FR2906480B1 - Dispositif de realisation de melanges gazeux. - Google Patents
Dispositif de realisation de melanges gazeux.Info
- Publication number
- FR2906480B1 FR2906480B1 FR0608604A FR0608604A FR2906480B1 FR 2906480 B1 FR2906480 B1 FR 2906480B1 FR 0608604 A FR0608604 A FR 0608604A FR 0608604 A FR0608604 A FR 0608604A FR 2906480 B1 FR2906480 B1 FR 2906480B1
- Authority
- FR
- France
- Prior art keywords
- gaseous mixtures
- making gaseous
- making
- mixtures
- gaseous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
- G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
- G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
- G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
- G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
- G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
- G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
- G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
- G05D11/133—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components with discontinuous action
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Accessories For Mixers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0608604A FR2906480B1 (fr) | 2006-10-02 | 2006-10-02 | Dispositif de realisation de melanges gazeux. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0608604A FR2906480B1 (fr) | 2006-10-02 | 2006-10-02 | Dispositif de realisation de melanges gazeux. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2906480A1 FR2906480A1 (fr) | 2008-04-04 |
FR2906480B1 true FR2906480B1 (fr) | 2009-08-21 |
Family
ID=38293193
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0608604A Expired - Fee Related FR2906480B1 (fr) | 2006-10-02 | 2006-10-02 | Dispositif de realisation de melanges gazeux. |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2906480B1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2940624A1 (fr) * | 2008-12-30 | 2010-07-02 | Akhea | Dispositif melangeur d'au moins deux constituants gazeux |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3515155A (en) * | 1967-02-24 | 1970-06-02 | Air Reduction | Gas mixture proportioner |
JP3442604B2 (ja) * | 1996-02-15 | 2003-09-02 | 株式会社フジキン | 混合ガスの供給方法及び混合ガス供給装置並びにこれらを備えた半導体製造装置 |
US5865206A (en) * | 1997-05-09 | 1999-02-02 | Praxair Technology, Inc. | Process and apparatus for backing-up or supplementing a gas supply system |
-
2006
- 2006-10-02 FR FR0608604A patent/FR2906480B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2906480A1 (fr) | 2008-04-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20100630 |