FR2937425B1 - Structure de filtrage optique en longueur d'onde et capteur d'images associe - Google Patents

Structure de filtrage optique en longueur d'onde et capteur d'images associe

Info

Publication number
FR2937425B1
FR2937425B1 FR0857157A FR0857157A FR2937425B1 FR 2937425 B1 FR2937425 B1 FR 2937425B1 FR 0857157 A FR0857157 A FR 0857157A FR 0857157 A FR0857157 A FR 0857157A FR 2937425 B1 FR2937425 B1 FR 2937425B1
Authority
FR
France
Prior art keywords
image sensor
wave length
optical filtering
filtering structure
length optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0857157A
Other languages
English (en)
Other versions
FR2937425A1 (fr
Inventor
Gilles Grand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0857157A priority Critical patent/FR2937425B1/fr
Priority to US13/124,007 priority patent/US8675280B2/en
Priority to PCT/EP2009/063750 priority patent/WO2010046369A1/fr
Priority to EP09736973A priority patent/EP2347290A1/fr
Publication of FR2937425A1 publication Critical patent/FR2937425A1/fr
Application granted granted Critical
Publication of FR2937425B1 publication Critical patent/FR2937425B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/1462—Coatings
    • H01L27/14621—Colour filter arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14643—Photodiode arrays; MOS imagers
    • H01L27/14645—Colour imagers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Optical Filters (AREA)
FR0857157A 2008-10-22 2008-10-22 Structure de filtrage optique en longueur d'onde et capteur d'images associe Expired - Fee Related FR2937425B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR0857157A FR2937425B1 (fr) 2008-10-22 2008-10-22 Structure de filtrage optique en longueur d'onde et capteur d'images associe
US13/124,007 US8675280B2 (en) 2008-10-22 2009-10-20 Wavelength optical filter structure and associated image sensor
PCT/EP2009/063750 WO2010046369A1 (fr) 2008-10-22 2009-10-20 Structure de filtrage optique en longueur d'onde et capteur d'images associé
EP09736973A EP2347290A1 (fr) 2008-10-22 2009-10-20 Structure de filtrage optique en longueur d'onde et capteur d'images associé

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0857157A FR2937425B1 (fr) 2008-10-22 2008-10-22 Structure de filtrage optique en longueur d'onde et capteur d'images associe

Publications (2)

Publication Number Publication Date
FR2937425A1 FR2937425A1 (fr) 2010-04-23
FR2937425B1 true FR2937425B1 (fr) 2010-12-31

Family

ID=40612818

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0857157A Expired - Fee Related FR2937425B1 (fr) 2008-10-22 2008-10-22 Structure de filtrage optique en longueur d'onde et capteur d'images associe

Country Status (4)

Country Link
US (1) US8675280B2 (fr)
EP (1) EP2347290A1 (fr)
FR (1) FR2937425B1 (fr)
WO (1) WO2010046369A1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010062438A (ja) * 2008-09-05 2010-03-18 Toshiba Corp 固体撮像装置およびその設計方法
FR2994282B1 (fr) 2012-07-31 2014-09-05 Commissariat Energie Atomique Structure de filtrage optique dans le domaine visible et/ou infrarouge
US9448346B2 (en) * 2012-12-19 2016-09-20 Viavi Solutions Inc. Sensor device including one or more metal-dielectric optical filters
US9568362B2 (en) 2012-12-19 2017-02-14 Viavi Solutions Inc. Spectroscopic assembly and method
US10197716B2 (en) 2012-12-19 2019-02-05 Viavi Solutions Inc. Metal-dielectric optical filter, sensor device, and fabrication method
FR3009629B1 (fr) * 2013-08-08 2015-09-11 St Microelectronics Sa Procede de realisation d'un filtre optique multicouches epais au sein d'un circuit integre, et circuit integre comprenant un filtre optique multicouches epais
JP2015060855A (ja) * 2013-09-17 2015-03-30 ソニー株式会社 固体撮像装置およびその製造方法、並びに電子機器
US10078142B2 (en) 2014-03-26 2018-09-18 California Institute Of Technology Sensor integrated metal dielectric filters for solar-blind silicon ultraviolet detectors
TWI700518B (zh) * 2014-06-18 2020-08-01 美商唯亞威方案公司 金屬介電光學濾光器、感測器裝置及製造方法
CN106461833B (zh) * 2014-06-18 2019-09-17 唯亚威通讯技术有限公司 金属-电介质滤光器、传感器设备及制造方法
WO2016130582A1 (fr) * 2015-02-09 2016-08-18 California Institute Of Technology Filtres diélectriques en métal intégrés à des capteurs pour détecteurs d'ultraviolets en silicium pour stores solaires
US9923007B2 (en) 2015-12-29 2018-03-20 Viavi Solutions Inc. Metal mirror based multispectral filter array
US9960199B2 (en) * 2015-12-29 2018-05-01 Viavi Solutions Inc. Dielectric mirror based multispectral filter array
US10170509B2 (en) * 2016-02-12 2019-01-01 Viavi Solutions Inc. Optical filter array
WO2018007368A1 (fr) * 2016-07-05 2018-01-11 Idt Europe Gmbh Capteur de couleurs et son procédé de production
FR3064083B1 (fr) * 2017-03-14 2021-06-04 Commissariat Energie Atomique Filtre interferentiel
JP7427387B2 (ja) * 2019-08-09 2024-02-05 浜松ホトニクス株式会社 光学素子

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2769111A (en) * 1951-07-25 1956-10-30 Philco Corp Optical system
US5189551A (en) * 1989-07-27 1993-02-23 Monsanto Company Solar screening film for a vehicle windshield
DE4407502A1 (de) * 1994-03-07 1995-09-14 Leybold Ag Mehrlagige Beschichtung
US6031653A (en) * 1997-08-28 2000-02-29 California Institute Of Technology Low-cost thin-metal-film interference filters
TW200524150A (en) 2004-01-15 2005-07-16 Matsushita Electric Ind Co Ltd Solid state imaging device, process for fabricating solid state imaging device and camera employing same
US7315667B2 (en) * 2005-12-22 2008-01-01 Palo Alto Research Center Incorporated Propagating light to be sensed
FR2904432B1 (fr) * 2006-07-25 2008-10-24 Commissariat Energie Atomique Structure matricielle de filtrage optique et capteur d'images associe
CN104316987A (zh) * 2006-08-09 2015-01-28 光学解决方案纳米光子学有限责任公司 光学滤波器及其生产方法以及用于检查电磁辐射的装置

Also Published As

Publication number Publication date
WO2010046369A1 (fr) 2010-04-29
FR2937425A1 (fr) 2010-04-23
US20110204463A1 (en) 2011-08-25
US8675280B2 (en) 2014-03-18
EP2347290A1 (fr) 2011-07-27

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Legal Events

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ST Notification of lapse

Effective date: 20160630