FOR MANUFACTURING AN ELECTRONIC DEVICE FOR TIRES
FR2955581B1 (en) METHOD FOR MANUFACTURING SELF-BREAKING ELASTOMER COMPOSITION
FR2952558B1 (en) PROCESS FOR PRODUCING A TUBULAR METAL PIECE
FR2946695B1 (en) CYLINDER BLOCK AND METHOD FOR MANUFACTURING CYLINDER BLOCK
FR2946795B1 (en) METHOD FOR POSITIONING CHIPS WHEN MANUFACTURING A RECONSTITUTED PLATE
FR2946644B1 (en) PROCESS FOR PRODUCING PENTAFLUOROPROPANE
FR2922887B1 (en) IMPROVED METHOD OF MANUFACTURING DIESTERS.
FR2946645B1 (en) PROCESS FOR PRODUCING HEXAFLUOROPROPANE
FR2942568B1 (en) METHOD FOR MANUFACTURING COMPONENTS
FR2957457B1 (en) METHOD FOR MANUFACTURING MEMORY POINT ANTI-FUSE
FR2927565B1 (en) METHOD FOR MANUFACTURING A TREILLIS BEAM
FR2953860B1 (en) METHOD FOR MANUFACTURING INCONEL 718 TYPE NICKEL SUPERBORTS
FR2926925B1 (en) PROCESS FOR PRODUCING HETEROSTRUCTURES
FR2943176B1 (en) METHOD FOR POSITIONING CHIPS WHEN MANUFACTURING A RECONSTITUTED PLATE

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 8

PLFP Fee payment

Year of fee payment: 9

PLFP Fee payment

Year of fee payment: 10

PLFP Fee payment

Year of fee payment: 11

ST Notification of lapse

Effective date: 20210305