FR2946761B1 - DEFORMABLE MIRROR WITH ALVEOLAR STRUCTURE. - Google Patents

DEFORMABLE MIRROR WITH ALVEOLAR STRUCTURE.

Info

Publication number
FR2946761B1
FR2946761B1 FR0902921A FR0902921A FR2946761B1 FR 2946761 B1 FR2946761 B1 FR 2946761B1 FR 0902921 A FR0902921 A FR 0902921A FR 0902921 A FR0902921 A FR 0902921A FR 2946761 B1 FR2946761 B1 FR 2946761B1
Authority
FR
France
Prior art keywords
deformable mirror
alveolar structure
alveolar
deformable
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0902921A
Other languages
French (fr)
Other versions
FR2946761A1 (en
Inventor
Jean Jacques Ferme
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Europeenne de Systemes Optiques Ste
Original Assignee
Europeenne de Systemes Optiques Ste
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Europeenne de Systemes Optiques Ste filed Critical Europeenne de Systemes Optiques Ste
Priority to FR0902921A priority Critical patent/FR2946761B1/en
Priority to EP10734770A priority patent/EP2443505A1/en
Priority to PCT/FR2010/000445 priority patent/WO2010146256A1/en
Publication of FR2946761A1 publication Critical patent/FR2946761A1/en
Application granted granted Critical
Publication of FR2946761B1 publication Critical patent/FR2946761B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/183—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Astronomy & Astrophysics (AREA)
  • Sustainable Development (AREA)
  • Optical Elements Other Than Lenses (AREA)
FR0902921A 2009-06-16 2009-06-16 DEFORMABLE MIRROR WITH ALVEOLAR STRUCTURE. Active FR2946761B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR0902921A FR2946761B1 (en) 2009-06-16 2009-06-16 DEFORMABLE MIRROR WITH ALVEOLAR STRUCTURE.
EP10734770A EP2443505A1 (en) 2009-06-16 2010-06-15 Deformable mirror with a cellular structure
PCT/FR2010/000445 WO2010146256A1 (en) 2009-06-16 2010-06-15 Deformable mirror with a cellular structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0902921A FR2946761B1 (en) 2009-06-16 2009-06-16 DEFORMABLE MIRROR WITH ALVEOLAR STRUCTURE.

Publications (2)

Publication Number Publication Date
FR2946761A1 FR2946761A1 (en) 2010-12-17
FR2946761B1 true FR2946761B1 (en) 2011-11-25

Family

ID=41510851

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0902921A Active FR2946761B1 (en) 2009-06-16 2009-06-16 DEFORMABLE MIRROR WITH ALVEOLAR STRUCTURE.

Country Status (3)

Country Link
EP (1) EP2443505A1 (en)
FR (1) FR2946761B1 (en)
WO (1) WO2010146256A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2804041A1 (en) * 2013-05-13 2014-11-19 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Deformable optical system and method for controlling the same as well as a lithographic system comprising the deformable optical system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19917519C2 (en) * 1999-04-17 2001-11-15 Dornier Gmbh Large optical mirror in a combined sandwich construction
US7188964B2 (en) * 2003-02-25 2007-03-13 Xinetics, Inc. Integrated actuator meniscus mirror
AU2003282631A1 (en) 2003-11-21 2005-06-08 Nederlandse Organisatie Voor Toegepast- Natuurwetenschappelijk Onderzoek Tno Surface deformation actuation structure
EP1593951B1 (en) 2004-05-04 2014-10-29 Oerlikon Space AG Very stable and very light optical bench and its use in outer space

Also Published As

Publication number Publication date
WO2010146256A1 (en) 2010-12-23
EP2443505A1 (en) 2012-04-25
FR2946761A1 (en) 2010-12-17

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