FR2936091B1 - Dispositif de generation d'un faisceau d'ions avec filtre magnetique. - Google Patents

Dispositif de generation d'un faisceau d'ions avec filtre magnetique.

Info

Publication number
FR2936091B1
FR2936091B1 FR0856189A FR0856189A FR2936091B1 FR 2936091 B1 FR2936091 B1 FR 2936091B1 FR 0856189 A FR0856189 A FR 0856189A FR 0856189 A FR0856189 A FR 0856189A FR 2936091 B1 FR2936091 B1 FR 2936091B1
Authority
FR
France
Prior art keywords
ions
generating
magnetic filter
magnetic
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0856189A
Other languages
English (en)
Other versions
FR2936091A1 (fr
Inventor
Ralf Jede
Jacques Gierak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
RAITH GmbH
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0856189A priority Critical patent/FR2936091B1/fr
Application filed by RAITH GmbH, Centre National de la Recherche Scientifique CNRS filed Critical RAITH GmbH
Priority to EP09749164.1A priority patent/EP2342732B1/fr
Priority to PCT/FR2009/051719 priority patent/WO2010029269A1/fr
Priority to US13/063,749 priority patent/US8546768B2/en
Priority to US13/063,742 priority patent/US8664621B2/en
Priority to PCT/FR2009/051720 priority patent/WO2010029270A1/fr
Priority to EP09749165.8A priority patent/EP2342733B1/fr
Publication of FR2936091A1 publication Critical patent/FR2936091A1/fr
Application granted granted Critical
Publication of FR2936091B1 publication Critical patent/FR2936091B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H01J27/024—Extraction optics, e.g. grids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/40—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/15—Means for deflecting or directing discharge
    • H01J2237/152—Magnetic means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
FR0856189A 2008-09-15 2008-09-15 Dispositif de generation d'un faisceau d'ions avec filtre magnetique. Expired - Fee Related FR2936091B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR0856189A FR2936091B1 (fr) 2008-09-15 2008-09-15 Dispositif de generation d'un faisceau d'ions avec filtre magnetique.
PCT/FR2009/051719 WO2010029269A1 (fr) 2008-09-15 2009-09-14 Dispositif de génération d'un faisceau d'ions avec filtre magnétique
US13/063,749 US8546768B2 (en) 2008-09-15 2009-09-14 Device for generating an ion beam with magnetic filter
US13/063,742 US8664621B2 (en) 2008-09-15 2009-09-14 Device for generating an ion beam with magnetic filter
EP09749164.1A EP2342732B1 (fr) 2008-09-15 2009-09-14 Dispositif de génération d'un faisceau d'ions avec filtre magnétique
PCT/FR2009/051720 WO2010029270A1 (fr) 2008-09-15 2009-09-14 Dispositif de génération d'un faisceau d'ions avec piège cryogénique
EP09749165.8A EP2342733B1 (fr) 2008-09-15 2009-09-14 Dispositif de génération d'un faisceau d'ions avec piège cryogénique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0856189A FR2936091B1 (fr) 2008-09-15 2008-09-15 Dispositif de generation d'un faisceau d'ions avec filtre magnetique.

Publications (2)

Publication Number Publication Date
FR2936091A1 FR2936091A1 (fr) 2010-03-19
FR2936091B1 true FR2936091B1 (fr) 2010-10-29

Family

ID=40637176

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0856189A Expired - Fee Related FR2936091B1 (fr) 2008-09-15 2008-09-15 Dispositif de generation d'un faisceau d'ions avec filtre magnetique.

Country Status (1)

Country Link
FR (1) FR2936091B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113808907B (zh) * 2021-09-18 2024-06-18 中国科学院近代物理研究所 用于负氧离子束产生与引出的磁铁结构

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2810736A1 (de) * 1978-03-13 1979-09-27 Max Planck Gesellschaft Feldemissionskathode sowie herstellungsverfahren und verwendung hierfuer
JPS60133635A (ja) * 1983-12-21 1985-07-16 Fujitsu Ltd 電界電離型イオン源
US6294862B1 (en) * 1998-05-19 2001-09-25 Eaton Corporation Multi-cusp ion source
FR2823005B1 (fr) * 2001-03-28 2003-05-16 Centre Nat Rech Scient Dispositif de generation d'un faisceau d'ions et procede de reglage de ce faisceau

Also Published As

Publication number Publication date
FR2936091A1 (fr) 2010-03-19

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Legal Events

Date Code Title Description
TP Transmission of property

Owner name: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, FR

Effective date: 20121025

PLFP Fee payment

Year of fee payment: 9

PLFP Fee payment

Year of fee payment: 10

PLFP Fee payment

Year of fee payment: 11

ST Notification of lapse

Effective date: 20200911